CA952357A - Optical spatial filtering with multiple light sources - Google Patents

Optical spatial filtering with multiple light sources

Info

Publication number
CA952357A
CA952357A CA112,432A CA112432A CA952357A CA 952357 A CA952357 A CA 952357A CA 112432 A CA112432 A CA 112432A CA 952357 A CA952357 A CA 952357A
Authority
CA
Canada
Prior art keywords
light sources
multiple light
spatial filtering
optical spatial
optical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA112,432A
Other languages
English (en)
Other versions
CA112432S (en
Inventor
Clarence N. Nelson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Eastman Kodak Co
Original Assignee
Eastman Kodak Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Eastman Kodak Co filed Critical Eastman Kodak Co
Application granted granted Critical
Publication of CA952357A publication Critical patent/CA952357A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
    • G03B15/00—Special procedures for taking photographs; Apparatus therefor
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
    • G02B27/46—Systems using spatial filters

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Light Sources And Details Of Projection-Printing Devices (AREA)
  • Optical Systems Of Projection Type Copiers (AREA)
  • Liquid Crystal (AREA)
CA112,432A 1970-06-05 1971-05-07 Optical spatial filtering with multiple light sources Expired CA952357A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US4387070A 1970-06-05 1970-06-05

Publications (1)

Publication Number Publication Date
CA952357A true CA952357A (en) 1974-08-06

Family

ID=21929308

Family Applications (1)

Application Number Title Priority Date Filing Date
CA112,432A Expired CA952357A (en) 1970-06-05 1971-05-07 Optical spatial filtering with multiple light sources

Country Status (6)

Country Link
US (1) US3729252A (fr)
BE (1) BE768164A (fr)
CA (1) CA952357A (fr)
CH (1) CH541155A (fr)
FR (1) FR2095885A5 (fr)
GB (1) GB1355066A (fr)

