CA982705A - Electron microscope aperture system - Google Patents

Electron microscope aperture system

Info

Publication number
CA982705A
CA982705A CA161,333A CA161333A CA982705A CA 982705 A CA982705 A CA 982705A CA 161333 A CA161333 A CA 161333A CA 982705 A CA982705 A CA 982705A
Authority
CA
Canada
Prior art keywords
electron microscope
aperture system
microscope aperture
electron
microscope
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA161,333A
Other languages
English (en)
Other versions
CA161333S (en
Inventor
Klaus Heinemann
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Aeronautics and Space Administration NASA
Original Assignee
National Aeronautics and Space Administration NASA
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by National Aeronautics and Space Administration NASA filed Critical National Aeronautics and Space Administration NASA
Application granted granted Critical
Publication of CA982705A publication Critical patent/CA982705A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/153—Electron-optical or ion-optical arrangements for the correction of image defects, e.g. stigmators
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Sampling And Sample Adjustment (AREA)
  • Microscoopes, Condenser (AREA)
CA161,333A 1972-01-28 1973-01-16 Electron microscope aperture system Expired CA982705A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US22167072A 1972-01-28 1972-01-28

Publications (1)

Publication Number Publication Date
CA982705A true CA982705A (en) 1976-01-27

Family

ID=22828815

Family Applications (1)

Application Number Title Priority Date Filing Date
CA161,333A Expired CA982705A (en) 1972-01-28 1973-01-16 Electron microscope aperture system

Country Status (6)

Country Link
JP (1) JPS4885069A (cs)
CA (1) CA982705A (cs)
DE (1) DE2302121A1 (cs)
FR (1) FR2169232B1 (cs)
GB (1) GB1416043A (cs)
NL (1) NL7301164A (cs)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS54143579U (cs) * 1978-03-27 1979-10-05
JP3987276B2 (ja) 2000-10-12 2007-10-03 株式会社日立製作所 試料像形成方法
NL1025500C2 (nl) * 2004-02-17 2005-08-19 Fei Co Deeltjesbron met selecteerbare bundelstroom en energiespreiding.
EP2128885A1 (en) 2008-05-26 2009-12-02 FEI Company Charged particle source with integrated energy filter
DE102009016861A1 (de) 2009-04-08 2010-10-21 Carl Zeiss Nts Gmbh Teilchenstrahlmikroskop

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL285301A (cs) * 1961-11-15

Also Published As

Publication number Publication date
FR2169232B1 (cs) 1978-08-04
JPS4885069A (cs) 1973-11-12
DE2302121A1 (de) 1973-08-09
GB1416043A (en) 1975-12-03
FR2169232A1 (cs) 1973-09-07
NL7301164A (cs) 1973-07-31

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