CH462962A - Vorrichtung zur Regelung des Heizfadenstromes in Strahlerzeugungssystemen - Google Patents

Vorrichtung zur Regelung des Heizfadenstromes in Strahlerzeugungssystemen

Info

Publication number
CH462962A
CH462962A CH35768A CH35768A CH462962A CH 462962 A CH462962 A CH 462962A CH 35768 A CH35768 A CH 35768A CH 35768 A CH35768 A CH 35768A CH 462962 A CH462962 A CH 462962A
Authority
CH
Switzerland
Prior art keywords
regulating
beam generating
generating systems
filament flow
filament
Prior art date
Application number
CH35768A
Other languages
German (de)
English (en)
Inventor
Russell Barber Robert
Chialin Lang Paul
Loeffler Heinz
Original Assignee
Ibm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ibm filed Critical Ibm
Publication of CH462962A publication Critical patent/CH462962A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J3/00—Details of electron-optical or ion-optical arrangements or of ion traps common to two or more basic types of discharge tubes or lamps
    • H01J3/02—Electron guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00—Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46—Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/52—Arrangements for controlling intensity of ray or beam, e.g. for modulation
CH35768A 1967-01-13 1968-01-11 Vorrichtung zur Regelung des Heizfadenstromes in Strahlerzeugungssystemen CH462962A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US609224A US3413517A (en) 1967-01-13 1967-01-13 Filament current control by a superposed dithering voltage

Publications (1)

Publication Number Publication Date
CH462962A true CH462962A (de) 1968-09-30

Family

ID=24439854

Family Applications (1)

Application Number Title Priority Date Filing Date
CH35768A CH462962A (de) 1967-01-13 1968-01-11 Vorrichtung zur Regelung des Heizfadenstromes in Strahlerzeugungssystemen

Country Status (8)

Country Link
US (1) US3413517A (pm)
BE (1) BE708599A (pm)
CH (1) CH462962A (pm)
DE (1) DE1591234C3 (pm)
FR (1) FR1555891A (pm)
GB (1) GB1148426A (pm)
NL (1) NL6800569A (pm)
SE (1) SE338372B (pm)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1152224A (en) * 1967-05-15 1969-05-14 Vickers Ltd Electron-Beam Welding
DE2100506C3 (de) * 1970-01-09 1974-02-07 Hitachi, Ltd., Tokio Ionenquelle insbesondere für Ionen-Mikroanalysatoren
DE221138C (pm) * 1971-04-30
US3760279A (en) * 1971-09-16 1973-09-18 United States Steel Corp Beam current limiting circuit
US3780256A (en) * 1972-08-08 1973-12-18 Atomic Energy Commission Method for producing spike-free electron beam partial penetration welds
US3801792A (en) * 1973-05-23 1974-04-02 Bell Telephone Labor Inc Electron beam apparatus
US4020318A (en) * 1975-01-24 1977-04-26 The Welding Institute Electron beam generators
DE2637628C2 (de) * 1976-08-20 1982-03-11 Siemens AG, 1000 Berlin und 8000 München Schaltungsanordnung zum Speisen der Kathodenheizung von Röhren, insbesondere von Fernsehaufnahmeröhren, mit Gleichstrom
US4167676A (en) * 1978-02-21 1979-09-11 Bell Telephone Laboratories, Incorporated Variable-spot scanning in an electron beam exposure system
DE2844183C2 (de) * 1978-10-10 1984-09-13 Messer Griesheim Gmbh, 6000 Frankfurt Verfahren und Einrichtung zum Einstellen des Kathodenheizstromes in einem technischen Elektronenstrahl-Gerät
JPS5731134A (en) * 1980-08-01 1982-02-19 Hitachi Ltd Drawing device by electron beam
US4464564A (en) * 1982-10-27 1984-08-07 Conoco Inc. Current controller for heating stage on leitz microscope
US4743767A (en) * 1985-09-09 1988-05-10 Applied Materials, Inc. Systems and methods for ion implantation
US4754200A (en) * 1985-09-09 1988-06-28 Applied Materials, Inc. Systems and methods for ion source control in ion implanters
GB201904168D0 (en) * 2019-03-26 2019-05-08 Nikon Metrology Nv Method of setting a filament demand in an x-ray apparatus, controller, x-ray apparatus, control program and storage medium

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL244036A (pm) * 1958-10-27
US3072822A (en) * 1961-05-19 1963-01-08 Julian C Holmes Emission current regulator
US3275883A (en) * 1963-11-01 1966-09-27 Gen Electric Emission current regulator for ion gauge
US3315124A (en) * 1964-08-14 1967-04-18 Gen Electric Transistorized constant emission current regulator using a resonant transformer in the power supply
US3346769A (en) * 1965-10-07 1967-10-10 Nat Res Corp Orbiting vacuum pump power supply with a filament current regulator

Also Published As

Publication number Publication date
GB1148426A (en) 1969-04-10
FR1555891A (pm) 1969-01-31
NL6800569A (pm) 1968-07-15
US3413517A (en) 1968-11-26
BE708599A (pm) 1968-05-02
DE1591234A1 (de) 1970-08-20
DE1591234B2 (de) 1975-03-20
SE338372B (pm) 1971-09-06
DE1591234C3 (de) 1975-10-23

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