CA980023A - Charged particle beam deflection control yoke - Google Patents
Charged particle beam deflection control yokeInfo
- Publication number
- CA980023A CA980023A CA154,510A CA154510A CA980023A CA 980023 A CA980023 A CA 980023A CA 154510 A CA154510 A CA 154510A CA 980023 A CA980023 A CA 980023A
- Authority
- CA
- Canada
- Prior art keywords
- charged particle
- particle beam
- beam deflection
- deflection control
- control yoke
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J33/00—Discharge tubes with provision for emergence of electrons or ions from the vessel; Lenard tubes
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
-
- G—PHYSICS
- G21—NUCLEAR PHYSICS; NUCLEAR ENGINEERING
- G21K—TECHNIQUES FOR HANDLING PARTICLES OR IONISING RADIATION NOT OTHERWISE PROVIDED FOR; IRRADIATION DEVICES; GAMMA RAY OR X-RAY MICROSCOPES
- G21K1/00—Arrangements for handling particles or ionising radiation, e.g. focusing or moderating
- G21K1/08—Deviation, concentration or focusing of the beam by electric or magnetic means
- G21K1/093—Deviation, concentration or focusing of the beam by electric or magnetic means by magnetic means
Landscapes
- Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- General Engineering & Computer Science (AREA)
- High Energy & Nuclear Physics (AREA)
- Particle Accelerators (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US19859971A | 1971-11-15 | 1971-11-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA980023A true CA980023A (en) | 1975-12-16 |
Family
ID=22734033
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA154,510A Expired CA980023A (en) | 1971-11-15 | 1972-10-17 | Charged particle beam deflection control yoke |
Country Status (13)
Country | Link |
---|---|
US (1) | US3748612A (xx) |
JP (1) | JPS4862376A (xx) |
AR (1) | AR192493A1 (xx) |
BE (1) | BE791387A (xx) |
CA (1) | CA980023A (xx) |
DE (1) | DE2255273C2 (xx) |
DK (1) | DK142799B (xx) |
FR (1) | FR2160419B1 (xx) |
GB (1) | GB1388169A (xx) |
IT (1) | IT973529B (xx) |
NL (1) | NL152399B (xx) |
SE (1) | SE381131B (xx) |
ZA (1) | ZA727371B (xx) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO1982002990A1 (en) * | 1981-02-23 | 1982-09-02 | Oleg Aleksandrovich Gusev | Device for irradiation of objects with electrons |
FR2510340A1 (fr) * | 1981-07-21 | 1983-01-28 | Gusev Oleg | Dispositif pour l'irradiation d'objets par les electrons |
GB2157069A (en) * | 1984-04-02 | 1985-10-16 | Philips Electronic Associated | Step and repeat electron image projector |
US6617586B2 (en) * | 2002-01-18 | 2003-09-09 | Scandinova Ab | Beam delivery system |
US6933507B2 (en) * | 2002-07-17 | 2005-08-23 | Kenneth H. Purser | Controlling the characteristics of implanter ion-beams |
US8604443B2 (en) * | 2009-11-13 | 2013-12-10 | Varian Semiconductor Equipment Associates, Inc. | System and method for manipulating an ion beam |
CN105097062A (zh) * | 2015-09-11 | 2015-11-25 | 中广核达胜加速器技术有限公司 | 一种用于提高能量利用率的加速器扫描盒 |
Family Cites Families (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR847896A (fr) * | 1937-12-23 | 1939-10-18 | Telefunken Gmbh | Système déflecteur de rayons cathodiques |
NL249741A (xx) * | 1959-03-23 | |||
US3469139A (en) * | 1968-02-27 | 1969-09-23 | Ford Motor Co | Apparatus for electron beam control |
US3541328A (en) * | 1969-03-12 | 1970-11-17 | Deuteron Inc | Magnetic spectrograph having means for correcting for aberrations in two mutually perpendicular directions |
-
0
- BE BE791387D patent/BE791387A/xx unknown
-
1971
- 1971-11-15 US US00198599A patent/US3748612A/en not_active Expired - Lifetime
-
1972
- 1972-10-16 ZA ZA727371A patent/ZA727371B/xx unknown
- 1972-10-17 CA CA154,510A patent/CA980023A/en not_active Expired
- 1972-11-07 NL NL72@@21515047A patent/NL152399B/xx unknown
- 1972-11-08 SE SE7214459A patent/SE381131B/xx unknown
- 1972-11-09 GB GB5171972A patent/GB1388169A/en not_active Expired
- 1972-11-11 DE DE2255273A patent/DE2255273C2/de not_active Expired
- 1972-11-13 IT IT53995/72A patent/IT973529B/it active
- 1972-11-13 FR FR7240128A patent/FR2160419B1/fr not_active Expired
- 1972-11-14 DK DK564272AA patent/DK142799B/da not_active IP Right Cessation
- 1972-11-15 AR AR245141A patent/AR192493A1/es active
- 1972-11-15 JP JP47114635A patent/JPS4862376A/ja active Pending
Also Published As
Publication number | Publication date |
---|---|
AU4798672A (en) | 1973-10-04 |
BE791387A (fr) | 1973-03-01 |
GB1388169A (en) | 1975-03-26 |
US3748612A (en) | 1973-07-24 |
AR192493A1 (es) | 1973-02-21 |
DK142799C (xx) | 1981-08-24 |
FR2160419B1 (xx) | 1976-04-23 |
JPS4862376A (xx) | 1973-08-31 |
DE2255273A1 (de) | 1973-05-24 |
DK142799B (da) | 1981-01-26 |
NL152399B (nl) | 1977-02-15 |
NL7215047A (xx) | 1973-05-17 |
SE381131B (sv) | 1975-11-24 |
IT973529B (it) | 1974-06-10 |
FR2160419A1 (xx) | 1973-06-29 |
ZA727371B (en) | 1973-06-27 |
DE2255273C2 (de) | 1983-06-01 |
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