CA3056105C - Structures de dispositifs a piliers metalliques et procedes de fabrication et d'utilisation dans des applications electrochimiques et/ou electrocatalytiques - Google Patents

Structures de dispositifs a piliers metalliques et procedes de fabrication et d'utilisation dans des applications electrochimiques et/ou electrocatalytiques Download PDF

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Publication number
CA3056105C
CA3056105C CA3056105A CA3056105A CA3056105C CA 3056105 C CA3056105 C CA 3056105C CA 3056105 A CA3056105 A CA 3056105A CA 3056105 A CA3056105 A CA 3056105A CA 3056105 C CA3056105 C CA 3056105C
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Canada
Prior art keywords
pillars
analyte
sensor
electrode
composition
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CA3056105A
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CA3056105A1 (fr
Inventor
Akhil SRINIVASAN
Melissa TSANG
Robert C. Mucic
Tyler R. WONG
Rui KONG
Barry P. PHAM
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Medtronic Minimed Inc
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Medtronic Minimed Inc
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Classifications

    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/145Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
    • A61B5/14532Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue for measuring glucose, e.g. by tissue impedance measurement
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B5/00Measuring for diagnostic purposes; Identification of persons
    • A61B5/145Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue
    • A61B5/1486Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue using enzyme electrodes, e.g. with immobilised oxidase
    • A61B5/14865Measuring characteristics of blood in vivo, e.g. gas concentration, pH value; Measuring characteristics of body fluids or tissues, e.g. interstitial fluid, cerebral tissue using enzyme electrodes, e.g. with immobilised oxidase invasive, e.g. introduced into the body by a catheter or needle or using implanted sensors
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B3/00Devices comprising flexible or deformable elements, e.g. comprising elastic tongues or membranes
    • B81B3/0018Structures acting upon the moving or flexible element for transforming energy into mechanical movement or vice versa, i.e. actuators, sensors, generators
    • B81B3/0021Transducers for transforming electrical into mechanical energy or vice versa
    • CCHEMISTRY; METALLURGY
    • C12BIOCHEMISTRY; BEER; SPIRITS; WINE; VINEGAR; MICROBIOLOGY; ENZYMOLOGY; MUTATION OR GENETIC ENGINEERING
    • C12QMEASURING OR TESTING PROCESSES INVOLVING ENZYMES, NUCLEIC ACIDS OR MICROORGANISMS; COMPOSITIONS OR TEST PAPERS THEREFOR; PROCESSES OF PREPARING SUCH COMPOSITIONS; CONDITION-RESPONSIVE CONTROL IN MICROBIOLOGICAL OR ENZYMOLOGICAL PROCESSES
    • C12Q1/00Measuring or testing processes involving enzymes, nucleic acids or microorganisms; Compositions therefor; Processes of preparing such compositions
    • C12Q1/001Enzyme electrodes
    • C12Q1/005Enzyme electrodes involving specific analytes or enzymes
    • C12Q1/006Enzyme electrodes involving specific analytes or enzymes for glucose
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3275Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction
    • G01N27/3278Sensing specific biomolecules, e.g. nucleic acid strands, based on an electrode surface reaction involving nanosized elements, e.g. nanogaps or nanoparticles
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/02Details of sensors specially adapted for in-vivo measurements
    • A61B2562/0209Special features of electrodes classified in A61B5/24, A61B5/25, A61B5/283, A61B5/291, A61B5/296, A61B5/053
    • AHUMAN NECESSITIES
    • A61MEDICAL OR VETERINARY SCIENCE; HYGIENE
    • A61BDIAGNOSIS; SURGERY; IDENTIFICATION
    • A61B2562/00Details of sensors; Constructional details of sensor housings or probes; Accessories for sensors
    • A61B2562/12Manufacturing methods specially adapted for producing sensors for in-vivo measurements
    • A61B2562/125Manufacturing methods specially adapted for producing sensors for in-vivo measurements characterised by the manufacture of electrodes
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B81MICROSTRUCTURAL TECHNOLOGY
    • B81BMICROSTRUCTURAL DEVICES OR SYSTEMS, e.g. MICROMECHANICAL DEVICES
    • B81B2203/00Basic microelectromechanical structures
    • B81B2203/03Static structures
    • B81B2203/0361Tips, pillars
    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23CCOATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C14/00Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
    • C23C14/22Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
    • C23C14/34Sputtering
    • C23C14/3435Applying energy to the substrate during sputtering
    • C23C14/3442Applying energy to the substrate during sputtering using an ion beam
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/327Biochemical electrodes, e.g. electrical or mechanical details for in vitro measurements
    • G01N27/3271Amperometric enzyme electrodes for analytes in body fluids, e.g. glucose in blood
    • G01N27/3272Test elements therefor, i.e. disposable laminated substrates with electrodes, reagent and channels

