CA927317A - Technique for the preparation of iron oxide films by cathodic sputtering - Google Patents

Technique for the preparation of iron oxide films by cathodic sputtering

Info

Publication number
CA927317A
CA927317A CA104771A CA104771A CA927317A CA 927317 A CA927317 A CA 927317A CA 104771 A CA104771 A CA 104771A CA 104771 A CA104771 A CA 104771A CA 927317 A CA927317 A CA 927317A
Authority
CA
Canada
Prior art keywords
technique
preparation
iron oxide
oxide films
cathodic sputtering
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA104771A
Other versions
CA104771S (en
Inventor
G. Peters Frank
R. Sinclair William
V. Sullivan Miles
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of CA927317A publication Critical patent/CA927317A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/54—Absorbers, e.g. of opaque materials
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
    • G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Physical Vapour Deposition (AREA)
  • Surface Treatment Of Glass (AREA)
  • Compounds Of Iron (AREA)
  • Preparing Plates And Mask In Photomechanical Process (AREA)
CA104771A 1970-06-15 1970-02-08 Technique for the preparation of iron oxide films by cathodic sputtering Expired CA927317A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US4640570A 1970-06-15 1970-06-15

Publications (1)

Publication Number Publication Date
CA927317A true CA927317A (en) 1973-05-29

Family

ID=21943278

Family Applications (1)

Application Number Title Priority Date Filing Date
CA104771A Expired CA927317A (en) 1970-06-15 1970-02-08 Technique for the preparation of iron oxide films by cathodic sputtering

Country Status (8)

Country Link
US (1) US3650921A (en)
BE (1) BE768413A (en)
CA (1) CA927317A (en)
DE (1) DE2129000A1 (en)
FR (1) FR2096297A5 (en)
GB (1) GB1346814A (en)
NL (1) NL7107902A (en)
SE (1) SE360397B (en)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5311679B2 (en) * 1974-08-26 1978-04-24
US4096026A (en) * 1976-07-27 1978-06-20 Toppan Printing Co., Ltd. Method of manufacturing a chromium oxide film

Also Published As

Publication number Publication date
SE360397B (en) 1973-09-24
DE2129000A1 (en) 1971-12-23
NL7107902A (en) 1971-12-17
BE768413A (en) 1971-11-03
GB1346814A (en) 1974-02-13
FR2096297A5 (en) 1972-02-11
US3650921A (en) 1972-03-21

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