CA957782A - Capacitor structure for integrated circuits - Google Patents

Capacitor structure for integrated circuits

Info

Publication number
CA957782A
CA957782A CA100,593A CA100593A CA957782A CA 957782 A CA957782 A CA 957782A CA 100593 A CA100593 A CA 100593A CA 957782 A CA957782 A CA 957782A
Authority
CA
Canada
Prior art keywords
integrated circuits
capacitor structure
capacitor
circuits
integrated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA100,593A
Other languages
English (en)
Other versions
CA100593S (en
Inventor
Theodore Kamprath
Peter Delivorias
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
RCA Corp
Original Assignee
RCA Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by RCA Corp filed Critical RCA Corp
Application granted granted Critical
Publication of CA957782A publication Critical patent/CA957782A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/62—Capacitors having potential barriers
    • H10D1/64—Variable-capacitance diodes, e.g. varactors 
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D1/00—Resistors, capacitors or inductors
    • H10D1/60—Capacitors
    • H10D1/62—Capacitors having potential barriers
    • H10D1/66—Conductor-insulator-semiconductor capacitors, e.g. MOS capacitors
    • H10D1/665—Trench conductor-insulator-semiconductor capacitors, e.g. trench MOS capacitors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/0123—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs
    • H10D84/0126—Integrating together multiple components covered by H10D12/00 or H10D30/00, e.g. integrating multiple IGBTs the components including insulated gates, e.g. IGFETs
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D84/00—Integrated devices formed in or on semiconductor substrates that comprise only semiconducting layers, e.g. on Si wafers or on GaAs-on-Si wafers
    • H10D84/01—Manufacture or treatment
    • H10D84/02—Manufacture or treatment characterised by using material-based technologies
    • H10D84/03—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology
    • H10D84/038—Manufacture or treatment characterised by using material-based technologies using Group IV technology, e.g. silicon technology or silicon-carbide [SiC] technology using silicon technology, e.g. SiGe
CA100,593A 1970-01-26 1970-12-14 Capacitor structure for integrated circuits Expired CA957782A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US582070A 1970-01-26 1970-01-26

Publications (1)

Publication Number Publication Date
CA957782A true CA957782A (en) 1974-11-12

Family

ID=21717914

Family Applications (1)

Application Number Title Priority Date Filing Date
CA100,593A Expired CA957782A (en) 1970-01-26 1970-12-14 Capacitor structure for integrated circuits

Country Status (6)

Country Link
BE (1) BE762014A (cg-RX-API-DMAC10.html)
CA (1) CA957782A (cg-RX-API-DMAC10.html)
DE (1) DE2102650A1 (cg-RX-API-DMAC10.html)
FR (1) FR2077319B1 (cg-RX-API-DMAC10.html)
GB (1) GB1341102A (cg-RX-API-DMAC10.html)
NL (1) NL7100955A (cg-RX-API-DMAC10.html)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP1670064A1 (en) * 2004-12-13 2006-06-14 Infineon Technologies AG Monolithically intergrated capacitor and method for manufacturing thereof

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
NL6706379A (cg-RX-API-DMAC10.html) * 1966-05-04 1967-11-06
NL144778B (nl) * 1966-12-20 1975-01-15 Western Electric Co Werkwijze voor het vervaardigen van een halfgeleiderinrichting door anisotroop etsen alsmede aldus vervaardigde inrichting.
NL6711612A (cg-RX-API-DMAC10.html) * 1966-12-22 1968-06-24
US3611062A (en) * 1968-04-17 1971-10-05 Ibm Passive elements for solid-state integrated circuits
FR2038154B1 (cg-RX-API-DMAC10.html) * 1969-04-02 1974-03-01 Hitachi Ltd

Also Published As

Publication number Publication date
BE762014A (fr) 1971-07-01
DE2102650A1 (de) 1971-08-05
FR2077319A1 (cg-RX-API-DMAC10.html) 1971-10-22
FR2077319B1 (cg-RX-API-DMAC10.html) 1977-01-28
NL7100955A (cg-RX-API-DMAC10.html) 1971-07-28
GB1341102A (en) 1973-12-19

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