CH309574A - Device for the vapor deposition of a substance on an object in a vacuum. - Google Patents

Device for the vapor deposition of a substance on an object in a vacuum.

Info

Publication number
CH309574A
CH309574A CH309574DA CH309574A CH 309574 A CH309574 A CH 309574A CH 309574D A CH309574D A CH 309574DA CH 309574 A CH309574 A CH 309574A
Authority
CH
Switzerland
Prior art keywords
substance
vacuum
vapor deposition
deposition
vapor
Prior art date
Application number
Other languages
German (de)
Inventor
Gloeilampenfabrieken N Philips
Original Assignee
Philips Nv
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Philips Nv filed Critical Philips Nv
Publication of CH309574A publication Critical patent/CH309574A/en

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C—CHEMISTRY; METALLURGY
    • C03—GLASS; MINERAL OR SLAG WOOL
    • C03C—CHEMICAL COMPOSITION OF GLASSES, GLAZES OR VITREOUS ENAMELS; SURFACE TREATMENT OF GLASS; SURFACE TREATMENT OF FIBRES OR FILAMENTS MADE FROM GLASS, MINERALS OR SLAGS; JOINING GLASS TO GLASS OR OTHER MATERIALS
    • C03C17/00—Surface treatment of glass, not in the form of fibres or filaments, by coating

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Organic Chemistry (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Geochemistry & Mineralogy (AREA)
  • Physical Vapour Deposition (AREA)
CH309574D 1951-11-10 1952-11-08 Device for the vapor deposition of a substance on an object in a vacuum. CH309574A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
NL309574X 1951-11-10

Publications (1)

Publication Number Publication Date
CH309574A true CH309574A (en) 1955-09-15

Family

ID=19783585

Family Applications (1)

Application Number Title Priority Date Filing Date
CH309574D CH309574A (en) 1951-11-10 1952-11-08 Device for the vapor deposition of a substance on an object in a vacuum.

Country Status (5)

Country Link
BE (1) BE515457A (en)
CH (1) CH309574A (en)
FR (1) FR1069111A (en)
GB (1) GB722866A (en)
NL (1) NL78611C (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015107297A1 (en) * 2015-05-11 2016-11-17 Von Ardenne Gmbh processing arrangement

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3094395A (en) * 1959-01-12 1963-06-18 Gen Dynamics Corp Method for evaporating subliming materials
NL253747A (en) * 1959-07-13
US3110620A (en) * 1960-06-28 1963-11-12 Ibm Method of making plural layer thin film devices
US3427432A (en) * 1966-06-10 1969-02-11 Granville Phillips Co Sublimation device
US3367304A (en) * 1967-03-13 1968-02-06 Dow Corning Deposition chamber for manufacture of refractory coated filaments
US3603284A (en) * 1970-01-02 1971-09-07 Ibm Vapor deposition apparatus
US3805736A (en) * 1971-12-27 1974-04-23 Ibm Apparatus for diffusion limited mass transport
US4063974A (en) * 1975-11-14 1977-12-20 Hughes Aircraft Company Planar reactive evaporation method for the deposition of compound semiconducting films
FR2611746B1 (en) * 1987-03-06 1989-06-30 Centre Nat Etd Spatiales DEVICE FOR VACUUM EVAPORATION OF A CONTINUOUS METAL

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102015107297A1 (en) * 2015-05-11 2016-11-17 Von Ardenne Gmbh processing arrangement

Also Published As

Publication number Publication date
FR1069111A (en) 1954-07-05
BE515457A (en)
GB722866A (en) 1955-02-02
NL78611C (en)

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