CA897257A - Corpuscular beam apparatus - Google Patents

Corpuscular beam apparatus

Info

Publication number
CA897257A
CA897257A CA897257A CA897257DA CA897257A CA 897257 A CA897257 A CA 897257A CA 897257 A CA897257 A CA 897257A CA 897257D A CA897257D A CA 897257DA CA 897257 A CA897257 A CA 897257A
Authority
CA
Canada
Prior art keywords
beam apparatus
corpuscular beam
corpuscular
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA897257A
Inventor
Rehme Hans
Togel Kurt
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Publication date
Application granted granted Critical
Publication of CA897257A publication Critical patent/CA897257A/en
Expired legal-status Critical Current

Links

CA897257A Corpuscular beam apparatus Expired CA897257A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA897257T

Publications (1)

Publication Number Publication Date
CA897257A true CA897257A (en) 1972-04-04

Family

ID=36403182

Family Applications (1)

Application Number Title Priority Date Filing Date
CA897257A Expired CA897257A (en) Corpuscular beam apparatus

Country Status (1)

Country Link
CA (1) CA897257A (en)

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