Landscapes

  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Molecular Biology (AREA)
  • General Health & Medical Sciences (AREA)
  • Biophysics (AREA)
  • Organic Chemistry (AREA)
  • Pathology (AREA)
  • Analytical Chemistry (AREA)
  • Animal Behavior & Ethology (AREA)
  • Optics & Photonics (AREA)
  • Surgery (AREA)
  • Public Health (AREA)
  • Veterinary Medicine (AREA)
  • Medical Informatics (AREA)
  • Emergency Medicine (AREA)
  • Biomedical Technology (AREA)
  • Heart & Thoracic Surgery (AREA)
  • Wood Science & Technology (AREA)
  • Zoology (AREA)
  • Proteomics, Peptides & Aminoacids (AREA)
  • Biochemistry (AREA)
  • Immunology (AREA)
  • Biotechnology (AREA)
  • Microbiology (AREA)
  • Bioinformatics & Cheminformatics (AREA)
  • General Engineering & Computer Science (AREA)
  • Genetics & Genomics (AREA)
  • General Physics & Mathematics (AREA)
  • Electrochemistry (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Nanotechnology (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Measurement Of The Respiration, Hearing Ability, Form, And Blood Characteristics Of Living Organisms (AREA)

Abstract

L'invention concerne des compositions d'électrode formées à partir de processus consistant à pulvériser un métal de sorte à produire des architectures à piliers. Les modes de réalisation de l'invention peuvent concerner des capteurs d'analyte dotés de telles architectures d'électrode, ainsi que des procédés de fabrication et d'utilisation de ces électrodes de détection. Plusieurs modes de réalisation de l'invention sont utiles dans des capteurs ampérométriques de glucose portés par des individus diabétiques. Cependant, les structures de piliers métalliques présentent une vaste applicabilité et permettent d'augmenter la superficie et de réduire la densité de charge pour des électrodes ou couches de catalyseur utilisées dans la détection, la production d'énergie, l'enregistrement et la stimulation, in vitro et/ou à l'intérieur ou à l'extérieur du corps.
CA3056105A 2017-03-17 2018-03-16 Structures de dispositifs a piliers metalliques et procedes de fabrication et d'utilisation dans des applications electrochimiques et/ou electrocatalytiques Active CA3056105C (fr)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201762472712P 2017-03-17 2017-03-17
US62/472,712 2017-03-17
US15/922,718 2018-03-15
US15/922,718 US11134868B2 (en) 2017-03-17 2018-03-15 Metal pillar device structures and methods for making and using them in electrochemical and/or electrocatalytic applications
PCT/US2018/022805 WO2018170363A1 (fr) 2017-03-17 2018-03-16 Structures de dispositifs à piliers métalliques et procédés de fabrication et d'utilisation dans des applications électrochimiques et/ou électrocatalytiques

Publications (2)

Publication Number Publication Date
CA3056105A1 CA3056105A1 (fr) 2018-09-20
CA3056105C true CA3056105C (fr) 2022-06-21

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Family Applications (1)

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CA3056105A Active CA3056105C (fr) 2017-03-17 2018-03-16 Structures de dispositifs a piliers metalliques et procedes de fabrication et d'utilisation dans des applications electrochimiques et/ou electrocatalytiques

Country Status (5)

Country Link
US (2) US11134868B2 (fr)
EP (1) EP3596452A1 (fr)
CN (1) CN110651183A (fr)
CA (1) CA3056105C (fr)
WO (1) WO2018170363A1 (fr)

Families Citing this family (9)

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US11220735B2 (en) * 2018-02-08 2022-01-11 Medtronic Minimed, Inc. Methods for controlling physical vapor deposition metal film adhesion to substrates and surfaces
US11523757B2 (en) * 2019-08-01 2022-12-13 Medtronic Minimed, Inc. Micro-pillar working electrodes design to reduce backflow of hydrogen peroxide in glucose sensor
US20210030362A1 (en) * 2019-08-02 2021-02-04 Bionime Corporation Insertion device for a biosensor
GB2622909A (en) 2020-07-29 2024-04-03 Biolinq Incorporated Continuous analyte monitoring system with microneedle array
SE545874C2 (en) 2021-05-08 2024-02-27 Biolinq Incorporated Fault detection for microneedle array based continuous analyte monitoring device
EP4366618A1 (fr) * 2021-07-08 2024-05-15 Medtrum Technologies Inc. Capteur de micro-analyte
EP4312766A1 (fr) 2021-09-01 2024-02-07 Integrated Medical Sensors, Inc. Circuit de capteur intégré monolithique implantable filaire
CN114224306B (zh) * 2021-11-11 2024-03-22 煤炭科学研究总院有限公司 心率检测传感器、防护服和传感器的制作方法

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US11134868B2 (en) 2021-10-05
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WO2018170363A1 (fr) 2018-09-20
US20220054057A1 (en) 2022-02-24

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