CA811346A - High concentration doping of silicon using ammonium phosphate - Google Patents

High concentration doping of silicon using ammonium phosphate

Info

Publication number
CA811346A
CA811346A CA811346A CA811346DA CA811346A CA 811346 A CA811346 A CA 811346A CA 811346 A CA811346 A CA 811346A CA 811346D A CA811346D A CA 811346DA CA 811346 A CA811346 A CA 811346A
Authority
CA
Canada
Prior art keywords
silicon
high concentration
ammonium phosphate
concentration doping
doping
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA811346A
Inventor
A. Forrest Richard
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CBS Corp
Original Assignee
Westinghouse Electric Corp
Publication date
Application granted granted Critical
Publication of CA811346A publication Critical patent/CA811346A/en
Expired legal-status Critical Current

Links

CA811346A High concentration doping of silicon using ammonium phosphate Expired CA811346A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA811346T

Publications (1)

Publication Number Publication Date
CA811346A true CA811346A (en) 1969-04-22

Family

ID=36281866

Family Applications (1)

Application Number Title Priority Date Filing Date
CA811346A Expired CA811346A (en) High concentration doping of silicon using ammonium phosphate

Country Status (1)

Country Link
CA (1) CA811346A (en)

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