CA664019A - Getter-ion vacuum pump - Google Patents

Getter-ion vacuum pump

Info

Publication number
CA664019A
CA664019A CA664019A CA664019DA CA664019A CA 664019 A CA664019 A CA 664019A CA 664019 A CA664019 A CA 664019A CA 664019D A CA664019D A CA 664019DA CA 664019 A CA664019 A CA 664019A
Authority
CA
Canada
Prior art keywords
getter
vacuum pump
ion vacuum
ion
pump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
CA664019A
Inventor
A. Lloyd William
Zaphiropoulos Renn
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Varian Medical Systems Inc
Original Assignee
Varian Associates Inc
Publication date
Application granted granted Critical
Publication of CA664019A publication Critical patent/CA664019A/en
Expired legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J41/00—Discharge tubes for measuring pressure of introduced gas or for detecting presence of gas; Discharge tubes for evacuation by diffusion of ions
    • H01J41/12—Discharge tubes for evacuating by diffusion of ions, e.g. ion pumps, getter ion pumps
CA664019A Getter-ion vacuum pump Expired CA664019A (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CA664019T

Publications (1)

Publication Number Publication Date
CA664019A true CA664019A (en) 1963-05-28

Family

ID=210713

Family Applications (1)

Application Number Title Priority Date Filing Date
CA664019A Expired CA664019A (en) Getter-ion vacuum pump

Country Status (1)

Country Link
CA (1) CA664019A (en)

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