AU440658B2 - Dopant sources for use inthe manufacture of semiconductor devices - Google Patents

Dopant sources for use inthe manufacture of semiconductor devices

Info

Publication number
AU440658B2
AU440658B2 AU12550/70A AU1255070A AU440658B2 AU 440658 B2 AU440658 B2 AU 440658B2 AU 12550/70 A AU12550/70 A AU 12550/70A AU 1255070 A AU1255070 A AU 1255070A AU 440658 B2 AU440658 B2 AU 440658B2
Authority
AU
Australia
Prior art keywords
semiconductor devices
dopant sources
inthe manufacture
use inthe
manufacture
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
AU12550/70A
Other versions
AU1255070A (en
Inventor
JAMES LYONS and JAGTAP SINGH SANDHU VINCENT
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
International Business Machines Corp
Original Assignee
International Business Machines Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by International Business Machines Corp filed Critical International Business Machines Corp
Application granted granted Critical
Publication of AU1255070A publication Critical patent/AU1255070A/en
Publication of AU440658B2 publication Critical patent/AU440658B2/en
Expired legal-status Critical Current

Links

AU12550/70A 1969-04-01 1970-03-12 Dopant sources for use inthe manufacture of semiconductor devices Expired AU440658B2 (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
USUS811,931 1969-04-01

Publications (2)

Publication Number Publication Date
AU1255070A AU1255070A (en) 1971-09-16
AU440658B2 true AU440658B2 (en) 1971-09-16

Family

ID=

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