CA918297A - Semiconductor device and method of making - Google Patents

Semiconductor device and method of making

Info

Publication number
CA918297A
CA918297A CA092882A CA92882A CA918297A CA 918297 A CA918297 A CA 918297A CA 092882 A CA092882 A CA 092882A CA 92882 A CA92882 A CA 92882A CA 918297 A CA918297 A CA 918297A
Authority
CA
Canada
Prior art keywords
making
semiconductor device
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA092882A
Other languages
English (en)
Inventor
Tanimura Shigeru
Sumoto Takao
Uekusa Genzo
Higashi Kazuhiro
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Omron Corp
Original Assignee
Omron Tateisi Electronics Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Priority claimed from JP44076483A external-priority patent/JPS4922079B1/ja
Application filed by Omron Tateisi Electronics Co filed Critical Omron Tateisi Electronics Co
Application granted granted Critical
Publication of CA918297A publication Critical patent/CA918297A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28512—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising elements of Group IV of the Periodic Table
    • H01L21/28537—Deposition of Schottky electrodes
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
    • H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
    • H01L21/28—Manufacture of electrodes on semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/268
    • H01L21/283—Deposition of conductive or insulating materials for electrodes conducting electric current
    • H01L21/285—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation
    • H01L21/28506—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers
    • H01L21/28575—Deposition of conductive or insulating materials for electrodes conducting electric current from a gas or vapour, e.g. condensation of conductive layers on semiconductor bodies comprising AIIIBV compounds
    • H01L21/28581—Deposition of Schottky electrodes
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/10—Integrated devices
    • H10F39/107—Integrated devices having multiple elements covered by H10F30/00 in a repetitive configuration, e.g. radiation detectors comprising photodiode arrays

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Photovoltaic Devices (AREA)
  • Weting (AREA)
CA092882A 1969-09-24 1970-09-11 Semiconductor device and method of making Expired CA918297A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP44076483A JPS4922079B1 (cs) 1969-09-24 1969-09-24
JP7719269 1969-09-26

Publications (1)

Publication Number Publication Date
CA918297A true CA918297A (en) 1973-01-02

Family

ID=26417633

Family Applications (1)

Application Number Title Priority Date Filing Date
CA092882A Expired CA918297A (en) 1969-09-24 1970-09-11 Semiconductor device and method of making

Country Status (5)

Country Link
US (1) US3679949A (cs)
CA (1) CA918297A (cs)
DE (1) DE2047175A1 (cs)
FR (1) FR2062986B1 (cs)
GB (1) GB1326377A (cs)

