SE391394B - Anordning for elektronisk detektering av variationer i en forsta parameter som paverkar kapacitansen mellan en sond och en yta - Google Patents

Anordning for elektronisk detektering av variationer i en forsta parameter som paverkar kapacitansen mellan en sond och en yta

Info

Publication number
SE391394B
SE391394B SE7408764A SE876474A SE391394B SE 391394 B SE391394 B SE 391394B SE 7408764 A SE7408764 A SE 7408764A SE 876474 A SE876474 A SE 876474A SE 391394 B SE391394 B SE 391394B
Authority
SE
Sweden
Prior art keywords
probe
affects
parameter
variations
capacity
Prior art date
Application number
SE7408764A
Other languages
English (en)
Swedish (sv)
Inventor
R C Abbe
Original Assignee
Ade Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ade Corp filed Critical Ade Corp
Publication of SE391394B publication Critical patent/SE391394B/xx

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B7/00—Measuring arrangements characterised by the use of electric or magnetic techniques
    • G01B7/02—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness
    • G01B7/023—Measuring arrangements characterised by the use of electric or magnetic techniques for measuring length, width or thickness for measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
    • G01R27/00—Arrangements for measuring resistance, reactance, impedance, or electric characteristics derived therefrom
    • G01R27/02—Measuring real or complex resistance, reactance, impedance, or other two-pole characteristics derived therefrom, e.g. time constant

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)
  • Investigating Or Analyzing Materials By The Use Of Electric Means (AREA)
  • Measurement Of Resistance Or Impedance (AREA)
SE7408764A 1970-08-17 1971-08-16 Anordning for elektronisk detektering av variationer i en forsta parameter som paverkar kapacitansen mellan en sond och en yta SE391394B (sv)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US6424070A 1970-08-17 1970-08-17

Publications (1)

Publication Number Publication Date
SE391394B true SE391394B (sv) 1977-02-14

Family

ID=22054537

Family Applications (2)

Application Number Title Priority Date Filing Date
SE7408764A SE391394B (sv) 1970-08-17 1971-08-16 Anordning for elektronisk detektering av variationer i en forsta parameter som paverkar kapacitansen mellan en sond och en yta
SE7110383A SE381739B (sv) 1970-08-17 1971-08-16 I en med avkenning av kapacitans mellan ett objekt och en metelektrod arbetande dimensionsmetgivare anordnad kapacitiv sond

Family Applications After (1)

Application Number Title Priority Date Filing Date
SE7110383A SE381739B (sv) 1970-08-17 1971-08-16 I en med avkenning av kapacitans mellan ett objekt och en metelektrod arbetande dimensionsmetgivare anordnad kapacitiv sond

Country Status (10)

Country Link
US (1) US3706919A (xx)
JP (1) JPS5125146B1 (xx)
BE (1) BE771362A (xx)
CA (1) CA961948A (xx)
CH (1) CH544287A (xx)
DE (1) DE2137545C3 (xx)
FR (1) FR2104400A5 (xx)
GB (1) GB1303229A (xx)
NL (1) NL7111232A (xx)
SE (2) SE391394B (xx)

Families Citing this family (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1577134A (en) * 1976-03-19 1980-10-22 Rca Corp Capacitance distance control apparatus
US4183060A (en) * 1976-03-19 1980-01-08 Rca Corporation Capacitance distance sensor apparatus for video disc player/recorder
US4158171A (en) * 1977-09-14 1979-06-12 Ade Corporation Wafer edge detection system
DE3134342A1 (de) * 1981-08-31 1983-03-10 Ingenieure Block + Seichter, 3000 Hannover Elektronischer kapazitiver messkopf fuer distanzmessungen
US4476430A (en) * 1982-04-05 1984-10-09 Wright Wade S Non-contact sensor for determining moving flat steel strip shape profile
US4502147A (en) * 1982-08-09 1985-02-26 Charles Lescrenier Means for visually indicating an X-ray field
US4539835A (en) * 1983-10-28 1985-09-10 Control Data Corporation Calibration apparatus for capacitance height gauges
US4538069A (en) * 1983-10-28 1985-08-27 Control Data Corporation Capacitance height gage applied in reticle position detection system for electron beam lithography apparatus
US4931962A (en) * 1988-05-13 1990-06-05 Ade Corporation Fixture and nonrepeatable error compensation system
US5102280A (en) * 1989-03-07 1992-04-07 Ade Corporation Robot prealigner
US4918376A (en) * 1989-03-07 1990-04-17 Ade Corporation A.C. capacitive gauging system
US4958129A (en) * 1989-03-07 1990-09-18 Ade Corporation Prealigner probe
US5189376A (en) * 1990-12-17 1993-02-23 Massachusetts Institute Of Technology Method for the measurment of capacitance, with application to linear measurement of distance
US5315259A (en) * 1992-05-26 1994-05-24 Universities Research Association, Inc. Omnidirectional capacitive probe for gauge of having a sensing tip formed as a substantially complete sphere
FR2705145B1 (fr) * 1993-05-10 1995-08-04 Exa Ingenierie Dispositif de mesure de rectitude.
US5537109A (en) * 1993-05-28 1996-07-16 General Scanning, Inc. Capacitive transducing with feedback
US5376890A (en) * 1993-06-10 1994-12-27 Memc Electronic Materials, Inc. Capacitive distance measuring apparatus having liquid ground contact
US5512836A (en) * 1994-07-26 1996-04-30 Chen; Zhenhai Solid-state micro proximity sensor
US5760593A (en) * 1996-02-14 1998-06-02 Bicc Public Limited Company Gap measurement device
US5788376A (en) * 1996-07-01 1998-08-04 General Motors Corporation Temperature sensor
US8791707B2 (en) * 2010-07-19 2014-07-29 Iowa State University Research Foundation, Inc. Concentric coplanar capacitive sensor system with quantitative model
AU2017221859B2 (en) 2016-09-02 2022-05-19 Preco Electronics, LLC Monitoring and alert apparatus and methods for radome performance affected by dirt or debris

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2802178A (en) * 1954-09-22 1957-08-06 Gen Electric Motion detecting device
US3031617A (en) * 1958-08-13 1962-04-24 Donald R Paquette Linear capacitive probe detecting device
US3400331A (en) * 1965-01-18 1968-09-03 Pratt & Whitney Inc Gaging device including a probe having a plurality of concentric and coextensive electrodes
US3515987A (en) * 1967-10-20 1970-06-02 Avco Corp Coplanar dielectric probe having means for minimizing capacitance from stray sources

Also Published As

Publication number Publication date
GB1303229A (xx) 1973-01-17
BE771362A (fr) 1971-12-31
FR2104400A5 (xx) 1972-04-14
JPS5125146B1 (xx) 1976-07-29
CA961948A (en) 1975-01-28
DE2137545B2 (de) 1979-05-17
NL7111232A (xx) 1972-02-21
DE2137545A1 (de) 1972-02-24
DE2137545C3 (de) 1980-01-31
US3706919A (en) 1972-12-19
CH544287A (fr) 1973-11-15
SE381739B (sv) 1975-12-15

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