CH472116A - Method and device for producing a resist pattern on a semiconductor body - Google Patents
Method and device for producing a resist pattern on a semiconductor bodyInfo
- Publication number
- CH472116A CH472116A CH637468A CH637468A CH472116A CH 472116 A CH472116 A CH 472116A CH 637468 A CH637468 A CH 637468A CH 637468 A CH637468 A CH 637468A CH 472116 A CH472116 A CH 472116A
- Authority
- CH
- Switzerland
- Prior art keywords
- producing
- resist pattern
- semiconductor body
- semiconductor
- resist
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/29—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the material, e.g. carbon
- H01L23/293—Organic, e.g. plastic
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Manufacturing & Machinery (AREA)
- Application Of Or Painting With Fluid Materials (AREA)
- Die Bonding (AREA)
- Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
Priority Applications (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH637468A CH472116A (en) | 1968-04-29 | 1968-04-29 | Method and device for producing a resist pattern on a semiconductor body |
DE19681814408 DE1814408A1 (en) | 1968-04-29 | 1968-12-13 | Method and device for producing a resist pattern on a semiconductor body |
JP3323369A JPS5021234B1 (en) | 1968-04-29 | 1969-04-29 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CH637468A CH472116A (en) | 1968-04-29 | 1968-04-29 | Method and device for producing a resist pattern on a semiconductor body |
Publications (1)
Publication Number | Publication Date |
---|---|
CH472116A true CH472116A (en) | 1969-04-30 |
Family
ID=4308573
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH637468A CH472116A (en) | 1968-04-29 | 1968-04-29 | Method and device for producing a resist pattern on a semiconductor body |
Country Status (3)
Country | Link |
---|---|
JP (1) | JPS5021234B1 (en) |
CH (1) | CH472116A (en) |
DE (1) | DE1814408A1 (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS54180547U (en) * | 1978-06-12 | 1979-12-20 | ||
JP6614554B2 (en) | 2016-11-15 | 2019-12-04 | 株式会社スギノマシン | Nozzle cleaning method and nozzle cleaning structure of atomizer |
-
1968
- 1968-04-29 CH CH637468A patent/CH472116A/en not_active IP Right Cessation
- 1968-12-13 DE DE19681814408 patent/DE1814408A1/en active Pending
-
1969
- 1969-04-29 JP JP3323369A patent/JPS5021234B1/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
DE1814408A1 (en) | 1969-11-06 |
JPS5021234B1 (en) | 1975-07-21 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
PL | Patent ceased |