AU402511B2 - Electron beam column - Google Patents

Electron beam column

Info

Publication number
AU402511B2
AU402511B2 AU25554/67A AU2555467A AU402511B2 AU 402511 B2 AU402511 B2 AU 402511B2 AU 25554/67 A AU25554/67 A AU 25554/67A AU 2555467 A AU2555467 A AU 2555467A AU 402511 B2 AU402511 B2 AU 402511B2
Authority
AU
Australia
Prior art keywords
electron beam
beam column
column
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU25554/67A
Other versions
AU2555467A (en
Inventor
LOEFFLER and ERNE OOTNDJARL SAIDU KARLHEINZ
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of AU402511B2 publication Critical patent/AU402511B2/en
Publication of AU2555467A publication Critical patent/AU2555467A/en
Expired legal-status Critical Current

Links

AU25554/67A 1967-08-07 Electron beam column Expired AU402511B2 (en)

Publications (2)

Publication Number Publication Date
AU402511B2 true AU402511B2 (en) 1969-02-13
AU2555467A AU2555467A (en) 1969-02-13

Family

ID=

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