CA836799A - Fabrication of semiconductor devices utilizing bombardment enhanced etching of insulating layers - Google Patents

Fabrication of semiconductor devices utilizing bombardment enhanced etching of insulating layers

Info

Publication number
CA836799A
CA836799A CA836799A CA836799DA CA836799A CA 836799 A CA836799 A CA 836799A CA 836799 A CA836799 A CA 836799A CA 836799D A CA836799D A CA 836799DA CA 836799 A CA836799 A CA 836799A
Authority
CA
Canada
Prior art keywords
fabrication
semiconductor devices
insulating layers
devices utilizing
enhanced etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA836799A
Inventor
W. Larkin Melvyn
W. O'keeffe Terence
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Corp
Original Assignee
Westinghouse Electric Corp
Publication date
Application granted granted Critical
Publication of CA836799A publication Critical patent/CA836799A/en
Expired legal-status Critical Current

Links

CA836799A Fabrication of semiconductor devices utilizing bombardment enhanced etching of insulating layers Expired CA836799A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA836799T

Publications (1)

Publication Number Publication Date
CA836799A true CA836799A (en) 1970-03-10

Family

ID=36320995

Family Applications (1)

Application Number Title Priority Date Filing Date
CA836799A Expired CA836799A (en) Fabrication of semiconductor devices utilizing bombardment enhanced etching of insulating layers

Country Status (1)

Country Link
CA (1) CA836799A (en)

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