CA873592A - Apparatus for use in the diffusion of a doping substance into a body of semiconductor material - Google Patents

Apparatus for use in the diffusion of a doping substance into a body of semiconductor material

Info

Publication number
CA873592A
CA873592A CA873592A CA873592DA CA873592A CA 873592 A CA873592 A CA 873592A CA 873592 A CA873592 A CA 873592A CA 873592D A CA873592D A CA 873592DA CA 873592 A CA873592 A CA 873592A
Authority
CA
Canada
Prior art keywords
diffusion
semiconductor material
doping substance
doping
substance
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA873592A
Inventor
Reuschel Konrad
Keller Wolfgang
Emeis Reimer
Kersting Arno
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Siemens AG
Original Assignee
Siemens AG
Publication date
Application granted granted Critical
Publication of CA873592A publication Critical patent/CA873592A/en
Expired legal-status Critical Current

Links

CA873592A Apparatus for use in the diffusion of a doping substance into a body of semiconductor material Expired CA873592A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA873592T

Publications (1)

Publication Number Publication Date
CA873592A true CA873592A (en) 1971-06-15

Family

ID=36359552

Family Applications (1)

Application Number Title Priority Date Filing Date
CA873592A Expired CA873592A (en) Apparatus for use in the diffusion of a doping substance into a body of semiconductor material

Country Status (1)

Country Link
CA (1) CA873592A (en)

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