CH213914A - Verfahren zur Verdampfung im Vakuum. - Google Patents

Verfahren zur Verdampfung im Vakuum.

Info

Publication number
CH213914A
CH213914A CH213914DA CH213914A CH 213914 A CH213914 A CH 213914A CH 213914D A CH213914D A CH 213914DA CH 213914 A CH213914 A CH 213914A
Authority
CH
Switzerland
Prior art keywords
evaporation
vacuum
Prior art date
Application number
Other languages
German (de)
English (en)
Inventor
Robert Bosch Gesellsch Haftung
Original Assignee
Bosch Gmbh Robert
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from DEB186400D external-priority patent/DE764927C/de
Application filed by Bosch Gmbh Robert filed Critical Bosch Gmbh Robert
Publication of CH213914A publication Critical patent/CH213914A/de

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/30—Electron-beam or ion-beam tubes for localised treatment of objects
    • H01J37/305—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching
    • H01J37/3053—Electron-beam or ion-beam tubes for localised treatment of objects for casting, melting, evaporating, or etching for evaporating or etching
    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/24—Vacuum evaporation
    • C23C14/28—Vacuum evaporation by wave energy or particle radiation
    • C23C14/30—Vacuum evaporation by wave energy or particle radiation by electron bombardment
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S164/00—Metal founding
    • Y10S164/04—Dental

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Toxicology (AREA)
  • Materials Engineering (AREA)
  • Health & Medical Sciences (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Analytical Chemistry (AREA)
  • Physical Vapour Deposition (AREA)
CH213914D 1939-02-22 1940-02-12 Verfahren zur Verdampfung im Vakuum. CH213914A (de)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
DEB186400D DE764927C (de) 1939-02-22 1939-02-22 Verfahren zur Verdampfung im Vakuum

Publications (1)

Publication Number Publication Date
CH213914A true CH213914A (de) 1941-03-31

Family

ID=32236116

Family Applications (1)

Application Number Title Priority Date Filing Date
CH213914D CH213914A (de) 1939-02-22 1940-02-12 Verfahren zur Verdampfung im Vakuum.

Country Status (5)

Country Link
US (1) US2423729A (US06653308-20031125-C00197.png)
CH (1) CH213914A (US06653308-20031125-C00197.png)
FR (1) FR868386A (US06653308-20031125-C00197.png)
IT (1) IT380674A (US06653308-20031125-C00197.png)
NL (1) NL59597C (US06653308-20031125-C00197.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1154583B (de) * 1962-05-08 1963-09-19 Siemens Ag Verfahren zum Verdampfen von Isolierstoffen durch gebuendelte Elektronenstrahlen

