Classifications

• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
  • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
  • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
  • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
  • H01L21/24—Alloying of impurity materials, e.g. doping materials, electrode materials, with a semiconductor body
  • H01L21/248—Apparatus specially adapted for the alloying
• • H—ELECTRICITY
  • H01—ELECTRIC ELEMENTS
  • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
  • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof

Landscapes

• Engineering & Computer Science (AREA)
• Physics & Mathematics (AREA)
• Condensed Matter Physics & Semiconductors (AREA)
• General Physics & Mathematics (AREA)
• Manufacturing & Machinery (AREA)
• Computer Hardware Design (AREA)
• Microelectronics & Electronic Packaging (AREA)
• Power Engineering (AREA)
• Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
• Hall/Mr Elements (AREA)

Applications Claiming Priority (1)

Publications (1)

Family

ID=19751118

Family Applications (1)

Country Status (5)

Families Citing this family (2)

Family Cites Families (1)

• 0
  • NL NL224747D patent/NL224747A/xx unknown
  • NL NL111325D patent/NL111325C/xx active
• 1959
  • 1959-02-03 DE DEN16203A patent/DE1107831B/en active Pending
  • 1959-02-04 GB GB394859A patent/GB905352A/en not_active Expired
  • 1959-02-04 CH CH6911859A patent/CH372758A/en unknown
  • 1959-02-05 FR FR785884A patent/FR1215500A/en not_active Expired

Also Published As

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