BE768164A - Procede et dispositif optique de filtrage des frequences spatiales - Google Patents
Procede et dispositif optique de filtrage des frequences spatialesInfo
- Publication number
- BE768164A BE768164A BE768164A BE768164A BE768164A BE 768164 A BE768164 A BE 768164A BE 768164 A BE768164 A BE 768164A BE 768164 A BE768164 A BE 768164A BE 768164 A BE768164 A BE 768164A
- Authority
- BE
- Belgium
- Prior art keywords
- optical device
- spatial frequencies
- filtering spatial
- filtering
- frequencies
- Prior art date
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03B—APPARATUS OR ARRANGEMENTS FOR TAKING PHOTOGRAPHS OR FOR PROJECTING OR VIEWING THEM; APPARATUS OR ARRANGEMENTS EMPLOYING ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ACCESSORIES THEREFOR
- G03B15/00—Special procedures for taking photographs; Apparatus therefor
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
- G02B27/42—Diffraction optics, i.e. systems including a diffractive element being designed for providing a diffractive effect
- G02B27/46—Systems using spatial filters
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Light Sources And Details Of Projection-Printing Devices (AREA)
- Optical Systems Of Projection Type Copiers (AREA)
- Liquid Crystal (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US4387070A | 1970-06-05 | 1970-06-05 |
Publications (1)
Publication Number | Publication Date |
---|---|
BE768164A true BE768164A (fr) | 1971-11-03 |
Family
ID=21929308
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
BE768164A BE768164A (fr) | 1970-06-05 | 1971-06-04 | Procede et dispositif optique de filtrage des frequences spatiales |
Country Status (6)
Country | Link |
---|---|
US (1) | US3729252A (fr) |
BE (1) | BE768164A (fr) |
CA (1) | CA952357A (fr) |
CH (1) | CH541155A (fr) |
FR (1) | FR2095885A5 (fr) |
GB (1) | GB1355066A (fr) |
Families Citing this family (37)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB1411655A (en) * | 1973-03-22 | 1975-10-29 | Rank Organisation Ltd | Optical diffractometers |
DE2165270B2 (de) * | 1971-12-29 | 1974-11-14 | Eltro Gmbh Gesellschaft Fuer Strahlungstechnik, 6900 Heidelberg | Optischer Verstärker für monochromatische Signale |
DE3066825D1 (en) * | 1979-07-05 | 1984-04-12 | Olympus Optical Co | Multiple viewing attachment for an endoscope |
DE2938224A1 (de) * | 1979-09-21 | 1981-04-09 | Siemens AG, 1000 Berlin und 8000 München | Optische vorrichtung zum beruehrungslosen schreiben |
US4761057A (en) * | 1987-02-19 | 1988-08-02 | General Electric Company | Aperture member for photo plotting apparatus |
US4875751A (en) * | 1987-07-20 | 1989-10-24 | Am International Corporation | Low loss photoplotter imaging system |
US5107534A (en) * | 1989-09-25 | 1992-04-21 | Hazeltine Corporation | Flat panel display system and method |
US5121239A (en) * | 1989-10-20 | 1992-06-09 | The United States Of America As Represented By The Secretary Of The Air Force | Filter having adjustable spectral transmittance function |
US7656504B1 (en) * | 1990-08-21 | 2010-02-02 | Nikon Corporation | Projection exposure apparatus with luminous flux distribution |
JP2995820B2 (ja) | 1990-08-21 | 1999-12-27 | 株式会社ニコン | 露光方法及び方法,並びにデバイス製造方法 |
US5638211A (en) | 1990-08-21 | 1997-06-10 | Nikon Corporation | Method and apparatus for increasing the resolution power of projection lithography exposure system |
US6897942B2 (en) * | 1990-11-15 | 2005-05-24 | Nikon Corporation | Projection exposure apparatus and method |
US6252647B1 (en) | 1990-11-15 | 2001-06-26 | Nikon Corporation | Projection exposure apparatus |
US6710855B2 (en) * | 1990-11-15 | 2004-03-23 | Nikon Corporation | Projection exposure apparatus and method |
US5719704A (en) | 1991-09-11 | 1998-02-17 | Nikon Corporation | Projection exposure apparatus |
US6967710B2 (en) | 1990-11-15 | 2005-11-22 | Nikon Corporation | Projection exposure apparatus and method |
US6885433B2 (en) * | 1990-11-15 | 2005-04-26 | Nikon Corporation | Projection exposure apparatus and method |
US6128068A (en) * | 1991-02-22 | 2000-10-03 | Canon Kabushiki Kaisha | Projection exposure apparatus including an illumination optical system that forms a secondary light source with a particular intensity distribution |
US5305054A (en) * | 1991-02-22 | 1994-04-19 | Canon Kabushiki Kaisha | Imaging method for manufacture of microdevices |
JPH0567558A (ja) * | 1991-09-06 | 1993-03-19 | Nikon Corp | 露光方法 |
US5486851A (en) * | 1991-10-30 | 1996-01-23 | Fraunhofer-Gesellschaft Zur Forderung Der Angewandten Forschung E.V. | Illumination device using a pulsed laser source a Schlieren optical system and a matrix addressable surface light modulator for producing images with undifracted light |
