CA3155317A1 - Ultrasonic transducers - Google Patents

Ultrasonic transducers Download PDF

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Publication number
CA3155317A1
CA3155317A1 CA3155317A CA3155317A CA3155317A1 CA 3155317 A1 CA3155317 A1 CA 3155317A1 CA 3155317 A CA3155317 A CA 3155317A CA 3155317 A CA3155317 A CA 3155317A CA 3155317 A1 CA3155317 A1 CA 3155317A1
Authority
CA
Canada
Prior art keywords
signal
ultrasonic
signals
analogue
direct path
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CA3155317A
Other languages
English (en)
French (fr)
Inventor
Frode Tyholdt
Andreas Vogl
Tobias Dahl
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SINTEF TTO AS
Original Assignee
SINTEF TTO AS
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SINTEF TTO AS filed Critical SINTEF TTO AS
Publication of CA3155317A1 publication Critical patent/CA3155317A1/en
Pending legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B06—GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS IN GENERAL
    • B06B—METHODS OR APPARATUS FOR GENERATING OR TRANSMITTING MECHANICAL VIBRATIONS OF INFRASONIC, SONIC, OR ULTRASONIC FREQUENCY, e.g. FOR PERFORMING MECHANICAL WORK IN GENERAL
    • B06B1/00—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency
    • B06B1/02—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy
    • B06B1/06—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction
    • B06B1/0607—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements
    • B06B1/0622—Methods or apparatus for generating mechanical vibrations of infrasonic, sonic, or ultrasonic frequency making use of electrical energy operating with piezoelectric effect or with electrostriction using multiple elements on one surface
    • B06B1/0629—Square array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/02—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems using reflection of acoustic waves
    • G01S15/06—Systems determining the position data of a target
    • G01S15/08—Systems for measuring distance only
    • G01S15/10—Systems for measuring distance only using transmission of interrupted, pulse-modulated waves
    • G01S15/102—Systems for measuring distance only using transmission of interrupted, pulse-modulated waves using transmission of pulses having some particular characteristics
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • G01S15/8909—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration
    • G01S15/8913—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using separate transducers for transmission and reception
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • G01S15/8909—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration
    • G01S15/8915—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G01S15/8906—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques
    • G01S15/8909—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration
    • G01S15/8915—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array
    • G01S15/8925—Short-range imaging systems; Acoustic microscope systems using pulse-echo techniques using a static transducer configuration using a transducer array the array being a two-dimensional transducer configuration, i.e. matrix or orthogonal linear arrays
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/93—Sonar systems specially adapted for specific applications for anti-collision purposes
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52019—Details of transmitters
    • G01S7/5202—Details of transmitters for pulse systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52023—Details of receivers
    • G01S7/52025—Details of receivers for pulse systems
    • G01S7/52026—Extracting wanted echo signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52017—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00 particularly adapted to short-range imaging
    • G01S7/52079—Constructional features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/521—Constructional features
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/523—Details of pulse systems
    • G01S7/526—Receivers
    • G01S7/527—Extracting wanted echo signals
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S15/00—Systems using the reflection or reradiation of acoustic waves, e.g. sonar systems
    • G01S15/88—Sonar systems specially adapted for specific applications
    • G01S15/89—Sonar systems specially adapted for specific applications for mapping or imaging
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/52—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S15/00
    • G01S7/52004—Means for monitoring or calibrating

Landscapes

  • Engineering & Computer Science (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • General Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Mechanical Engineering (AREA)
  • Measurement Of Velocity Or Position Using Acoustic Or Ultrasonic Waves (AREA)
  • Transducers For Ultrasonic Waves (AREA)
CA3155317A 2019-10-25 2020-10-26 Ultrasonic transducers Pending CA3155317A1 (en)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
GB201915544A GB201915544D0 (en) 2019-10-25 2019-10-25 Ultrasonic transducers
GB1915544.9 2019-10-25
PCT/GB2020/052712 WO2021079160A1 (en) 2019-10-25 2020-10-26 Ultrasonic transducers

Publications (1)

Publication Number Publication Date
CA3155317A1 true CA3155317A1 (en) 2021-04-29

Family

ID=68768947

Family Applications (1)

Application Number Title Priority Date Filing Date
CA3155317A Pending CA3155317A1 (en) 2019-10-25 2020-10-26 Ultrasonic transducers

Country Status (8)

Country Link
US (1) US20220379346A1 (enExample)
EP (1) EP4048449A1 (enExample)
JP (1) JP2022554155A (enExample)
KR (1) KR20220090545A (enExample)
CN (1) CN114829024A (enExample)
CA (1) CA3155317A1 (enExample)
GB (1) GB201915544D0 (enExample)
WO (1) WO2021079160A1 (enExample)

