CA918484A - Technique for the preparation of thermally stable photoresist - Google Patents

Technique for the preparation of thermally stable photoresist

Info

Publication number
CA918484A
CA918484A CA079001A CA79001A CA918484A CA 918484 A CA918484 A CA 918484A CA 079001 A CA079001 A CA 079001A CA 79001 A CA79001 A CA 79001A CA 918484 A CA918484 A CA 918484A
Authority
CA
Canada
Prior art keywords
technique
preparation
thermally stable
stable photoresist
photoresist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA079001A
Inventor
E. Kerwin Robert
K. Curran Robert
R. Goldrick Michael
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
AT&T Corp
Original Assignee
Western Electric Co Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Western Electric Co Inc filed Critical Western Electric Co Inc
Application granted granted Critical
Publication of CA918484A publication Critical patent/CA918484A/en
Expired legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/04—Chromates

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Photosensitive Polymer And Photoresist Processing (AREA)
  • Non-Silver Salt Photosensitive Materials And Non-Silver Salt Photography (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
  • Formation Of Insulating Films (AREA)
CA079001A 1969-07-22 1970-04-02 Technique for the preparation of thermally stable photoresist Expired CA918484A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US84377969A 1969-07-22 1969-07-22

Publications (1)

Publication Number Publication Date
CA918484A true CA918484A (en) 1973-01-09

Family

ID=25290992

Family Applications (1)

Application Number Title Priority Date Filing Date
CA079001A Expired CA918484A (en) 1969-07-22 1970-04-02 Technique for the preparation of thermally stable photoresist

Country Status (8)

Country Link
US (1) US3623870A (en)
JP (1) JPS4917374B1 (en)
BE (1) BE753624A (en)
CA (1) CA918484A (en)
FR (1) FR2055193A5 (en)
GB (1) GB1316976A (en)
NL (1) NL144064B (en)
SE (1) SE365877B (en)

Families Citing this family (15)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4093461A (en) * 1975-07-18 1978-06-06 Gaf Corporation Positive working thermally stable photoresist composition, article and method of using
US4055515A (en) * 1975-12-31 1977-10-25 Borden, Inc. Developer for printing plates
US4180404A (en) * 1977-11-17 1979-12-25 Asahi Kasei Kogyo Kabushiki Kaisha Heat resistant photoresist composition and process for preparing the same
US4208477A (en) * 1977-12-26 1980-06-17 Asahi Kasei Kogyo Kabushiki Kaisha Heat resistant photoresist composition and process for preparing the same
DE2967162D1 (en) * 1978-09-29 1984-09-13 Hitachi Ltd Light-sensitive polymer composition
US4331705A (en) 1979-05-11 1982-05-25 Minnesota Mining And Manufacturing Company Curing of polyamic acids or salts thereof by ultraviolet exposure
IT1144060B (en) * 1979-05-11 1986-10-29 Minnesota Mining & Mfg PROCEDURE FOR THE MATURATION OF POLYAMIC ACIDS OR THEIR SALTS THROUGH ULTRAVIOLET IRRADIATION FOR EXAMPLE FOR THE FORMATION OF IMAGES IN SUBSTRATES AND PRODUCT OBTAINED
US4410612A (en) * 1980-09-03 1983-10-18 E. I. Du Pont De Nemours And Company Electrical device formed from polymeric heat resistant photopolymerizable composition
US4369247A (en) * 1980-09-03 1983-01-18 E. I. Du Pont De Nemours And Company Process of producing relief structures using polyamide ester resins
US4329419A (en) * 1980-09-03 1982-05-11 E. I. Du Pont De Nemours And Company Polymeric heat resistant photopolymerizable composition for semiconductors and capacitors
US4414312A (en) * 1980-09-03 1983-11-08 E. I. Du Pont De Nemours & Co. Photopolymerizable polyamide ester resin compositions containing an oxygen scavenger
EP0119719B1 (en) * 1983-03-03 1987-05-06 Toray Industries, Inc. Radiation sensitive polymer composition
US4548688A (en) * 1983-05-23 1985-10-22 Fusion Semiconductor Systems Hardening of photoresist
JP2787531B2 (en) * 1993-02-17 1998-08-20 信越化学工業株式会社 Photosensitive resin composition and protective film for electronic parts
JP5333452B2 (en) 2008-10-02 2013-11-06 大日本印刷株式会社 Photosensitive resin composition, article using the same, and negative pattern forming method

Also Published As

Publication number Publication date
DE2035191A1 (en) 1971-02-11
US3623870A (en) 1971-11-30
FR2055193A5 (en) 1971-05-07
SE365877B (en) 1974-04-01
GB1316976A (en) 1973-05-16
JPS4917374B1 (en) 1974-04-30
BE753624A (en) 1970-12-31
NL7010534A (en) 1971-01-26
NL144064B (en) 1974-11-15

Similar Documents

Publication Publication Date Title
SE409708B (en) PROCEDURE FOR THE PREPARATION OF 2,4-DIAMINO-5-BENZYLPYRIMIDINES
CA918484A (en) Technique for the preparation of thermally stable photoresist
CA962036A (en) Method for the preparation of vanadiumcarbide
CA922690A (en) Process for the preparation of cardenolide- and bufadienolide-3-(glycoside-di-alkylorthocarbonates)
CA945338A (en) Method for the preparation of vanadiumcarbide
CA929923A (en) Thermally stable faujasite
CA811020A (en) Thermal processor
CA813951A (en) High temperature cements
AU439038B2 (en) Preparation. of monohydrochlorosilanes
AU440622B2 (en) Aliquid herbicidal preparation
CA819710A (en) Process for increasing the thermal stability of zeolites
CA816135A (en) Method for the preparation of halophthalazines
AU426265B2 (en) Thermally operable switches
CA822619A (en) Photoresist composition
CA747350A (en) Procedure for the preparation of .delta.1-dehydro-steroids
CA828762A (en) Process for the preparation of 2-amino-4-azido-6-phenyl-5-substituted pyrimidines
CA805196A (en) Preparation of 1,5,9, -cyclododecatriene
CA819146A (en) Preparation of 1,4-dicyanobutadiene-1,3
CA818535A (en) Fluorocarbon derivatives
CA823955A (en) Expansible chair
CA828097A (en) Photolithography
CA819142A (en) Preparation of organosilicon-nitrogen compounds
CA810334A (en) Thermoelectric members
CA823674A (en) Fluorocarbon compounds
CA825706A (en) Bi-metallic compounds