CA888346A - Post heating of sputtered metal oxide films - Google Patents

Post heating of sputtered metal oxide films

Info

Publication number
CA888346A
CA888346A CA888346A CA888346DA CA888346A CA 888346 A CA888346 A CA 888346A CA 888346 A CA888346 A CA 888346A CA 888346D A CA888346D A CA 888346DA CA 888346 A CA888346 A CA 888346A
Authority
CA
Canada
Prior art keywords
metal oxide
oxide films
sputtered metal
post heating
post
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA888346A
Inventor
H. Gillery Frank
P. Pressau Jean
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
PPG Industries Inc
Original Assignee
PPG Industries Inc
Publication date
Application granted granted Critical
Publication of CA888346A publication Critical patent/CA888346A/en
Expired legal-status Critical Current

Links

CA888346A Post heating of sputtered metal oxide films Expired CA888346A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA888346T

Publications (1)

Publication Number Publication Date
CA888346A true CA888346A (en) 1971-12-14

Family

ID=36394565

Family Applications (1)

Application Number Title Priority Date Filing Date
CA888346A Expired CA888346A (en) Post heating of sputtered metal oxide films

Country Status (1)

Country Link
CA (1) CA888346A (en)

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