CH356554A - Ionen-Getter-Pumpe - Google Patents
Ionen-Getter-PumpeInfo
- Publication number
- CH356554A CH356554A CH356554DA CH356554A CH 356554 A CH356554 A CH 356554A CH 356554D A CH356554D A CH 356554DA CH 356554 A CH356554 A CH 356554A
- Authority
- CH
- Switzerland
- Prior art keywords
- getter pump
- ion getter
- ion
- pump
- getter
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
- H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
- H01J41/14—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes
- H01J41/16—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps with ionisation by means of thermionic cathodes using gettering substances
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DEA28089A DE1094400B (de) | 1957-10-12 | 1957-10-12 | Ionen-Getter-Pumpe |
Publications (1)
Publication Number | Publication Date |
---|---|
CH356554A true CH356554A (de) | 1961-08-31 |
Family
ID=6926561
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH356554D CH356554A (de) | 1957-10-12 | 1958-01-15 | Ionen-Getter-Pumpe |
Country Status (5)
Country | Link |
---|---|
US (1) | US2948459A (cs) |
CH (1) | CH356554A (cs) |
DE (1) | DE1094400B (cs) |
GB (1) | GB873906A (cs) |
NL (1) | NL223799A (cs) |
Families Citing this family (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3117247A (en) * | 1961-05-29 | 1964-01-07 | Varian Associates | Vacuum pump |
US3377499A (en) * | 1966-05-16 | 1968-04-09 | Varian Associates | Relatively large consumable pelletized getter source element for sublimation type getter vacuum pumps |
US3515171A (en) * | 1968-07-23 | 1970-06-02 | Sloan Instr Corp | Side pumped vacuum collar |
US6667475B1 (en) * | 2003-01-08 | 2003-12-23 | Applied Materials, Inc. | Method and apparatus for cleaning an analytical instrument while operating the analytical instrument |
US10121627B1 (en) * | 2017-10-26 | 2018-11-06 | Edwards Vacuum Llc | Ion pump noble gas stability using small grain sized cathode material |
Family Cites Families (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US2167852A (en) * | 1935-10-22 | 1939-08-01 | Rca Corp | Electron discharge device |
DE761089C (de) * | 1937-12-31 | 1954-04-29 | Siemens & Halske A G | Mittelbar geheizte Gluehkathode fuer Braunsche Roehren |
DE885763C (de) * | 1942-07-24 | 1953-08-06 | Telefunken Gmbh | Pulverfoermiger, nicht verdampfender Fangstoff fuer elektrische Entladungsgefaesse |
US2894679A (en) * | 1953-11-23 | 1959-07-14 | Wisconsin Alumni Res Found | Pump |
US2850225A (en) * | 1955-11-10 | 1958-09-02 | Wisconsin Alumni Res Found | Pump |
-
0
- NL NL223799D patent/NL223799A/xx unknown
-
1957
- 1957-10-12 DE DEA28089A patent/DE1094400B/de active Pending
-
1958
- 1958-01-15 CH CH356554D patent/CH356554A/de unknown
- 1958-03-04 GB GB6982/58A patent/GB873906A/en not_active Expired
- 1958-07-22 US US750255A patent/US2948459A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
GB873906A (en) | 1961-08-02 |
DE1094400B (de) | 1960-12-08 |
NL223799A (cs) | |
US2948459A (en) | 1960-08-09 |
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