CH392900A - Device for pan-less zone pulling - Google Patents

Device for pan-less zone pulling

Info

Publication number
CH392900A
CH392900A CH647860A CH647860A CH392900A CH 392900 A CH392900 A CH 392900A CH 647860 A CH647860 A CH 647860A CH 647860 A CH647860 A CH 647860A CH 392900 A CH392900 A CH 392900A
Authority
CH
Switzerland
Prior art keywords
pan
less zone
zone pulling
pulling
less
Prior art date
Application number
CH647860A
Other languages
German (de)
Inventor
Rummel Theodor Dr Prof
Heim Max
Schauer Willibald
Pfeifer Fritz
Original Assignee
Siemens Ag
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Siemens Ag filed Critical Siemens Ag
Publication of CH392900A publication Critical patent/CH392900A/en

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C30CRYSTAL GROWTH
    • C30BSINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
    • C30B13/00Single-crystal growth by zone-melting; Refining by zone-melting
    • C30B13/32Mechanisms for moving either the charge or the heater
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1032Seed pulling
    • Y10T117/1072Seed pulling including details of means providing product movement [e.g., shaft guides, servo means]
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10TTECHNICAL SUBJECTS COVERED BY FORMER US CLASSIFICATION
    • Y10T117/00Single-crystal, oriented-crystal, and epitaxy growth processes; non-coating apparatus therefor
    • Y10T117/10Apparatus
    • Y10T117/1024Apparatus for crystallization from liquid or supercritical state
    • Y10T117/1076Apparatus for crystallization from liquid or supercritical state having means for producing a moving solid-liquid-solid zone

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Materials Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
  • Furnace Details (AREA)
  • Manufacture And Refinement Of Metals (AREA)
  • Crystals, And After-Treatments Of Crystals (AREA)
CH647860A 1959-06-12 1960-06-07 Device for pan-less zone pulling CH392900A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DES63435A DE1138375B (en) 1959-06-12 1959-06-12 Device for changing the cross-section of the rod during crucible-free zone drawing

Publications (1)

Publication Number Publication Date
CH392900A true CH392900A (en) 1965-05-31

Family

ID=7496384

Family Applications (1)

Application Number Title Priority Date Filing Date
CH647860A CH392900A (en) 1959-06-12 1960-06-07 Device for pan-less zone pulling

Country Status (6)

Country Link
US (1) US3160478A (en)
BE (1) BE591713A (en)
CH (1) CH392900A (en)
DE (1) DE1138375B (en)
GB (1) GB922286A (en)
NL (2) NL250401A (en)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3291570A (en) * 1963-10-22 1966-12-13 Siemens Ag Apparatus for crucible-free zone melting of crystalline rods, particularly of semiconductor rods
DE1264399B (en) * 1965-06-10 1968-03-28 Siemens Ag Device for crucible-free zone melting
US3494742A (en) * 1968-12-23 1970-02-10 Western Electric Co Apparatus for float zone melting fusible material
DE2640377A1 (en) * 1976-09-08 1978-03-09 Leybold Heraeus Gmbh & Co Kg DEVICE FOR ZONE PULLING OF SINGLE CRYSTAL BARS
US5217565A (en) * 1991-11-13 1993-06-08 Wisconsin Alumni Research Foundation Contactless heater floating zone refining and crystal growth

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2972525A (en) * 1953-02-26 1961-02-21 Siemens Ag Crucible-free zone melting method and apparatus for producing and processing a rod-shaped body of crystalline substance, particularly semiconductor substance
AT194444B (en) * 1953-02-26 1958-01-10 Siemens Ag Method and device for treating an elongated semiconductor crystal arrangement
DE1153908B (en) * 1958-04-22 1963-09-05 Siemens Ag Method and device for crucible-free zone melting with changing the spacing of the rod ends

Also Published As

Publication number Publication date
NL250401A (en)
NL113496C (en)
DE1138375B (en) 1962-10-25
GB922286A (en) 1963-03-27
BE591713A (en) 1960-10-03
US3160478A (en) 1964-12-08

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