CA954717A - Method and apparatus for detecting dust particles - Google Patents

Method and apparatus for detecting dust particles

Info

Publication number
CA954717A
CA954717A CA134,404A CA134404A CA954717A CA 954717 A CA954717 A CA 954717A CA 134404 A CA134404 A CA 134404A CA 954717 A CA954717 A CA 954717A
Authority
CA
Canada
Prior art keywords
dust particles
detecting dust
detecting
particles
dust
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA134,404A
Other languages
English (en)
Other versions
CA134404S (en
Inventor
Renato Rossi
Fred Mast
Jean A. Knus
Ulrich La Roche
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Gretag AG
Original Assignee
Gretag AG
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Gretag AG filed Critical Gretag AG
Application granted granted Critical
Publication of CA954717A publication Critical patent/CA954717A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/84—Systems specially adapted for particular applications
    • G01N21/88—Investigating the presence of flaws or contamination
    • G01N21/94—Investigating contamination, e.g. dust
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N15/00—Investigating characteristics of particles; Investigating permeability, pore-volume or surface-area of porous materials
    • G01N15/02—Investigating particle size or size distribution
    • G01N15/0205—Investigating particle size or size distribution by optical means

Landscapes

  • Chemical & Material Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Health & Medical Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Dispersion Chemistry (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Optical Measuring Cells (AREA)
CA134,404A 1971-02-17 1972-02-10 Method and apparatus for detecting dust particles Expired CA954717A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CH231471A CH535430A (de) 1971-02-17 1971-02-17 Verfahren und Vorrichtung zur Detektierung von staubförmigen Partikeln

Publications (1)

Publication Number Publication Date
CA954717A true CA954717A (en) 1974-09-17

Family

ID=4230893

Family Applications (1)

Application Number Title Priority Date Filing Date
CA134,404A Expired CA954717A (en) 1971-02-17 1972-02-10 Method and apparatus for detecting dust particles

Country Status (6)

Country Link
US (1) US3767306A (de)
CA (1) CA954717A (de)
CH (1) CH535430A (de)
DE (1) DE2206597A1 (de)
FR (1) FR2125896A5 (de)
GB (1) GB1376017A (de)

Families Citing this family (18)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4121247A (en) * 1977-04-21 1978-10-17 Eastman Kodak Company Population and profile display of transparent bodies in a transparent mass
US4215939A (en) * 1977-12-22 1980-08-05 Owens-Illinois, Inc. Glue drop detector
DE2932461A1 (de) * 1979-08-10 1981-02-26 Bosch Gmbh Robert Verfahren zur beurteilung der qualitaet des systems wischblatt/scheibenoberflaeche
US4402607A (en) * 1980-05-16 1983-09-06 Gca Corporation Automatic detector for microscopic dust on large-area, optically unpolished surfaces
US4441124A (en) * 1981-11-05 1984-04-03 Western Electric Company, Inc. Technique for inspecting semiconductor wafers for particulate contamination
US4863268A (en) * 1984-02-14 1989-09-05 Diffracto Ltd. Diffractosight improvements
US4636073A (en) * 1984-10-31 1987-01-13 International Business Machines Corporation Universal calibration standard for surface inspection systems
US5206700A (en) * 1985-03-14 1993-04-27 Diffracto, Ltd. Methods and apparatus for retroreflective surface inspection and distortion measurement
US5061068A (en) * 1990-02-22 1991-10-29 Research Triangle Institute Process for detection of sub-micron particulate contamination on a bare (planar) substrate
US5168322A (en) * 1991-08-19 1992-12-01 Diffracto Ltd. Surface inspection using retro-reflective light field
US5745238A (en) * 1992-12-22 1998-04-28 International Business Machines Corporation Apparatus and method for non-destructive inspection and/or measurement
JPH06349916A (ja) * 1993-04-30 1994-12-22 Applied Materials Inc 基板上の粒子検出方法及び装置
JP3168961B2 (ja) * 1997-10-06 2001-05-21 住友電気工業株式会社 ダイヤモンド基板及びダイヤモンド基板の評価方法並びにダイヤモンド表面弾性波フィルタ
JP3919149B2 (ja) * 2000-03-24 2007-05-23 パイオニア株式会社 光ヘッド装置
DE10221945C1 (de) * 2002-05-13 2003-07-31 Schott Glas Verfahren und Vorrichtung zur Ermittlung von Fehlstellen in einem kontinuierlich fortbewegten Band aus transparentem Material
FR2993372B1 (fr) * 2012-07-13 2015-04-10 Commissariat Energie Atomique Procede et systeme de reconstruction de proprietes optiques d'objets diffractants baignant dans un milieu liquide
CN103604731A (zh) * 2013-11-25 2014-02-26 中煤科工集团重庆研究院有限公司 抗污染的粉尘检测机构
JP7309640B2 (ja) * 2020-03-18 2023-07-18 株式会社東芝 光学検査装置

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2604809A (en) * 1948-06-01 1952-07-29 Mitchell Reginald Fawn Optical means for evaluating surface finish by measurement of differential light scattering in a schlieren type optical system
US2850239A (en) * 1952-08-16 1958-09-02 American Optical Corp Counting device
US2950648A (en) * 1954-03-03 1960-08-30 Georgia Tech Res Inst Microscope for viewing substantially transparent objects
US2918216A (en) * 1956-08-31 1959-12-22 Rca Corp Particle counting apparatus
US2977847A (en) * 1957-04-29 1961-04-04 Univ Ohio State Res Found Optical system for microscopes or similar instruments
US3335413A (en) * 1963-12-19 1967-08-08 Gen Electric Wide band optical recording and narrow band reproduction on a thermo-plastic medium
SE315760B (de) * 1966-04-27 1969-10-06 Saab Ab

Also Published As

Publication number Publication date
DE2206597A1 (de) 1972-08-31
CH535430A (de) 1973-03-31
US3767306A (en) 1973-10-23
GB1376017A (en) 1974-12-04
FR2125896A5 (de) 1972-09-29

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