CA916632A - Sputtering apparatus having dual shutter arrangement - Google Patents

Sputtering apparatus having dual shutter arrangement

Info

Publication number
CA916632A
CA916632A CA916632A CA916632DA CA916632A CA 916632 A CA916632 A CA 916632A CA 916632 A CA916632 A CA 916632A CA 916632D A CA916632D A CA 916632DA CA 916632 A CA916632 A CA 916632A
Authority
CA
Canada
Prior art keywords
sputtering apparatus
shutter arrangement
dual shutter
dual
arrangement
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA916632A
Inventor
G. Kerswill Edson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Publication date
Application granted granted Critical
Publication of CA916632A publication Critical patent/CA916632A/en
Expired legal-status Critical Current

Links

CA916632A Sputtering apparatus having dual shutter arrangement Expired CA916632A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA916632T

Publications (1)

Publication Number Publication Date
CA916632A true CA916632A (en) 1972-12-12

Family

ID=36425850

Family Applications (1)

Application Number Title Priority Date Filing Date
CA916632A Expired CA916632A (en) Sputtering apparatus having dual shutter arrangement

Country Status (1)

Country Link
CA (1) CA916632A (en)

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