CA874405A - Method of gas-phase etching semiconductor material - Google Patents

Method of gas-phase etching semiconductor material

Info

Publication number
CA874405A
CA874405A CA874405A CA874405DA CA874405A CA 874405 A CA874405 A CA 874405A CA 874405 A CA874405 A CA 874405A CA 874405D A CA874405D A CA 874405DA CA 874405 A CA874405 A CA 874405A
Authority
CA
Canada
Prior art keywords
gas
semiconductor material
phase etching
etching semiconductor
phase
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA874405A
Inventor
W. Blair John
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Texas Instruments Inc
Original Assignee
Texas Instruments Inc
Publication date
Application granted granted Critical
Publication of CA874405A publication Critical patent/CA874405A/en
Expired legal-status Critical Current

Links

CA874405A Method of gas-phase etching semiconductor material Expired CA874405A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA874405T

Publications (1)

Publication Number Publication Date
CA874405A true CA874405A (en) 1971-06-29

Family

ID=36360342

Family Applications (1)

Application Number Title Priority Date Filing Date
CA874405A Expired CA874405A (en) Method of gas-phase etching semiconductor material

Country Status (1)

Country Link
CA (1) CA874405A (en)

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