CA2838390A1 - Appareil de reglage de pression - Google Patents

Appareil de reglage de pression Download PDF

Info

Publication number
CA2838390A1
CA2838390A1 CA2838390A CA2838390A CA2838390A1 CA 2838390 A1 CA2838390 A1 CA 2838390A1 CA 2838390 A CA2838390 A CA 2838390A CA 2838390 A CA2838390 A CA 2838390A CA 2838390 A1 CA2838390 A1 CA 2838390A1
Authority
CA
Canada
Prior art keywords
pressure
chamber
processor
temperature
temperature sensing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA2838390A
Other languages
English (en)
Inventor
Dezhi Zheng
Wei Ding
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
WALSN ENTERPRISES Ltd
Original Assignee
WALSN ENTERPRISES Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by WALSN ENTERPRISES Ltd filed Critical WALSN ENTERPRISES Ltd
Publication of CA2838390A1 publication Critical patent/CA2838390A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G05—CONTROLLING; REGULATING
    • G05D—SYSTEMS FOR CONTROLLING OR REGULATING NON-ELECTRIC VARIABLES
    • G05D16/00—Control of fluid pressure
    • G05D16/20—Control of fluid pressure characterised by the use of electric means
    • G05D16/2006—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means
    • G05D16/2013—Control of fluid pressure characterised by the use of electric means with direct action of electric energy on controlling means using throttling means as controlling means
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L27/00—Testing or calibrating of apparatus for measuring fluid pressure
    • G01L27/002—Calibrating, i.e. establishing true relation between transducer output value and value to be measured, zeroing, linearising or span error determination
    • G01L27/005—Apparatus for calibrating pressure sensors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Fluid Mechanics (AREA)
  • Engineering & Computer Science (AREA)
  • Automation & Control Theory (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Measuring Fluid Pressure (AREA)
  • Control Of Fluid Pressure (AREA)
CA2838390A 2013-01-04 2013-12-30 Appareil de reglage de pression Abandoned CA2838390A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CN201310000145.7A CN103116370B (zh) 2013-01-04 2013-01-04 一种压力调节装置
CN201310000145.7 2013-01-04

Publications (1)

Publication Number Publication Date
CA2838390A1 true CA2838390A1 (fr) 2014-07-04

Family

ID=48414779

Family Applications (1)

Application Number Title Priority Date Filing Date
CA2838390A Abandoned CA2838390A1 (fr) 2013-01-04 2013-12-30 Appareil de reglage de pression

Country Status (3)

Country Link
CN (1) CN103116370B (fr)
CA (1) CA2838390A1 (fr)
WO (1) WO2014106437A1 (fr)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN109596566A (zh) * 2018-10-29 2019-04-09 中国科学院合肥物质科学研究院 一种气体检测吸收腔体内部温度和压力一体化控制装置
CN110471469B (zh) * 2019-09-26 2021-03-16 湖南航天机电设备与特种材料研究所 一种基于pi算法的自适应温控方法
CN111288296A (zh) * 2020-02-13 2020-06-16 蓝箭航天技术有限公司 一种氮气置换设备的控制装置和方法
CN113220045B (zh) * 2021-05-10 2023-03-31 南京英锐创电子科技有限公司 气压控制装置和方法
CN114483695A (zh) * 2022-01-30 2022-05-13 北京康斯特仪表科技股份有限公司 液体压力校验装置

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6269034A (ja) * 1985-09-24 1987-03-30 Hitachi Ltd 温調装置
DE4103769C1 (fr) * 1991-02-08 1992-06-17 Draegerwerk Ag, 2400 Luebeck, De
CN2168275Y (zh) * 1992-12-30 1994-06-08 郭福玲 密封容器内部压力自动调节装置
US20050087238A1 (en) * 2003-10-22 2005-04-28 Wilson Robert E. Compressed air control system refinements
JP4819581B2 (ja) * 2006-06-02 2011-11-24 富士フイルム株式会社 液体貯留装置および画像形成装置
CN201466727U (zh) * 2009-05-26 2010-05-12 长沙矿山研究院 一种深海压力补偿器
CN102103381B (zh) * 2009-12-16 2014-06-25 上海神开石油化工装备股份有限公司 电子压力控制器
CN201886370U (zh) * 2010-12-16 2011-06-29 河南省中分仪器有限公司 智能气体流量和压力控制器
CN102385397A (zh) * 2011-09-29 2012-03-21 北京振兴计量测试研究所 基于高速电磁阀的高精度压力控制系统
CN102677024A (zh) * 2012-05-28 2012-09-19 上海华力微电子有限公司 腔体压力调节方法及腔体压力调节装置
CN103092222B (zh) * 2012-12-31 2016-01-27 孙晓君 一种压力精密调节装置

Also Published As

Publication number Publication date
CN103116370B (zh) 2015-06-03
WO2014106437A1 (fr) 2014-07-10
CN103116370A (zh) 2013-05-22

Similar Documents

Publication Publication Date Title
CA2837786A1 (fr) Appareil pour reglage de pression precis
CA2838390A1 (fr) Appareil de reglage de pression
US7380564B2 (en) System and method for a mass flow controller
US5339687A (en) Flowmeter
JP6364349B2 (ja) マスフローコントローラ、及びマスフローコントローラを動作させる方法
KR101738282B1 (ko) 조절기, 제어 방법 및 제어 프로그램
US8195312B2 (en) Multi-mode control loop with improved performance for mass flow controller
CN101860322A (zh) 自动跟随温度控制晶体振荡器
CN101769800A (zh) 基于arm的高精度温度校验方法及仪器
JP2019159687A (ja) 流量制御装置、流量制御方法、及び、流量制御装置用プログラム
RU2019120052A (ru) Датчик потока и способ измерения скорости потока
JPWO2016042589A1 (ja) 制御装置
CN103713519A (zh) 比例放大器pid参数自整定控制方法及比例放大器、比例电磁阀
CN114370521B (zh) 一种电比例溢流阀滞环补偿控制方法及其系统
US11921526B2 (en) Method and system for controlling an electric heater using control on energy
JP5464326B2 (ja) 物理量制御装置、物理量制御方法及び物理量制御プログラム
KR102668952B1 (ko) 대상(Target)의 전력값을 판단하는 장치 및 방법
JP2012168824A (ja) 流体制御装置
EP1457856B1 (fr) Procédé pour déterminer l'ouverture d'une soupape pour un régulateur numérique de débit massique
TWM629074U (zh) 流速偵測裝置
KR20190138822A (ko) 대상(Target)의 전력값을 판단하는 장치 및 방법
JP2012168822A (ja) 流体制御装置
JP2019105338A (ja) 流体制御装置及び流体制御装置用プログラム
JP2012023460A (ja) 変換装置、及び計測装置

Legal Events

Date Code Title Description
FZDE Dead

Effective date: 20160803