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US2554902A (en) * 1948-03-25 1951-05-29 Nat Res Corp Thermionic discharge device control
US2621625A (en) * 1948-03-25 1952-12-16 Nat Res Corp Vapor coating device
DE896827C (de) * 1951-09-08 1953-11-16 Licentia Gmbh Verfahren zur formgebenden Bearbeitung von kristallenen Halbleiterkoerpern
US2754259A (en) * 1952-11-29 1956-07-10 Sprague Electric Co Process and apparatus for growing single crystals
BE542056A (US06653308-20031125-C00197.png) * 1954-10-15
US2935395A (en) * 1955-02-21 1960-05-03 Stauffer Chemical Co High vacuum metallurgical apparatus and method
US2976174A (en) * 1955-03-22 1961-03-21 Burroughs Corp Oriented magnetic cores
IT559958A (US06653308-20031125-C00197.png) * 1955-07-06 1900-01-01
US3009050A (en) * 1957-02-18 1961-11-14 Zeiss Carl Electron beam means for initiating chemical reactions
US2968723A (en) * 1957-04-11 1961-01-17 Zeiss Carl Means for controlling crystal structure of materials
US2997760A (en) * 1957-06-10 1961-08-29 Stauffer Chemical Co Continous vaccum casting process
US3016237A (en) * 1957-10-09 1962-01-09 Commissariat Energie Atomique Installation for the vaporisation, under vacuum, of the volatile constituent of an alloy
US3005859A (en) * 1958-04-24 1961-10-24 Nat Res Corp Production of metals
US3046936A (en) * 1958-06-04 1962-07-31 Nat Res Corp Improvement in vacuum coating apparatus comprising an ion trap for the electron gun thereof
NL239776A (US06653308-20031125-C00197.png) * 1958-08-04
US5552675A (en) * 1959-04-08 1996-09-03 Lemelson; Jerome H. High temperature reaction apparatus
DE1110877B (de) * 1959-04-24 1961-07-13 Heraeus Gmbh W C Verfahren zum Erschmelzen von Metallbloecken mittels Elektronenstrahlen
US3105275A (en) * 1960-05-27 1963-10-01 Stauffer Chemical Co Electron-beam furnace with double-coil magnetic beam guidance
US3080626A (en) * 1960-05-27 1963-03-12 Stauffer Chemical Co Electron-beam furnace with magnetic guidance and flux concentrator
US3087211A (en) * 1960-05-27 1963-04-30 Stauffer Chemical Co Electron-beam furnace with opposedfield magnetic beam guidance
US3040112A (en) * 1960-06-03 1962-06-19 Stauffer Chemical Co Electron-beam furnace with beam emission suppressors
US3101515A (en) * 1960-06-03 1963-08-27 Stauffer Chemical Co Electron beam furnace with magnetically guided axial and transverse beams
US3068309A (en) * 1960-06-22 1962-12-11 Stauffer Chemical Co Electron beam furnace with multiple field guidance of electrons
DE1181840B (de) * 1960-07-12 1964-11-19 Lokomotivbau Elektrotech Elektronenstrahlschmelzofen
GB915657A (en) * 1960-08-22 1963-01-16 Ass Elect Ind Improvements relating to electron beam furnaces
FR1273925A (fr) * 1960-09-06 1961-10-20 Applic Electro Thermiques Soc Procédé de déviation et de modulation en puissance d'un faisceau d'électrons dans un four à bombardement et appareillages de mise en oeuvre d'un tel procédé
US3181209A (en) * 1961-08-18 1965-05-04 Temescal Metallurgical Corp Foil production
US3217135A (en) * 1961-12-29 1965-11-09 Radiation Dynamics Electron beam welding at atmospheric pressures
US3183077A (en) * 1962-01-30 1965-05-11 Bendix Balzers Vacuum Inc Process for vacuum degassing
US3237254A (en) * 1962-06-26 1966-03-01 Stauffer Chemical Co Vacuum casting
DE1176771B (de) * 1963-07-13 1964-08-27 Dr Rer Nat Siegfried Schiller Fokussierhilfe bei Elektronenstrahl-Schmelzoefen und Verfahren zu ihrer Ausfuehrung
DE1515197C3 (de) * 1964-05-06 1974-08-15 Steigerwald Strahltechnik Gmbh, 8000 Muenchen Energiestrahl-Schweiß verfahren
US3404255A (en) * 1965-06-23 1968-10-01 Bendix Corp Source of vaporizable material for bombardment thereof by an electron bombarding means
US3444350A (en) * 1965-10-23 1969-05-13 United Aircraft Corp Jet diffuser plate for electron beam device
CH427744A (de) * 1965-11-26 1967-01-15 Balzers Patent Beteilig Ag Verfahren für die thermische Verdampfung von Stoffgemischen im Vakuum
US3428776A (en) * 1966-01-28 1969-02-18 Gen Electric Method and apparatus for extracting a charged particle beam into a higher pressure atmosphere
US3634647A (en) * 1967-07-14 1972-01-11 Ernest Brock Dale Jr Evaporation of multicomponent alloys

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US1326794A (en) * 1919-12-30 sinding-larsen
US1584728A (en) * 1922-04-18 1926-05-18 Case Res Lab Inc Method of manufacturing mirrors
US1942573A (en) * 1932-03-30 1934-01-09 Eclipse Machine Co Engine starter
US2123706A (en) * 1932-07-20 1938-07-12 Hygrade Sylvania Corp Method of manufacture of reflector bulbs
US2160714A (en) * 1932-07-20 1939-05-30 Hygrade Sylvania Corp Apparatus for interiorly coating lamps, tubes, and the like
US2103623A (en) * 1933-09-20 1937-12-28 Ion Corp Electron discharge device for electronically bombarding materials
FR793015A (fr) * 1934-10-16 1936-01-15 Dispersion Cathodique S A Perfectionnements apportés à la dispersion cathodique
BE417869A (US06653308-20031125-C00197.png) * 1935-10-12
US2097488A (en) * 1936-01-31 1937-11-02 Bell Telephone Labor Inc Piezoelectric device
GB481842A (en) * 1936-06-17 1938-03-18 Bernhard Berghaus Improvements in and relating to the coating of articles by vaporisation of the coating materials
US2153786A (en) * 1936-07-17 1939-04-11 Alexander Process and apparatus for thermal deposition of metals

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE1154583B (de) * 1962-05-08 1963-09-19 Siemens Ag Verfahren zum Verdampfen von Isolierstoffen durch gebuendelte Elektronenstrahlen

Also Published As

Publication number Publication date
IT380674A (US06653308-20031125-C00197.png)
FR868386A (fr) 1941-12-29
NL59597C (US06653308-20031125-C00197.png)
US2423729A (en) 1947-07-08

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