CA3087748C - Detecteurs de rayonnement thermique avec absorbeurs optiques a base de nanotubes de carbone - Google Patents
Detecteurs de rayonnement thermique avec absorbeurs optiques a base de nanotubes de carbone Download PDFInfo
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- CA3087748C CA3087748C CA3087748A CA3087748A CA3087748C CA 3087748 C CA3087748 C CA 3087748C CA 3087748 A CA3087748 A CA 3087748A CA 3087748 A CA3087748 A CA 3087748A CA 3087748 C CA3087748 C CA 3087748C
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- thermal radiation
- platform
- optical absorber
- temperature sensor
- radiation detector
- Prior art date
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Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/08—Optical arrangements
- G01J5/0853—Optical arrangements having infrared absorbers other than the usual absorber layers deposited on infrared detectors like bolometers, wherein the heat propagation between the absorber and the detecting element occurs within a solid
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/02—Constructional details
- G01J5/04—Casings
- G01J5/046—Materials; Selection of thermal materials
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/12—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using thermoelectric elements, e.g. thermocouples
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/20—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using resistors, thermistors or semiconductors sensitive to radiation, e.g. photoconductive devices
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
- G01J5/00—Radiation pyrometry, e.g. infrared or optical thermometry
- G01J5/10—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors
- G01J5/34—Radiation pyrometry, e.g. infrared or optical thermometry using electric radiation detectors using capacitors, e.g. pyroelectric capacitors
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B82—NANOTECHNOLOGY
- B82Y—SPECIFIC USES OR APPLICATIONS OF NANOSTRUCTURES; MEASUREMENT OR ANALYSIS OF NANOSTRUCTURES; MANUFACTURE OR TREATMENT OF NANOSTRUCTURES
- B82Y30/00—Nanotechnology for materials or surface science, e.g. nanocomposites
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Spectroscopy & Molecular Physics (AREA)
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Photometry And Measurement Of Optical Pulse Characteristics (AREA)
Abstract
Un détecteur de rayonnement thermique comprend un substrat, une plateforme suspendue au-dessus du substrat, une structure de support soutenant la plateforme et un capteur de température placé sur la plateforme et comprenant un paramètre électrique qui change en fonction de la température du capteur. Le détecteur comprend également un absorbeur optique à base de nanotubes de carbone en contact thermique avec le capteur de température et à configuration pour absorber le rayonnement électromagnétique afin de générer de la chaleur pour changer la température du capteur. Labsorbeur optique peut comprendre un film de nanotube de carbone, obtenu par exemple à laide dun revêtement par pulvérisation. Le détecteur comprend également une structure de couche de passivation placée sur labsorbeur optique qui peut être fabriquée dun composé métallique (p. ex., un oxyde de titane ou daluminium). Le détecteur de rayonnement thermique peut être un microbolomètre, un détecteur de thermocouple/thermopile ou un détecteur pyroélectrique. Des réseaux de détecteurs de rayonnement thermique et des méthodes de fabrication sont aussi décrits.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA3087748A CA3087748C (fr) | 2020-07-23 | 2020-07-23 | Detecteurs de rayonnement thermique avec absorbeurs optiques a base de nanotubes de carbone |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CA3087748A CA3087748C (fr) | 2020-07-23 | 2020-07-23 | Detecteurs de rayonnement thermique avec absorbeurs optiques a base de nanotubes de carbone |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CA3087748A1 CA3087748A1 (fr) | 2022-01-23 |
| CA3087748C true CA3087748C (fr) | 2023-06-20 |
Family
ID=80081225
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA3087748A Active CA3087748C (fr) | 2020-07-23 | 2020-07-23 | Detecteurs de rayonnement thermique avec absorbeurs optiques a base de nanotubes de carbone |
Country Status (1)
| Country | Link |
|---|---|
| CA (1) | CA3087748C (fr) |
-
2020
- 2020-07-23 CA CA3087748A patent/CA3087748C/fr active Active
Also Published As
| Publication number | Publication date |
|---|---|
| CA3087748A1 (fr) | 2022-01-23 |
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