CH254930A - Device for introducing objects into the vacuum space of a corpuscular beam apparatus. - Google Patents

Device for introducing objects into the vacuum space of a corpuscular beam apparatus.

Info

Publication number
CH254930A
CH254930A CH254930DA CH254930A CH 254930 A CH254930 A CH 254930A CH 254930D A CH254930D A CH 254930DA CH 254930 A CH254930 A CH 254930A
Authority
CH
Switzerland
Prior art keywords
beam apparatus
vacuum space
corpuscular beam
introducing objects
introducing
Prior art date
Application number
Other languages
German (de)
Inventor
Fides Gesellschaft Beschraenk
Original Assignee
Fides Gmbh
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fides Gmbh filed Critical Fides Gmbh
Publication of CH254930A publication Critical patent/CH254930A/en

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/18—Vacuum locks ; Means for obtaining or maintaining the desired pressure within the vessel
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/20—Means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
CH254930D 1941-04-17 1944-01-22 Device for introducing objects into the vacuum space of a corpuscular beam apparatus. CH254930A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DE254930X 1941-04-17

Publications (1)

Publication Number Publication Date
CH254930A true CH254930A (en) 1948-05-31

Family

ID=5960800

Family Applications (1)

Application Number Title Priority Date Filing Date
CH254930D CH254930A (en) 1941-04-17 1944-01-22 Device for introducing objects into the vacuum space of a corpuscular beam apparatus.

Country Status (3)

Country Link
CH (1) CH254930A (en)
FR (1) FR902550A (en)
NL (1) NL115184B (en)

Also Published As

Publication number Publication date
NL115184B (en)
FR902550A (en) 1945-09-03

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