CA926639A - Adsorptive cryopumping method and apparatus - Google Patents

Adsorptive cryopumping method and apparatus

Info

Publication number
CA926639A
CA926639A CA089174A CA89174A CA926639A CA 926639 A CA926639 A CA 926639A CA 089174 A CA089174 A CA 089174A CA 89174 A CA89174 A CA 89174A CA 926639 A CA926639 A CA 926639A
Authority
CA
Canada
Prior art keywords
cryopumping
adsorptive
cryopumping method
adsorptive cryopumping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA089174A
Inventor
Carle Jacques
Thibault Jean-Jacques
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Original Assignee
LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude filed Critical LAir Liquide SA pour lEtude et lExploitation des Procedes Georges Claude
Application granted granted Critical
Publication of CA926639A publication Critical patent/CA926639A/en
Expired legal-status Critical Current

Links

Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/02Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by absorption or adsorption
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04BPOSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
    • F04B37/00Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00
    • F04B37/06Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means
    • F04B37/08Pumps having pertinent characteristics not provided for in, or of interest apart from, groups F04B25/00 - F04B35/00 for evacuating by thermal means by condensing or freezing, e.g. cryogenic pumps
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/38Exhausting, degassing, filling, or cleaning vessels
    • YGENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10TECHNICAL SUBJECTS COVERED BY FORMER USPC
    • Y10STECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y10S417/00Pumps
    • Y10S417/901Cryogenic pumps

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • General Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Sorption Type Refrigeration Machines (AREA)
CA089174A 1969-12-01 1970-07-24 Adsorptive cryopumping method and apparatus Expired CA926639A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
FR6941309A FR2048253A5 (en) 1969-12-01 1969-12-01

Publications (1)

Publication Number Publication Date
CA926639A true CA926639A (en) 1973-05-22

Family

ID=9043866

Family Applications (1)

Application Number Title Priority Date Filing Date
CA089174A Expired CA926639A (en) 1969-12-01 1970-07-24 Adsorptive cryopumping method and apparatus

Country Status (6)

Country Link
US (1) US3668881A (en)
JP (1) JPS5027205B1 (en)
CA (1) CA926639A (en)
DE (1) DE2024991A1 (en)
FR (1) FR2048253A5 (en)
GB (1) GB1292489A (en)

Families Citing this family (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2114039A5 (en) * 1970-11-13 1972-06-30 Air Liquide
BE791888A (en) * 1971-11-26 1973-05-24 Air Liquide CRYOPUMPING DEVICE
FR2321609A1 (en) * 1975-08-22 1977-03-18 Air Liquide REGENERATION CRYOPUMP
USRE31665E (en) * 1980-04-01 1984-09-11 Cvi Incorporated Cryopump apparatus
US4275566A (en) * 1980-04-01 1981-06-30 Pennwalt Corporation Cryopump apparatus
US4580404A (en) * 1984-02-03 1986-04-08 Air Products And Chemicals, Inc. Method for adsorbing and storing hydrogen at cryogenic temperatures
DE3729517A1 (en) * 1987-09-03 1989-03-16 Siemens Ag ADSORPTION DEVICE FOR GAS SEPARATION
SU1698481A1 (en) * 1987-12-17 1991-12-15 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Cryogenic adsorption pump
SU1682628A1 (en) * 1988-03-10 1991-10-07 Институт Аналитического Приборостроения Научно-Технического Объединения Ан Ссср Cryoabsorption pump
US5041147A (en) * 1989-07-14 1991-08-20 The United States Of America As Represented By The United States Department Of Energy Hydrogen isotope separation utilizing bulk getters
AT398849B (en) * 1992-09-08 1995-02-27 Sitte Hellmuth CHAMBER FOR FREEZING DRYING BY CRYOSORPTION
WO1997035652A1 (en) * 1996-03-26 1997-10-02 Saes Pure Gas, Inc. Combination cryopump/getter pump and method for regenerating same
US6010762A (en) * 1998-01-15 2000-01-04 Cabot Corporation Self-evacuating vacuum insulation panels
US6154478A (en) * 1998-06-30 2000-11-28 The Boeing Company Chemical oxygen-iodine laser (coil)/cryosorption vacuum pump system
FR2807505B1 (en) * 2000-04-07 2002-06-14 Air Liquide LIQUID-GAS DISPENSER FOR MATERIAL AND / OR HEAT EXCHANGE COLUMN, AND COLUMN USING SUCH A DISPENSER
US6650681B1 (en) 2000-04-25 2003-11-18 The Boeing Company Sealed exhaust chemical oxygen-iodine laser system
US6621848B1 (en) 2000-04-25 2003-09-16 The Boeing Company SECOIL reprocessing system
US20050274129A1 (en) * 2004-06-12 2005-12-15 Vodyanoy Vitaly J Cryogenic adsorption pump for the collection of airborne gases, particles, organic molecules and micro-organisms
DE102005039795B4 (en) * 2005-08-22 2007-07-26 Bruker Biospin Ag Cooling device for generating a cold gas stream
US7841259B2 (en) * 2006-12-27 2010-11-30 Baker Hughes Incorporated Methods of forming bit bodies
US20080229928A1 (en) * 2007-03-20 2008-09-25 Urbahn John A Sorption pump with integrated thermal switch
WO2009002893A2 (en) * 2007-06-22 2008-12-31 Advanced Technology Materials, Inc. Component for solar adsorption refrigeration system and method of making such component
JP6418957B2 (en) * 2015-01-15 2018-11-07 株式会社神戸製鋼所 Permanent current switch and superconducting device

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3335550A (en) * 1964-04-24 1967-08-15 Union Carbide Corp Cryosorption apparatus
US3371499A (en) * 1966-11-02 1968-03-05 Union Carbide Corp Cryosorption vacuum pumping system
US3387767A (en) * 1966-12-07 1968-06-11 Nat Res Corp High vacuum pump with cryosorption pumping element
US3490247A (en) * 1968-01-24 1970-01-20 Perkin Elmer Corp Sorption pump roughing system

Also Published As

Publication number Publication date
GB1292489A (en) 1972-10-11
DE2024991A1 (en) 1971-06-24
US3668881A (en) 1972-06-13
JPS5027205B1 (en) 1975-09-05
FR2048253A5 (en) 1971-03-19

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