CH440760A - Method for material analysis in a secondary electron emission microscope and secondary electron emission microscope for carrying out the method - Google Patents

Method for material analysis in a secondary electron emission microscope and secondary electron emission microscope for carrying out the method

Info

Publication number
CH440760A
CH440760A CH1305365A CH1305365A CH440760A CH 440760 A CH440760 A CH 440760A CH 1305365 A CH1305365 A CH 1305365A CH 1305365 A CH1305365 A CH 1305365A CH 440760 A CH440760 A CH 440760A
Authority
CH
Switzerland
Prior art keywords
electron emission
secondary electron
emission microscope
carrying
material analysis
Prior art date
Application number
CH1305365A
Other languages
German (de)
Inventor
Moellenstedt Gottfried Dr Prof
Helmut Dr Seiler
Wodsak Wilfried
Original Assignee
Balzers Patent Beteilig Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority to NL134392D priority Critical patent/NL134392C/xx
Application filed by Balzers Patent Beteilig Ag filed Critical Balzers Patent Beteilig Ag
Priority to CH1305365A priority patent/CH440760A/en
Priority to NL6515902A priority patent/NL6515902A/xx
Priority to DE19661598130 priority patent/DE1598130C3/en
Publication of CH440760A publication Critical patent/CH440760A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/252—Tubes for spot-analysing by electron or ion beams; Microanalysers
CH1305365A 1965-09-21 1965-09-21 Method for material analysis in a secondary electron emission microscope and secondary electron emission microscope for carrying out the method CH440760A (en)

Priority Applications (4)

Application Number Priority Date Filing Date Title
NL134392D NL134392C (en) 1965-09-21
CH1305365A CH440760A (en) 1965-09-21 1965-09-21 Method for material analysis in a secondary electron emission microscope and secondary electron emission microscope for carrying out the method
NL6515902A NL6515902A (en) 1965-09-21 1965-12-07
DE19661598130 DE1598130C3 (en) 1965-09-21 1966-08-19 Method and device for material analysis in a secondary electron emission microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH1305365A CH440760A (en) 1965-09-21 1965-09-21 Method for material analysis in a secondary electron emission microscope and secondary electron emission microscope for carrying out the method

Publications (1)

Publication Number Publication Date
CH440760A true CH440760A (en) 1967-07-31

Family

ID=4388878

Family Applications (1)

Application Number Title Priority Date Filing Date
CH1305365A CH440760A (en) 1965-09-21 1965-09-21 Method for material analysis in a secondary electron emission microscope and secondary electron emission microscope for carrying out the method

Country Status (3)

Country Link
CH (1) CH440760A (en)
DE (1) DE1598130C3 (en)
NL (2) NL6515902A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3249005T1 (en) * 1981-09-01 1983-11-17 Commonwealth Scientific And Industrial Research Organization, Campbell METHOD AND DEVICE FOR IMAGE GENERATION
US4843330A (en) * 1986-10-30 1989-06-27 International Business Machines Corporation Electron beam contactless testing system with grid bias switching

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE3249005T1 (en) * 1981-09-01 1983-11-17 Commonwealth Scientific And Industrial Research Organization, Campbell METHOD AND DEVICE FOR IMAGE GENERATION
US4843330A (en) * 1986-10-30 1989-06-27 International Business Machines Corporation Electron beam contactless testing system with grid bias switching

Also Published As

Publication number Publication date
DE1598130A1 (en) 1971-02-18
NL6515902A (en) 1967-03-22
DE1598130C3 (en) 1974-02-21
NL134392C (en)
DE1598130B2 (en) 1973-07-26

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