Families Citing this family (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10966683B2 (en) 2018-03-22 2021-04-06 Exo Imaging Inc. Integrated ultrasonic transducers
US11899143B2 (en) 2021-07-12 2024-02-13 Robert Bosch Gmbh Ultrasound sensor array for parking assist systems
US12256642B2 (en) 2021-07-12 2025-03-18 Robert Bosch Gmbh Ultrasound transducer with distributed cantilevers
US12150384B2 (en) 2021-07-12 2024-11-19 Robert Bosch Gmbh Ultrasound transducer with distributed cantilevers
US12099150B2 (en) 2021-10-26 2024-09-24 Exo Imaging, Inc. Multi-transducer chip ultrasound device
EP4231920A4 (en) * 2021-10-26 2024-07-03 Exo Imaging Inc. Multi-transducer chip ultrasound device
GB202204823D0 (en) 2022-04-01 2022-05-18 Sintef Tto As Ultrasonic transducer housing
US12533711B2 (en) 2022-09-02 2026-01-27 Exo Imaging, Inc. Dual and multiple membrane micromachined ultrasound transducers
TWI877754B (zh) * 2023-08-29 2025-03-21 大陸商茂丞(鄭州)超聲科技有限公司 近距超聲波感測裝置及應用其之近距超聲波感測系統
CN117236032A (zh) * 2023-09-21 2023-12-15 哈尔滨工业大学 高温电磁超声换能器的多物理场-电路协同模拟系统及方法
CN120539710B (zh) * 2025-07-28 2025-10-21 青岛哈尔滨工程大学创新发展中心 一种压电微机械水声传感器、基阵以及水声成像系统

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5732706A (en) * 1996-03-22 1998-03-31 Lockheed Martin Ir Imaging Systems, Inc. Ultrasonic array with attenuating electrical interconnects
US6918877B2 (en) * 2003-08-05 2005-07-19 Siemens Medical Solutions Usa, Inc. Method and system for reducing undesirable cross talk in diagnostic ultrasound arrays
JP4715236B2 (ja) * 2005-03-01 2011-07-06 株式会社デンソー 超音波センサ装置
JP2007088805A (ja) * 2005-09-22 2007-04-05 Sanyo Electric Co Ltd 超音波レーダ
JP2007170975A (ja) * 2005-12-21 2007-07-05 Matsushita Electric Works Ltd 物体検知装置
DE102008054533B8 (de) * 2007-12-26 2013-02-14 Denso Corporation Ultraschallsensor
JP4509207B2 (ja) * 2008-02-22 2010-07-21 株式会社デンソー 超音波センサ
JP2011010793A (ja) * 2009-07-01 2011-01-20 Konica Minolta Medical & Graphic Inc 超音波画像診断装置
JP5540870B2 (ja) * 2010-04-27 2014-07-02 セイコーエプソン株式会社 超音波センサー、及び電子機器
JP5966621B2 (ja) * 2012-05-29 2016-08-10 セイコーエプソン株式会社 超音波デバイス、超音波プローブ及び超音波診断装置
NO20130884A1 (no) 2013-06-21 2014-12-22 Sinvent As Sensorelement med optisk forskyvning
US10139479B2 (en) * 2014-10-15 2018-11-27 Qualcomm Incorporated Superpixel array of piezoelectric ultrasonic transducers for 2-D beamforming
US10445547B2 (en) * 2016-05-04 2019-10-15 Invensense, Inc. Device mountable packaging of ultrasonic transducers
US10670716B2 (en) * 2016-05-04 2020-06-02 Invensense, Inc. Operating a two-dimensional array of ultrasonic transducers
US11039814B2 (en) * 2016-12-04 2021-06-22 Exo Imaging, Inc. Imaging devices having piezoelectric transducers
US20190076114A1 (en) * 2017-09-13 2019-03-14 Qualcomm Incorporated System and method for energy transfer
US11462194B1 (en) * 2018-07-30 2022-10-04 Apple Inc. Position sensors for system with overlapped displays

Also Published As

Publication number Publication date
WO2021079160A1 (en) 2021-04-29
JP2022554155A (ja) 2022-12-28
CN114829024A (zh) 2022-07-29
GB201915544D0 (en) 2019-12-11
KR20220090545A (ko) 2022-06-29
US20220379346A1 (en) 2022-12-01
EP4048449A1 (en) 2022-08-31

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Effective date: 20220825