CA867701A - Method of making thin film structure of metal - Google Patents

Method of making thin film structure of metal

Info

Publication number
CA867701A
CA867701A CA867701A CA867701DA CA867701A CA 867701 A CA867701 A CA 867701A CA 867701 A CA867701 A CA 867701A CA 867701D A CA867701D A CA 867701DA CA 867701 A CA867701 A CA 867701A
Authority
CA
Canada
Prior art keywords
metal
thin film
film structure
making thin
making
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA867701A
Inventor
Uno Yoshihiro
Kawakami Hidehiko
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Publication date
Application granted granted Critical
Publication of CA867701A publication Critical patent/CA867701A/en
Expired legal-status Critical Current

Links

CA867701A Method of making thin film structure of metal Expired CA867701A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA867701T

Publications (1)

Publication Number Publication Date
CA867701A true CA867701A (en) 1971-04-06

Family

ID=36352975

Family Applications (1)

Application Number Title Priority Date Filing Date
CA867701A Expired CA867701A (en) Method of making thin film structure of metal

Country Status (1)

Country Link
CA (1) CA867701A (en)

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