CA672271A - Arrangements for the operation of ultra-high vacuum pumping plants - Google Patents

Arrangements for the operation of ultra-high vacuum pumping plants

Info

Publication number
CA672271A
CA672271A CA672271A CA672271DA CA672271A CA 672271 A CA672271 A CA 672271A CA 672271 A CA672271 A CA 672271A CA 672271D A CA672271D A CA 672271DA CA 672271 A CA672271 A CA 672271A
Authority
CA
Canada
Prior art keywords
ultra
arrangements
high vacuum
vacuum pumping
pumping plants
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA672271A
Inventor
A. Trendelenburg Ernst
Huber Walter
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Bendix Balzers Vacuum Inc
Original Assignee
Bendix Balzers Vacuum Inc
Publication date
Application granted granted Critical
Publication of CA672271A publication Critical patent/CA672271A/en
Expired legal-status Critical Current

Links

CA672271A Arrangements for the operation of ultra-high vacuum pumping plants Expired CA672271A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA672271T

Publications (1)

Publication Number Publication Date
CA672271A true CA672271A (en) 1963-10-15

Family

ID=35972629

Family Applications (1)

Application Number Title Priority Date Filing Date
CA672271A Expired CA672271A (en) Arrangements for the operation of ultra-high vacuum pumping plants

Country Status (1)

Country Link
CA (1) CA672271A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4292747A (en) * 1978-05-08 1981-10-06 Zimmermann & Jansen Gmbh Compressed air dredge

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4292747A (en) * 1978-05-08 1981-10-06 Zimmermann & Jansen Gmbh Compressed air dredge

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