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA920280A (en) * 1970-11-16 1973-01-30 Omron Tateisi Electronics Co. Semiconductive transducer
US4016589A (en) * 1971-11-10 1977-04-05 Omron Tateisi Electronics Co., Ltd. Semiconductor device
FR2160095A5 (cs) * 1971-11-10 1973-06-22 Omron Tateisi Electronics Co
GB1419143A (en) * 1972-04-04 1975-12-24 Omron Tateisi Electronics Co Semiconductor photoelectric device
JPS5120277B2 (cs) * 1972-08-17 1976-06-23
US3889286A (en) * 1973-12-26 1975-06-10 Gen Electric Transparent multiple contact for semiconductor light conversion elements
JPS5467698A (en) 1977-11-08 1979-05-31 Matsushita Electric Ind Co Ltd Method of reducing resistance of conductive material
US4177093A (en) * 1978-06-27 1979-12-04 Exxon Research & Engineering Co. Method of fabricating conducting oxide-silicon solar cells utilizing electron beam sublimation and deposition of the oxide
US4193821A (en) * 1978-08-14 1980-03-18 Exxon Research & Engineering Co. Fabrication of heterojunction solar cells by improved tin oxide deposition on insulating layer
US4278831A (en) * 1979-04-27 1981-07-14 The Boeing Company Process for fabricating solar cells and the product produced thereby
JPS5669835A (en) * 1979-11-09 1981-06-11 Japan Electronic Ind Dev Assoc<Jeida> Method for forming thin film pattern
US4342879A (en) * 1980-10-24 1982-08-03 The University Of Delaware Thin film photovoltaic device
US4394672A (en) * 1981-04-22 1983-07-19 Ford Motor Company Titanium dioxide rectifier
US4361951A (en) * 1981-04-22 1982-12-07 Ford Motor Company Method of fabricating a titanium dioxide rectifier
US5008062A (en) * 1988-01-20 1991-04-16 Siemens Solar Industries, L.P. Method of fabricating photovoltaic module
US5698262A (en) * 1996-05-06 1997-12-16 Libbey-Owens-Ford Co. Method for forming tin oxide coating on glass
US6344608B2 (en) * 1998-06-30 2002-02-05 Canon Kabushiki Kaisha Photovoltaic element
US6900382B2 (en) * 2002-01-25 2005-05-31 Konarka Technologies, Inc. Gel electrolytes for dye sensitized solar cells
US7351907B2 (en) * 2002-01-25 2008-04-01 Konarka Technologies, Inc. Displays with integrated photovoltaic cells
US6913713B2 (en) * 2002-01-25 2005-07-05 Konarka Technologies, Inc. Photovoltaic fibers
US20050284513A1 (en) * 2002-08-08 2005-12-29 Christoph Brabec Chip card comprising an integrated energy converter
US6949400B2 (en) * 2002-01-25 2005-09-27 Konarka Technologies, Inc. Ultrasonic slitting of photovoltaic cells and modules
US6706963B2 (en) * 2002-01-25 2004-03-16 Konarka Technologies, Inc. Photovoltaic cell interconnection
US7186911B2 (en) 2002-01-25 2007-03-06 Konarka Technologies, Inc. Methods of scoring for fabricating interconnected photovoltaic cells
US20030192585A1 (en) * 2002-01-25 2003-10-16 Konarka Technologies, Inc. Photovoltaic cells incorporating rigid substrates
US20030192584A1 (en) * 2002-01-25 2003-10-16 Konarka Technologies, Inc. Flexible photovoltaic cells and modules formed using foils
US6924427B2 (en) * 2002-01-25 2005-08-02 Konarka Technologies, Inc. Wire interconnects for fabricating interconnected photovoltaic cells
US7414188B2 (en) * 2002-01-25 2008-08-19 Konarka Technologies, Inc. Co-sensitizers for dye sensitized solar cells
US7205473B2 (en) * 2002-01-25 2007-04-17 Konarka Technologies, Inc. Photovoltaic powered multimedia greeting cards and smart cards
US6919119B2 (en) * 2000-05-30 2005-07-19 The Penn State Research Foundation Electronic and opto-electronic devices fabricated from nanostructured high surface to volume ratio thin films
US6805911B2 (en) * 2001-01-02 2004-10-19 J.G. Systems, Inc. Method and apparatus for improving interfacial chemical reactions
WO2003065394A2 (en) * 2002-01-25 2003-08-07 Konarka Technologies, Inc. Photovoltaic cell components and materials
KR20080044233A (ko) * 2005-08-22 2008-05-20 코나르카 테크놀로지, 인코포레이티드 일체형 광전지를 갖는 디스플레이
US20070079867A1 (en) * 2005-10-12 2007-04-12 Kethinni Chittibabu Photovoltaic fibers
KR20090007063A (ko) * 2007-07-13 2009-01-16 삼성에스디아이 주식회사 태양전지 및 이의 제조방법
WO2009151979A2 (en) * 2008-06-09 2009-12-17 4Power, Llc High-efficiency solar cell structures and methods
JP2010050356A (ja) * 2008-08-22 2010-03-04 Shin-Etsu Chemical Co Ltd ヘテロ接合太陽電池の製造方法及びヘテロ接合太陽電池
US20110124146A1 (en) * 2009-05-29 2011-05-26 Pitera Arthur J Methods of forming high-efficiency multi-junction solar cell structures
US8486192B2 (en) * 2010-09-30 2013-07-16 Soitec Thermalizing gas injectors for generating increased precursor gas, material deposition systems including such injectors, and related methods
US8133806B1 (en) 2010-09-30 2012-03-13 S.O.I.Tec Silicon On Insulator Technologies Systems and methods for forming semiconductor materials by atomic layer deposition
US8604330B1 (en) 2010-12-06 2013-12-10 4Power, Llc High-efficiency solar-cell arrays with integrated devices and methods for forming them
JP5773194B2 (ja) * 2011-07-11 2015-09-02 国立大学法人東京農工大学 太陽電池の製造方法
RU2727995C1 (ru) * 2019-12-13 2020-07-28 Алексей Алексеевич Сибилев Комплексное вспомогательное оборудование для проведения учебного процесса

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US2556991A (en) * 1946-03-20 1951-06-12 Bell Telephone Labor Inc Light-sensitive electric device
US2735919A (en) * 1953-05-20 1956-02-21 shower
US3053926A (en) * 1959-12-14 1962-09-11 Int Rectifier Corp Silicon photoelectric cell
US3095324A (en) * 1960-04-14 1963-06-25 Gen Electric Method for making electrically conducting films and article
US3104188A (en) * 1961-01-09 1963-09-17 Giannini Controls Corp Solid state solar generator
US3330983A (en) * 1962-07-06 1967-07-11 Gen Electric Heterojunction electroluminescent devices
US3267317A (en) * 1963-02-25 1966-08-16 Rca Corp Device for producing recombination radiation
FR1409894A (fr) * 1964-07-23 1965-09-03 Electronique & Automatisme Sa Dispositif opto-électronique perfectionné
DE1652512B2 (de) * 1967-05-29 1976-08-26 Siemens AG, 1000 Berlin und 8000 München Verfahren zum herstellen von halbleiterbauelementen
US3443170A (en) * 1968-02-09 1969-05-06 Charles F Pulvari Ohmic contact to a substrate of insulating material having a doped semiconductive oxide providing a stepped energy gap
US3560812A (en) * 1968-07-05 1971-02-02 Gen Electric High selectively electromagnetic radiation detecting devices

Also Published As

Publication number Publication date
US3679949A (en) 1972-07-25
FR2062986A1 (cs) 1971-07-02
GB1326377A (en) 1973-08-08
FR2062986B1 (cs) 1975-01-10
DE2047175A1 (de) 1971-04-22

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