CA830455A - Etching apparatus - Google Patents

Etching apparatus

Info

Publication number
CA830455A
CA830455A CA830455A CA830455DA CA830455A CA 830455 A CA830455 A CA 830455A CA 830455 A CA830455 A CA 830455A CA 830455D A CA830455D A CA 830455DA CA 830455 A CA830455 A CA 830455A
Authority
CA
Canada
Prior art keywords
etching apparatus
etching
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA830455A
Inventor
W. Hoornstra Clayton
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Dow Chemical Co
Original Assignee
Dow Chemical Co
Publication date
Application granted granted Critical
Publication of CA830455A publication Critical patent/CA830455A/en
Expired legal-status Critical Current

Links

CA830455A Etching apparatus Expired CA830455A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA830455T

Publications (1)

Publication Number Publication Date
CA830455A true CA830455A (en) 1969-12-23

Family

ID=36307915

Family Applications (1)

Application Number Title Priority Date Filing Date
CA830455A Expired CA830455A (en) Etching apparatus

Country Status (1)

Country Link
CA (1) CA830455A (en)

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