CH335768A - Method and device for producing a high plasma density with a low neutral gas pressure - Google Patents

Method and device for producing a high plasma density with a low neutral gas pressure

Info

Publication number
CH335768A
CH335768A CH335768DA CH335768A CH 335768 A CH335768 A CH 335768A CH 335768D A CH335768D A CH 335768DA CH 335768 A CH335768 A CH 335768A
Authority
CH
Switzerland
Prior art keywords
producing
gas pressure
plasma density
neutral gas
high plasma
Prior art date
Application number
Other languages
German (de)
Inventor
Ardenne Manfred Dipl Phys Von
Original Assignee
Vakutronik Veb
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Vakutronik Veb filed Critical Vakutronik Veb
Publication of CH335768A publication Critical patent/CH335768A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/06—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of cold cathodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J27/00—Ion beam tubes
    • H01J27/02—Ion sources; Ion guns
    • H01J27/08—Ion sources; Ion guns using arc discharge
    • H01J27/10—Duoplasmatrons ; Duopigatrons
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/02—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas
    • H01J41/04—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas with ionisation by means of thermionic cathodes

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Combustion & Propulsion (AREA)
  • Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
  • Electron Sources, Ion Sources (AREA)
CH335768D 1955-05-10 1955-06-02 Method and device for producing a high plasma density with a low neutral gas pressure CH335768A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEA22652A DE1058638B (en) 1955-05-10 1955-05-10 Arrangement for producing a high plasma density with a low neutral gas pressure

Publications (1)

Publication Number Publication Date
CH335768A true CH335768A (en) 1959-01-31

Family

ID=6925237

Family Applications (1)

Application Number Title Priority Date Filing Date
CH335768D CH335768A (en) 1955-05-10 1955-06-02 Method and device for producing a high plasma density with a low neutral gas pressure

Country Status (5)

Country Link
US (1) US2826709A (en)
CH (1) CH335768A (en)
DE (1) DE1058638B (en)
GB (1) GB806787A (en)
NL (1) NL197973A (en)

Families Citing this family (16)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL238660A (en) * 1958-04-28
US2892114A (en) * 1958-05-06 1959-06-23 Wallace D Kilpatrick Continuous plasma generator
US3029199A (en) * 1958-05-20 1962-04-10 William R Baker Plasma device
US2920234A (en) * 1958-05-27 1960-01-05 John S Luce Device and method for producing a high intensity arc discharge
US2920235A (en) * 1958-07-24 1960-01-05 Persa R Bell Method and apparatus for producing intense energetic gas discharges
US2919370A (en) * 1958-10-28 1959-12-29 Plasmadyne Corp Electrodeless plasma torch and method
US3007072A (en) * 1959-01-29 1961-10-31 Gen Electric Radial type arc plasma generator
US3003080A (en) * 1959-05-27 1961-10-03 Richard F Post Apparatus for minimizing energy losses from magnetically confined volumes of hot plasma
US2926276A (en) * 1959-06-02 1960-02-23 Saburo M Moriya Apparatus for the ionization of electrons of flowable materials
GB897577A (en) * 1959-07-15 1962-05-30 Bristol Siddeley Engines Ltd Improvements in or relating to apparatus for producing a jet consisting of a plasma of ions and electrons
US2961559A (en) * 1959-08-28 1960-11-22 Jr John Marshall Methods and means for obtaining hydromagnetically accelerated plasma jet
NL130958C (en) * 1960-03-08
US3164739A (en) * 1960-07-20 1965-01-05 Vakutronik Veb Ion source of a duo-plasmatron
NL278366A (en) * 1961-05-27
US3946332A (en) * 1974-06-13 1976-03-23 Samis Michael A High power density continuous wave plasma glow jet laser system
EP4016035A1 (en) * 2017-03-13 2022-06-22 Canon Anelva Corporation Cold cathode ionization gauge and cold cathode ionization gauge cartridge

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1498536A (en) * 1920-08-02 1924-06-24 Baruch Sydney Norton Apparatus for producing continuous electrical oscillations
GB335537A (en) * 1928-10-03 1930-09-24 Julius Edgar Lilienfeld Improvements relating to vacuum tubes of the auto-electronic or non-thermic type
US2217187A (en) * 1936-02-01 1940-10-08 Raytheon Mfg Co Electrical discharge apparatus
NL59155C (en) * 1940-07-27
US2352657A (en) * 1941-06-09 1944-07-04 Teletype Corp Electromagnetically controlled thermionic relay
US2440851A (en) * 1944-03-08 1948-05-04 Rca Corp Electron discharge device of the magnetron type
US2502236A (en) * 1945-09-12 1950-03-28 Raytheon Mfg Co Gaseous discharge device
US2712097A (en) * 1950-04-11 1955-06-28 Auwaerter Max High Vacuum Measuring Device

Also Published As

Publication number Publication date
US2826709A (en) 1958-03-11
NL197973A (en)
DE1058638B (en) 1959-06-04
GB806787A (en) 1958-12-31

Similar Documents

Publication Publication Date Title
CH335768A (en) Method and device for producing a high plasma density with a low neutral gas pressure
AT283570B (en) Process for producing a methane-containing gas
CH331527A (en) Method for producing a sealing material
CH469369A (en) Process for the production of a gas diffusion membrane structure
CH392195A (en) Process for making an electrolyte
AT196333B (en) Method and device for the production of steel pipes
CH386015A (en) Device for generating a high-energy gas plasma
CH381771A (en) Semiconductor component with a gas-tight chamber and method for producing such a semiconductor element and device for carrying out the method
AT278934B (en) Gas electrode for fuel cells and a method for producing such an electrode
CH375799A (en) Method for producing a semiconductor body
CH350466A (en) Process for producing an ester resin
AT243224B (en) Process for the production of a hydrogen-rich gas
CH431722A (en) Method for producing a semiconductor component arrangement
CH385890A (en) Turbomachine blade with connection lugs and method for producing one
CH352352A (en) Process for the production of an iron-graphite composite
AT193228B (en) Method and device for producing a bulge on a straight pipe
AT248593B (en) Process for the continuous production of a combustible methane-rich gas
CH372758A (en) Method and apparatus for manufacturing a semiconductor device
AT194125B (en) Method and device for the production of porous plastic plates
AT199025B (en) Method and device for the production of a surface alloy
CH421609A (en) Process for making a verminicide
AT195539B (en) Method and device for operating a glow discharge
CH385498A (en) Method for producing a single-crystal semiconductor material rod
AT192877B (en) Method and device for the production of a gallery or tunnel tube
AT194574B (en) Formwork lost on both sides and method for producing a formwork element for this purpose