Families Citing this family (37)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1411655A (en) * 1973-03-22 1975-10-29 Rank Organisation Ltd Optical diffractometers
DE2165270B2 (de) * 1971-12-29 1974-11-14 Eltro Gmbh Gesellschaft Fuer Strahlungstechnik, 6900 Heidelberg Optischer Verstärker für monochromatische Signale
EP0022220B1 (fr) * 1979-07-05 1984-03-07 Olympus Optical Co., Ltd. Elément additionnel d'observation multiple pour endoscope
DE2938224A1 (de) * 1979-09-21 1981-04-09 Siemens AG, 1000 Berlin und 8000 München Optische vorrichtung zum beruehrungslosen schreiben
US4761057A (en) * 1987-02-19 1988-08-02 General Electric Company Aperture member for photo plotting apparatus
US4875751A (en) * 1987-07-20 1989-10-24 Am International Corporation Low loss photoplotter imaging system
US5107534A (en) * 1989-09-25 1992-04-21 Hazeltine Corporation Flat panel display system and method
US5121239A (en) * 1989-10-20 1992-06-09 The United States Of America As Represented By The Secretary Of The Air Force Filter having adjustable spectral transmittance function
JP2995820B2 (ja) 1990-08-21 1999-12-27 株式会社ニコン 露光方法及び方法，並びにデバイス製造方法
US5638211A (en) 1990-08-21 1997-06-10 Nikon Corporation Method and apparatus for increasing the resolution power of projection lithography exposure system
US7656504B1 (en) * 1990-08-21 2010-02-02 Nikon Corporation Projection exposure apparatus with luminous flux distribution
US6897942B2 (en) * 1990-11-15 2005-05-24 Nikon Corporation Projection exposure apparatus and method
US6967710B2 (en) 1990-11-15 2005-11-22 Nikon Corporation Projection exposure apparatus and method
US5719704A (en) 1991-09-11 1998-02-17 Nikon Corporation Projection exposure apparatus
US6885433B2 (en) * 1990-11-15 2005-04-26 Nikon Corporation Projection exposure apparatus and method
US6710855B2 (en) * 1990-11-15 2004-03-23 Nikon Corporation Projection exposure apparatus and method
US6252647B1 (en) 1990-11-15 2001-06-26 Nikon Corporation Projection exposure apparatus
US5305054A (en) * 1991-02-22 1994-04-19 Canon Kabushiki Kaisha Imaging method for manufacture of microdevices
US5673102A (en) * 1991-02-22 1997-09-30 Canon Kabushiki Kaisha Image farming and microdevice manufacturing method and exposure apparatus in which a light source includes four quadrants of predetermined intensity
JPH0567558A (ja) * 1991-09-06 1993-03-19 Nikon Corp 露光方法
WO1993009469A1 (fr) * 1991-10-30 1993-05-13 Fraunhofer-Gesellschaft zur Förderung der angewandten Forschung e.V. Dispositif d'exposition lumineuse
US5155372A (en) * 1991-11-26 1992-10-13 International Business Machines Corporation Optical inspection system utilizing wedge shaped spatial filter
US5264912A (en) * 1992-02-07 1993-11-23 Tencor Instruments Speckle reduction track filter apparatus for optical inspection of patterned substrates
FR2698751B1 (fr) * 1992-11-30 1994-12-30 Peugeot Procédé et dispositif de détection de contours dans une scène mobile par exemple.
US5692066A (en) * 1994-09-20 1997-11-25 Neopath, Inc. Method and apparatus for image plane modulation pattern recognition
EP0782701A4 (fr) * 1994-09-20 1999-08-18 Neopath Inc Dispositif de stabilisation et d'homogeneisation de l'eclairement
US5768017A (en) * 1994-10-31 1998-06-16 International Business Machines Corporation Optical system for producing uniform line illumination
US5959776A (en) * 1996-11-26 1999-09-28 Lsi Logic Corporation Method and apparatus of Fourier manipulation in an optic lens or mirror train
US6096457A (en) * 1998-02-27 2000-08-01 Micron Technology, Inc. Method for optimizing printing of a phase shift mask having a phase shift error
DE69931690T2 (de) 1998-04-08 2007-06-14 Asml Netherlands B.V. Lithographischer Apparat
US6466304B1 (en) 1998-10-22 2002-10-15 Asm Lithography B.V. Illumination device for projection system and method for fabricating
TW587199B (en) 1999-09-29 2004-05-11 Asml Netherlands Bv Lithographic method and apparatus
US6671035B2 (en) * 1999-09-29 2003-12-30 Asml Netherlands B.V. Illuminator for a lithography apparatus, a lithography apparatus comprising such an illuminator, and a manufacturing method employing such a lithography apparatus
TW546550B (en) * 1999-12-13 2003-08-11 Asml Netherlands Bv An illuminator for a lithography apparatus, a lithography apparatus comprising such an illuminator, and a manufacturing method employing such a lithography apparatus
DE10230652A1 (de) * 2002-07-08 2004-01-29 Carl Zeiss Smt Ag Optische Vorrichtung mit einer Beleuchtungslichtquelle
WO2004113993A1 (fr) * 2003-06-26 2004-12-29 Risø National Laboratory Generation d'un front d'onde desire avec une pluralite de filtres de contraste de phase
US8031969B1 (en) * 2004-09-07 2011-10-04 Nvidia Corporation Fourier transform optimized anisotropic filtering

Family Cites Families (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB189911466A (en) * 1899-06-02 1900-04-28 Thomas Thorp Improvements in the Method of and Means for Rendering Photographic and other Pictures of Objects Visible in their Natural or in other Desired Colours.
US2995067A (en) * 1958-12-24 1961-08-08 Gen Electric Optical apparatus
US3470310A (en) * 1966-05-23 1969-09-30 Rca Corp Color image display system utilizing a light valve
US3409872A (en) * 1966-12-05 1968-11-05 Exxon Production Research Co Optical diffraction system for analyzing and processing seismic data
US3504606A (en) * 1967-04-28 1970-04-07 Stanford Research Inst Photography using spatial filtering
US3488190A (en) * 1967-06-22 1970-01-06 Rca Corp Method for preparing color separation printing negatives
US3556639A (en) * 1967-11-07 1971-01-19 Technical Operations Inc Plural source optical apparatus and method for displaying spatially periodically modulated records
US3546374A (en) * 1967-12-28 1970-12-08 Technical Operations Inc Image processing system and method
US3549238A (en) * 1968-02-14 1970-12-22 Technical Operations Inc Optical display or viewing systems with coaxial diffracted and non-diffracted channels
US3572900A (en) * 1969-04-29 1971-03-30 Technical Operations Inc Color tv film reproduction system compatible with diffraction process color projection systems

Also Published As

Publication number Publication date
FR2095885A5 (fr) 1972-02-11
GB1355066A (en) 1974-06-05
BE768164A (fr) 1971-11-03
DE2127380B2 (de) 1975-05-28
CH541155A (fr) 1973-08-31
DE2127380A1 (de) 1971-12-09
US3729252A (en) 1973-04-24

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