CH403438A - Verfahren zum gezielten Dotieren - Google Patents
Verfahren zum gezielten DotierenInfo
- Publication number
- CH403438A CH403438A CH1475561A CH1475561A CH403438A CH 403438 A CH403438 A CH 403438A CH 1475561 A CH1475561 A CH 1475561A CH 1475561 A CH1475561 A CH 1475561A CH 403438 A CH403438 A CH 403438A
- Authority
- CH
- Switzerland
- Prior art keywords
- targeted doping
- doping
- targeted
- Prior art date
Links
Classifications
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B15/00—Single-crystal growth by pulling from a melt, e.g. Czochralski method
- C30B15/20—Controlling or regulating
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B13/00—Single-crystal growth by zone-melting; Refining by zone-melting
- C30B13/08—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone
- C30B13/10—Single-crystal growth by zone-melting; Refining by zone-melting adding crystallising materials or reactants forming it in situ to the molten zone with addition of doping materials
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S252/00—Compositions
- Y10S252/95—Doping agent source material
Landscapes
- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Crystallography & Structural Chemistry (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| DEW29154A DE1156384B (de) | 1960-12-23 | 1960-12-23 | Verfahren zum Dotieren von hochreinen Stoffen |
| DEW29190A DE1235868B (de) | 1960-12-23 | 1960-12-30 | Verfahren zum Dotieren von hochreinen Stoffen |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CH403438A true CH403438A (de) | 1965-11-30 |
Family
ID=26002408
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CH1475561A CH403438A (de) | 1960-12-23 | 1961-12-21 | Verfahren zum gezielten Dotieren |
Country Status (5)
| Country | Link |
|---|---|
| US (1) | US3211654A (de) |
| BE (1) | BE611877A (de) |
| CH (1) | CH403438A (de) |
| DE (2) | DE1156384B (de) |
| GB (1) | GB987632A (de) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3514348A (en) * | 1967-05-10 | 1970-05-26 | Ncr Co | Method for making semiconductor devices |
| US4040890A (en) * | 1975-06-27 | 1977-08-09 | Bell Telephone Laboratories, Incorporated | Neodymium oxide doped yttrium aluminum garnet optical fiber |
| DE2623350A1 (de) * | 1976-05-25 | 1977-12-08 | Wacker Chemitronic | Verfahren zur bestimmung des wirksamen dotierstoffgehaltes von wasserstoff fuer die halbleiterherstellung |
| US4186046A (en) * | 1976-09-29 | 1980-01-29 | The United States Of America As Represented By The Secretary Of The Army | Growing doped single crystal ceramic materials |
| DE102018109571B4 (de) * | 2018-04-20 | 2021-09-02 | Karlsruher Institut für Technologie | Verfahren zum Dotieren von Halbleitern |
| CN113703411B (zh) * | 2021-08-31 | 2022-08-30 | 亚洲硅业(青海)股份有限公司 | 多晶硅生长过程监测系统、方法及多晶硅生产系统 |
Family Cites Families (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3125532A (en) * | 1964-03-17 | Method of doping semiconductor | ||
| NL168491B (de) * | 1951-11-16 | Roussel-Uclaf, Societe Anonyme Te Parijs. | ||
| US2810052A (en) * | 1953-08-28 | 1957-10-15 | Rca Corp | Electrical devices, including cadmium sulphide and cadmium selenide containing trivalent cations |
| US2916678A (en) * | 1954-06-23 | 1959-12-08 | Rca Corp | Single crystal photoconducting photocells and methods of preparation thereof |
| NL99619C (de) * | 1955-06-28 | |||
| AT209955B (de) * | 1958-06-14 | 1960-07-11 | Siemens Ag | Verfahren zur Dotierung von Silizium für Halbleiteranordnungen |
| NL255390A (de) * | 1958-09-20 | 1900-01-01 |
-
1960
- 1960-12-23 DE DEW29154A patent/DE1156384B/de active Pending
- 1960-12-30 DE DEW29190A patent/DE1235868B/de active Pending
-
1961
- 1961-12-21 CH CH1475561A patent/CH403438A/de unknown
- 1961-12-21 US US161126A patent/US3211654A/en not_active Expired - Lifetime
- 1961-12-21 GB GB45898/61A patent/GB987632A/en not_active Expired
- 1961-12-22 BE BE611877A patent/BE611877A/fr unknown
Also Published As
| Publication number | Publication date |
|---|---|
| GB987632A (en) | 1965-03-31 |
| DE1235868B (de) | 1967-03-09 |
| DE1156384B (de) | 1963-10-31 |
| BE611877A (fr) | 1962-06-18 |
| US3211654A (en) | 1965-10-12 |
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