CA831131A - Electron beam column - Google Patents

Electron beam column

Info

Publication number
CA831131A
CA831131A CA831131A CA831131DA CA831131A CA 831131 A CA831131 A CA 831131A CA 831131 A CA831131 A CA 831131A CA 831131D A CA831131D A CA 831131DA CA 831131 A CA831131 A CA 831131A
Authority
CA
Canada
Prior art keywords
electron beam
beam column
column
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA831131A
Inventor
O. J. Salbu Erik
H. Loeffler Karl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Publication date
Application granted granted Critical
Publication of CA831131A publication Critical patent/CA831131A/en
Expired legal-status Critical Current

Links

CA831131A Electron beam column Expired CA831131A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA831131T

Publications (1)

Publication Number Publication Date
CA831131A true CA831131A (en) 1969-12-30

Family

ID=36308593

Family Applications (1)

Application Number Title Priority Date Filing Date
CA831131A Expired CA831131A (en) Electron beam column

Country Status (1)

Country Link
CA (1) CA831131A (en)

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