CA924820A - Integrated circuit structure with dielectric isolation and method of making the same - Google Patents

Integrated circuit structure with dielectric isolation and method of making the same

Info

Publication number
CA924820A
CA924820A CA966996A CA966996A CA924820A CA 924820 A CA924820 A CA 924820A CA 966996 A CA966996 A CA 966996A CA 966996 A CA966996 A CA 966996A CA 924820 A CA924820 A CA 924820A
Authority
CA
Canada
Prior art keywords
making
integrated circuit
same
circuit structure
dielectric isolation
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA966996A
Inventor
A. Trongo Pasquale
M. Kisinko Paul
G. Ernick Fred
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Corp
Original Assignee
Westinghouse Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Westinghouse Electric Corp filed Critical Westinghouse Electric Corp
Application granted granted Critical
Publication of CA924820A publication Critical patent/CA924820A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/70—Manufacture or treatment of devices consisting of a plurality of solid state components formed in or on a common substrate or of parts thereof; Manufacture of integrated circuit devices or of parts thereof
    • H01L21/71—Manufacture of specific parts of devices defined in group H01L21/70
    • H01L21/76—Making of isolation regions between components
    • H01L21/762—Dielectric regions, e.g. EPIC dielectric isolation, LOCOS; Trench refilling techniques, SOI technology, use of channel stoppers
    • H01L21/76297—Dielectric isolation using EPIC techniques, i.e. epitaxial passivated integrated circuit

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Element Separation (AREA)
CA966996A 1965-08-09 1966-08-03 Integrated circuit structure with dielectric isolation and method of making the same Expired CA924820A (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US47831965A 1965-08-09 1965-08-09
US48121665A 1965-08-20 1965-08-20
US48121565A 1965-08-20 1965-08-20

Publications (1)

Publication Number Publication Date
CA924820A true CA924820A (en) 1973-04-17

Family

ID=27413439

Family Applications (1)

Application Number Title Priority Date Filing Date
CA966996A Expired CA924820A (en) 1965-08-09 1966-08-03 Integrated circuit structure with dielectric isolation and method of making the same

Country Status (3)

Country Link
CA (1) CA924820A (en)
DE (1) DE1589062A1 (en)
GB (1) GB1114798A (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2658304C2 (en) * 1975-12-24 1984-12-20 Tokyo Shibaura Electric Co., Ltd., Kawasaki, Kanagawa Semiconductor device
US4161743A (en) * 1977-03-28 1979-07-17 Tokyo Shibaura Electric Co., Ltd. Semiconductor device with silicon carbide-glass-silicon carbide passivating overcoat
DE3486223T2 (en) * 1983-11-04 1994-03-31 Harris Corp Electrochemical technology for the production of a dielectric insulation structure.

Also Published As

Publication number Publication date
GB1114798A (en) 1968-05-22
DE1589062A1 (en) 1969-09-25

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