CH254930A - Device for introducing objects into the vacuum space of a corpuscular beam apparatus. - Google Patents
Device for introducing objects into the vacuum space of a corpuscular beam apparatus.Info
- Publication number
- CH254930A CH254930A CH254930DA CH254930A CH 254930 A CH254930 A CH 254930A CH 254930D A CH254930D A CH 254930DA CH 254930 A CH254930 A CH 254930A
- Authority
- CH
- Switzerland
- Prior art keywords
- beam apparatus
- vacuum space
- corpuscular beam
- introducing objects
- introducing
- Prior art date
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/02—Details
- H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
Landscapes
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
DE254930X | 1941-04-17 |
Publications (1)
Publication Number | Publication Date |
---|---|
CH254930A true CH254930A (en) | 1948-05-31 |
Family
ID=5960800
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CH254930D CH254930A (en) | 1941-04-17 | 1944-01-22 | Device for introducing objects into the vacuum space of a corpuscular beam apparatus. |
Country Status (3)
Country | Link |
---|---|
CH (1) | CH254930A (en) |
FR (1) | FR902550A (en) |
NL (1) | NL115184B (en) |
-
0
- NL NL115184D patent/NL115184B/xx unknown
-
1944
- 1944-01-22 CH CH254930D patent/CH254930A/en unknown
- 1944-03-10 FR FR902550D patent/FR902550A/en not_active Expired
Also Published As
Publication number | Publication date |
---|---|
NL115184B (en) | |
FR902550A (en) | 1945-09-03 |
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