CA829238A - Photolithographic etching of extremely detailed patterns - Google Patents

Photolithographic etching of extremely detailed patterns

Info

Publication number
CA829238A
CA829238A CA829238A CA829238DA CA829238A CA 829238 A CA829238 A CA 829238A CA 829238 A CA829238 A CA 829238A CA 829238D A CA829238D A CA 829238DA CA 829238 A CA829238 A CA 829238A
Authority
CA
Canada
Prior art keywords
photolithographic etching
extremely detailed
detailed patterns
patterns
extremely
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA829238A
Inventor
L. Luce Robert
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Space Systems Loral LLC
Original Assignee
Philco Ford Corp
Publication date
Application granted granted Critical
Publication of CA829238A publication Critical patent/CA829238A/en
Expired legal-status Critical Current

Links

CA829238A Photolithographic etching of extremely detailed patterns Expired CA829238A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA829238T

Publications (1)

Publication Number Publication Date
CA829238A true CA829238A (en) 1969-12-09

Family

ID=36306694

Family Applications (1)

Application Number Title Priority Date Filing Date
CA829238A Expired CA829238A (en) Photolithographic etching of extremely detailed patterns

Country Status (1)

Country Link
CA (1) CA829238A (en)

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