CA2761872C - Pecvd coating using an organosilicon precursor - Google Patents
Pecvd coating using an organosilicon precursor Download PDFInfo
- Publication number
- CA2761872C CA2761872C CA2761872A CA2761872A CA2761872C CA 2761872 C CA2761872 C CA 2761872C CA 2761872 A CA2761872 A CA 2761872A CA 2761872 A CA2761872 A CA 2761872A CA 2761872 C CA2761872 C CA 2761872C
- Authority
- CA
- Canada
- Prior art keywords
- organosilicon precursor
- coating
- plasma
- generating
- setting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Classifications
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/04—Coating on selected surface areas, e.g. using masks
- C23C16/045—Coating cavities or hollow spaces, e.g. interior of tubes; Infiltration of porous substrates
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/455—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for introducing gases into reaction chamber or for modifying gas flows in reaction chamber
- C23C16/45563—Gas nozzles
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/50—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges
- C23C16/505—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating using electric discharges using radio frequency discharges
Abstract
A method for coating a substrate surface by PECVD is provided, the method comprising generating a plasma from a gaseous reactant comprising an organosilicon precursor and optionally O2.
The lubricity, hydrophobicity and/or barrier properties of the coating are set by setting the ratio of the O2 to the organosilicon precursor in the gaseous reactant, and/or by setting the electric power used for generating the plasma. In particular, a lubricity coating made by said method is provided. Vessels coated by said method and the use of such vessels protecting a compound or composition contained or received in said coated vessel against mechanical and/or chemical effects of the surface of the uncoated vessel material are also provided.
The lubricity, hydrophobicity and/or barrier properties of the coating are set by setting the ratio of the O2 to the organosilicon precursor in the gaseous reactant, and/or by setting the electric power used for generating the plasma. In particular, a lubricity coating made by said method is provided. Vessels coated by said method and the use of such vessels protecting a compound or composition contained or received in said coated vessel against mechanical and/or chemical effects of the surface of the uncoated vessel material are also provided.
Applications Claiming Priority (35)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US17798409P | 2009-05-13 | 2009-05-13 | |
US61/177,984 | 2009-05-13 | ||
US22272709P | 2009-07-02 | 2009-07-02 | |
US61/222,727 | 2009-07-02 | ||
US21390409P | 2009-07-24 | 2009-07-24 | |
US61/213,904 | 2009-07-24 | ||
US23450509P | 2009-08-17 | 2009-08-17 | |
US61/234,505 | 2009-08-17 | ||
US26132109P | 2009-11-14 | 2009-11-14 | |
US61/261,321 | 2009-11-14 | ||
US26328909P | 2009-11-20 | 2009-11-20 | |
US61/263,289 | 2009-11-20 | ||
US28581309P | 2009-12-11 | 2009-12-11 | |
US61/285,813 | 2009-12-11 | ||
US29815910P | 2010-01-25 | 2010-01-25 | |
US61/298,159 | 2010-01-25 | ||
US29988810P | 2010-01-29 | 2010-01-29 | |
US61/299,888 | 2010-01-29 | ||
US31819710P | 2010-03-26 | 2010-03-26 | |
US61/318,197 | 2010-03-26 | ||
US33362510P | 2010-05-11 | 2010-05-11 | |
US61/333,625 | 2010-05-11 | ||
EP10162760.2 | 2010-05-12 | ||
EP10162756.0 | 2010-05-12 | ||
EP10162758.6 | 2010-05-12 | ||
EP10162755.2A EP2253735B1 (en) | 2009-05-13 | 2010-05-12 | Vessel processing |
EP10162755.2 | 2010-05-12 | ||
EP10162761.0 | 2010-05-12 | ||
EP10162756.0A EP2251452B1 (en) | 2009-05-13 | 2010-05-12 | Pecvd apparatus for vessel coating |
PCT/US2010/034586 WO2010132591A2 (en) | 2009-05-13 | 2010-05-12 | Pecvd coating using an organosilicon precursor |
EP10162760.2A EP2251454B1 (en) | 2009-05-13 | 2010-05-12 | Vessel coating and inspection |
EP10162761.0A EP2251455B1 (en) | 2009-05-13 | 2010-05-12 | PECVD coating using an organosilicon precursor |
EP10162758.6A EP2251671B1 (en) | 2009-05-13 | 2010-05-12 | Outgassing method for inspecting a coated surface |
EP10162757.8 | 2010-05-12 | ||
EP10162757.8A EP2251453B1 (en) | 2009-05-13 | 2010-05-12 | Vessel holder |
Publications (2)
Publication Number | Publication Date |
---|---|
CA2761872A1 CA2761872A1 (en) | 2010-11-18 |
CA2761872C true CA2761872C (en) | 2021-10-26 |
Family
ID=45470135
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA2761905A Active CA2761905C (en) | 2009-05-13 | 2010-05-12 | Outgassing method for inspecting a coated surface |
CA2761872A Active CA2761872C (en) | 2009-05-13 | 2010-05-12 | Pecvd coating using an organosilicon precursor |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CA2761905A Active CA2761905C (en) | 2009-05-13 | 2010-05-12 | Outgassing method for inspecting a coated surface |
Country Status (1)
Country | Link |
---|---|
CA (2) | CA2761905C (en) |
Families Citing this family (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111270209B (en) * | 2018-12-05 | 2023-12-12 | 东君新能源有限公司 | Steam sputtering device, control system and control method |
CN111239147B (en) * | 2020-01-19 | 2023-04-14 | 山东电力工业锅炉压力容器检验中心有限公司 | Darkroom-free fluorescence permeation detection method for tube bank clamping block on high-temperature heating surface of power station boiler |
CN113894696B (en) * | 2021-10-29 | 2023-01-24 | 北京烁科精微电子装备有限公司 | Polishing monitoring device and polishing monitoring method |
-
2010
- 2010-05-12 CA CA2761905A patent/CA2761905C/en active Active
- 2010-05-12 CA CA2761872A patent/CA2761872C/en active Active
Also Published As
Publication number | Publication date |
---|---|
CA2761905A1 (en) | 2010-11-18 |
CA2761905C (en) | 2017-11-28 |
CA2761872A1 (en) | 2010-11-18 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
EEER | Examination request |
Effective date: 20150507 |