CA927317A - Technique for the preparation of iron oxide films by cathodic sputtering - Google Patents
Technique for the preparation of iron oxide films by cathodic sputteringInfo
- Publication number
- CA927317A CA927317A CA104771A CA104771A CA927317A CA 927317 A CA927317 A CA 927317A CA 104771 A CA104771 A CA 104771A CA 104771 A CA104771 A CA 104771A CA 927317 A CA927317 A CA 927317A
- Authority
- CA
- Canada
- Prior art keywords
- technique
- preparation
- iron oxide
- oxide films
- cathodic sputtering
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/54—Absorbers, e.g. of opaque materials
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/50—Mask blanks not covered by G03F1/20 - G03F1/34; Preparation thereof
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Physical Vapour Deposition (AREA)
- Surface Treatment Of Glass (AREA)
- Compounds Of Iron (AREA)
- Preparing Plates And Mask In Photomechanical Process (AREA)
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US4640570A | 1970-06-15 | 1970-06-15 |
Publications (1)
Publication Number | Publication Date |
---|---|
CA927317A true CA927317A (en) | 1973-05-29 |
Family
ID=21943278
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA104771A Expired CA927317A (en) | 1970-06-15 | 1970-02-08 | Technique for the preparation of iron oxide films by cathodic sputtering |
Country Status (8)
Country | Link |
---|---|
US (1) | US3650921A (en) |
BE (1) | BE768413A (en) |
CA (1) | CA927317A (en) |
DE (1) | DE2129000A1 (en) |
FR (1) | FR2096297A5 (en) |
GB (1) | GB1346814A (en) |
NL (1) | NL7107902A (en) |
SE (1) | SE360397B (en) |
Families Citing this family (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5311679B2 (en) * | 1974-08-26 | 1978-04-24 | ||
US4096026A (en) * | 1976-07-27 | 1978-06-20 | Toppan Printing Co., Ltd. | Method of manufacturing a chromium oxide film |
-
1970
- 1970-02-08 CA CA104771A patent/CA927317A/en not_active Expired
- 1970-06-15 US US46405A patent/US3650921A/en not_active Expired - Lifetime
-
1971
- 1971-06-07 SE SE07348/71A patent/SE360397B/xx unknown
- 1971-06-09 GB GB1969171*[A patent/GB1346814A/en not_active Expired
- 1971-06-09 NL NL7107902A patent/NL7107902A/xx unknown
- 1971-06-11 DE DE19712129000 patent/DE2129000A1/en active Pending
- 1971-06-11 BE BE768413A patent/BE768413A/en unknown
- 1971-06-14 FR FR7121492A patent/FR2096297A5/fr not_active Expired
Also Published As
Publication number | Publication date |
---|---|
SE360397B (en) | 1973-09-24 |
DE2129000A1 (en) | 1971-12-23 |
NL7107902A (en) | 1971-12-17 |
BE768413A (en) | 1971-11-03 |
GB1346814A (en) | 1974-02-13 |
FR2096297A5 (en) | 1972-02-11 |
US3650921A (en) | 1972-03-21 |
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