CA961948A - Environment immune high precision capacitive gauging system - Google Patents

Environment immune high precision capacitive gauging system

Info

Publication number
CA961948A
CA961948A CA119,912A CA119912A CA961948A CA 961948 A CA961948 A CA 961948A CA 119912 A CA119912 A CA 119912A CA 961948 A CA961948 A CA 961948A
Authority
CA
Canada
Prior art keywords
high precision
gauging system
precision capacitive
capacitive gauging
environment
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA119,912A
Other languages
English (en)
Other versions
CA119912S (en
Inventor
Robert C. Abbe
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
ADE Corp
Original Assignee
ADE Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by ADE Corp filed Critical ADE Corp
Application granted granted Critical
Publication of CA961948A publication Critical patent/CA961948A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
CA119,912A 1970-08-17 1971-08-05 Environment immune high precision capacitive gauging system Expired CA961948A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6424070A 1970-08-17 1970-08-17

Publications (1)

Publication Number Publication Date
CA961948A true CA961948A (en) 1975-01-28

Family

ID=22054537

Family Applications (1)

Application Number Title Priority Date Filing Date
CA119,912A Expired CA961948A (en) 1970-08-17 1971-08-05 Environment immune high precision capacitive gauging system

Country Status (10)

Country Link
US (1) US3706919A (es)
JP (1) JPS5125146B1 (es)
BE (1) BE771362A (es)
CA (1) CA961948A (es)
CH (1) CH544287A (es)
DE (1) DE2137545C3 (es)
FR (1) FR2104400A5 (es)
GB (1) GB1303229A (es)
NL (1) NL7111232A (es)
SE (2) SE381739B (es)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1577134A (en) * 1976-03-19 1980-10-22 Rca Corp Capacitance distance control apparatus
US4183060A (en) * 1976-03-19 1980-01-08 Rca Corporation Capacitance distance sensor apparatus for video disc player/recorder
US4158171A (en) * 1977-09-14 1979-06-12 Ade Corporation Wafer edge detection system
DE3134342A1 (de) * 1981-08-31 1983-03-10 Ingenieure Block + Seichter, 3000 Hannover Elektronischer kapazitiver messkopf fuer distanzmessungen
US4476430A (en) * 1982-04-05 1984-10-09 Wright Wade S Non-contact sensor for determining moving flat steel strip shape profile
US4502147A (en) * 1982-08-09 1985-02-26 Charles Lescrenier Means for visually indicating an X-ray field
US4539835A (en) * 1983-10-28 1985-09-10 Control Data Corporation Calibration apparatus for capacitance height gauges
US4538069A (en) * 1983-10-28 1985-08-27 Control Data Corporation Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus
US4931962A (en) * 1988-05-13 1990-06-05 Ade Corporation Fixture and nonrepeatable error compensation system
US4918376A (en) * 1989-03-07 1990-04-17 Ade Corporation A.C. capacitive gauging system
US4958129A (en) * 1989-03-07 1990-09-18 Ade Corporation Prealigner probe
US5102280A (en) * 1989-03-07 1992-04-07 Ade Corporation Robot prealigner
US5189376A (en) * 1990-12-17 1993-02-23 Massachusetts Institute Of Technology Method for the measurment of capacitance, with application to linear measurement of distance
US5315259A (en) * 1992-05-26 1994-05-24 Universities Research Association, Inc. Omnidirectional capacitive probe for gauge of having a sensing tip formed as a substantially complete sphere
FR2705145B1 (fr) * 1993-05-10 1995-08-04 Exa Ingenierie Dispositif de mesure de rectitude.
US5537109A (en) * 1993-05-28 1996-07-16 General Scanning, Inc. Capacitive transducing with feedback
US5376890A (en) * 1993-06-10 1994-12-27 Memc Electronic Materials, Inc. Capacitive distance measuring apparatus having liquid ground contact
US5512836A (en) * 1994-07-26 1996-04-30 Chen; Zhenhai Solid-state micro proximity sensor
US5760593A (en) * 1996-02-14 1998-06-02 Bicc Public Limited Company Gap measurement device
US5788376A (en) * 1996-07-01 1998-08-04 General Motors Corporation Temperature sensor
US8791707B2 (en) * 2010-07-19 2014-07-29 Iowa State University Research Foundation, Inc. Concentric coplanar capacitive sensor system with quantitative model
AU2017221859B2 (en) 2016-09-02 2022-05-19 Preco Electronics, LLC Monitoring and alert apparatus and methods for radome performance affected by dirt or debris

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2802178A (en) * 1954-09-22 1957-08-06 Gen Electric Motion detecting device
US3031617A (en) * 1958-08-13 1962-04-24 Donald R Paquette Linear capacitive probe detecting device
US3400331A (en) * 1965-01-18 1968-09-03 Pratt & Whitney Inc Gaging device including a probe having a plurality of concentric and coextensive electrodes
US3515987A (en) * 1967-10-20 1970-06-02 Avco Corp Coplanar dielectric probe having means for minimizing capacitance from stray sources

Also Published As

Publication number Publication date
FR2104400A5 (es) 1972-04-14
BE771362A (fr) 1971-12-31
DE2137545C3 (de) 1980-01-31
SE381739B (sv) 1975-12-15
SE391394B (sv) 1977-02-14
US3706919A (en) 1972-12-19
NL7111232A (es) 1972-02-21
DE2137545B2 (de) 1979-05-17
DE2137545A1 (de) 1972-02-24
GB1303229A (es) 1973-01-17
CH544287A (fr) 1973-11-15
JPS5125146B1 (es) 1976-07-29

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