US5155372A (en) * | 1991-11-26 | 1992-10-13 | International Business Machines Corporation | Optical inspection system utilizing wedge shaped spatial filter |
US5264912A (en) * | 1992-02-07 | 1993-11-23 | Tencor Instruments | Speckle reduction track filter apparatus for optical inspection of patterned substrates |
FR2698751B1 (fr) * | 1992-11-30 | 1994-12-30 | Peugeot | Procédé et dispositif de détection de contours dans une scène mobile par exemple. |
ES2121708T1 (es) * | 1994-09-20 | 1998-12-16 | Neopath Inc | Aparato para iluminacion, estabilizacion y homogeneizacion. |
US5692066A (en) * | 1994-09-20 | 1997-11-25 | Neopath, Inc. | Method and apparatus for image plane modulation pattern recognition |
US5768017A (en) * | 1994-10-31 | 1998-06-16 | International Business Machines Corporation | Optical system for producing uniform line illumination |
US5959776A (en) * | 1996-11-26 | 1999-09-28 | Lsi Logic Corporation | Method and apparatus of Fourier manipulation in an optic lens or mirror train |
US6096457A (en) * | 1998-02-27 | 2000-08-01 | Micron Technology, Inc. | Method for optimizing printing of a phase shift mask having a phase shift error |
DE69931690T2 (de) | 1998-04-08 | 2007-06-14 | Asml Netherlands B.V. | Lithographischer Apparat |
US6466304B1 (en) | 1998-10-22 | 2002-10-15 | Asm Lithography B.V. | Illumination device for projection system and method for fabricating |
TW587199B (en) | 1999-09-29 | 2004-05-11 | Asml Netherlands Bv | Lithographic method and apparatus |
US6671035B2 (en) * | 1999-09-29 | 2003-12-30 | Asml Netherlands B.V. | Illuminator for a lithography apparatus, a lithography apparatus comprising such an illuminator, and a manufacturing method employing such a lithography apparatus |
TW546550B (en) * | 1999-12-13 | 2003-08-11 | Asml Netherlands Bv | An illuminator for a lithography apparatus, a lithography apparatus comprising such an illuminator, and a manufacturing method employing such a lithography apparatus |
DE10230652A1 (de) * | 2002-07-08 | 2004-01-29 | Carl Zeiss Smt Ag | Optische Vorrichtung mit einer Beleuchtungslichtquelle |
WO2004113993A1 (fr) * | 2003-06-26 | 2004-12-29 | Risø National Laboratory | Generation d'un front d'onde desire avec une pluralite de filtres de contraste de phase |
US8031969B1 (en) * | 2004-09-07 | 2011-10-04 | Nvidia Corporation | Fourier transform optimized anisotropic filtering |
Family Cites Families (10)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
GB189911466A (en) * | 1899-06-02 | 1900-04-28 | Thomas Thorp | Improvements in the Method of and Means for Rendering Photographic and other Pictures of Objects Visible in their Natural or in other Desired Colours. |
US2995067A (en) * | 1958-12-24 | 1961-08-08 | Gen Electric | Optical apparatus |
US3470310A (en) * | 1966-05-23 | 1969-09-30 | Rca Corp | Color image display system utilizing a light valve |
US3409872A (en) * | 1966-12-05 | 1968-11-05 | Exxon Production Research Co | Optical diffraction system for analyzing and processing seismic data |
US3504606A (en) * | 1967-04-28 | 1970-04-07 | Stanford Research Inst | Photography using spatial filtering |
US3488190A (en) * | 1967-06-22 | 1970-01-06 | Rca Corp | Method for preparing color separation printing negatives |
US3556639A (en) * | 1967-11-07 | 1971-01-19 | Technical Operations Inc | Plural source optical apparatus and method for displaying spatially periodically modulated records |
US3546374A (en) * | 1967-12-28 | 1970-12-08 | Technical Operations Inc | Image processing system and method |
US3549238A (en) * | 1968-02-14 | 1970-12-22 | Technical Operations Inc | Optical display or viewing systems with coaxial diffracted and non-diffracted channels |
US3572900A (en) * | 1969-04-29 | 1971-03-30 | Technical Operations Inc | Color tv film reproduction system compatible with diffraction process color projection systems |
-
1970
- 1970-06-05 US US00043870A patent/US3729252A/en not_active Expired - Lifetime
-
1971
- 1971-05-07 CA CA112,432A patent/CA952357A/en not_active Expired
- 1971-05-27 GB GB1763971A patent/GB1355066A/en not_active Expired
- 1971-06-03 FR FR7120176A patent/FR2095885A5/fr not_active Expired
- 1971-06-04 BE BE768164A patent/BE768164A/fr unknown
- 1971-06-04 CH CH814671A patent/CH541155A/fr not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
US3729252A (en) | 1973-04-24 |
CA952357A (en) | 1974-08-06 |
CH541155A (fr) | 1973-08-31 |
FR2095885A5 (fr) | 1972-02-11 |
DE2127380A1 (de) | 1971-12-09 |
DE2127380B2 (de) | 1975-05-28 |
GB1355066A (en) | 1974-06-05 |
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