CA2381773A1 - Method for modulating an optically pumped, tunable vertical cavity surface emitting laser (vcsel) - Google Patents
Method for modulating an optically pumped, tunable vertical cavity surface emitting laser (vcsel) Download PDFInfo
- Publication number
- CA2381773A1 CA2381773A1 CA002381773A CA2381773A CA2381773A1 CA 2381773 A1 CA2381773 A1 CA 2381773A1 CA 002381773 A CA002381773 A CA 002381773A CA 2381773 A CA2381773 A CA 2381773A CA 2381773 A1 CA2381773 A1 CA 2381773A1
- Authority
- CA
- Canada
- Prior art keywords
- vcsel
- modulating
- output
- tunable
- optically pumped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
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Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18361—Structure of the reflectors, e.g. hybrid mirrors
- H01S5/18363—Structure of the reflectors, e.g. hybrid mirrors comprising air layers
- H01S5/18366—Membrane DBR, i.e. a movable DBR on top of the VCSEL
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/04—Processes or apparatus for excitation, e.g. pumping, e.g. by electron beams
- H01S5/041—Optical pumping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/091—Processes or apparatus for excitation, e.g. pumping using optical pumping
- H01S3/094—Processes or apparatus for excitation, e.g. pumping using optical pumping by coherent light
- H01S3/094076—Pulsed or modulated pumping
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/06—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium
- H01S5/0607—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature
- H01S5/0614—Arrangements for controlling the laser output parameters, e.g. by operating on the active medium by varying physical parameters other than the potential of the electrodes, e.g. by an electric or magnetic field, mechanical deformation, pressure, light, temperature controlled by electric field, i.e. whereby an additional electric field is used to tune the bandgap, e.g. using the Stark-effect
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/10—Construction or shape of the optical resonator, e.g. extended or external cavity, coupled cavities, bent-guide, varying width, thickness or composition of the active region
- H01S5/18—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities
- H01S5/183—Surface-emitting [SE] lasers, e.g. having both horizontal and vertical cavities having only vertical cavities, e.g. vertical cavity surface-emitting lasers [VCSEL]
- H01S5/18386—Details of the emission surface for influencing the near- or far-field, e.g. a grating on the surface
- H01S5/18388—Lenses
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Abstract
A method for modulating the output of an optically pumped, tunab le VCSEL (5 ). Two approaches are disclosed. In a first approach, the output of the VCSEL ( 5) is modulated by modulating the pump laser (100). In a second approach, the output of the VCSEL (5) is modulated by modulating a voltage applied across the active region.
Description
METHOD FOR MODULATING AN OPTICALLY PUMPED, TUNABLE
VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL
Reference To Pending Prior Patent Application This patent application claims benefit of pending prior U.S. Provisional Patent Application Serial No.
60/148,629, filed 08/12/99 by Daryoosh Vakhshoori and Parviz Tayebati for MODULATION METHODS OF OPTICALLY
PUMPED TUNABLE VERTICAL CAVITY SURFACE EMITTING
LASERS, which patent application is hereby incorporated herein by reference.
Field Of The Invention This invention relates to photonic devices in general, and more particularly to tunable lasers.
Background Of The Invention In pending prior U.S. Patent Application Serial No. 09/105,399, filed 06/26/98 by Parviz Tayebati et al. for MICROELECTROMECHANICALL,Y TUNABLE, CONFOCAL, VERTICAL CAVITY SURFACE EMITTING LASER AND FABRY-PEROT
VERTICAL CAVITY SURFACE EMITTING LASER (VCSEL
Reference To Pending Prior Patent Application This patent application claims benefit of pending prior U.S. Provisional Patent Application Serial No.
60/148,629, filed 08/12/99 by Daryoosh Vakhshoori and Parviz Tayebati for MODULATION METHODS OF OPTICALLY
PUMPED TUNABLE VERTICAL CAVITY SURFACE EMITTING
LASERS, which patent application is hereby incorporated herein by reference.
Field Of The Invention This invention relates to photonic devices in general, and more particularly to tunable lasers.
Background Of The Invention In pending prior U.S. Patent Application Serial No. 09/105,399, filed 06/26/98 by Parviz Tayebati et al. for MICROELECTROMECHANICALL,Y TUNABLE, CONFOCAL, VERTICAL CAVITY SURFACE EMITTING LASER AND FABRY-PEROT
FILTER, and in pending prior U.S. Patent Application Serial No. 09/593,318, filed 04'/05/00 by Peidong Wang et al. for SINGLE MODE OPERATION OF MICROMECHANICALLY
TUNABLE, HALF-SYMMETRIC, VERTICAL CAVITY SURFACE
EMITTING LASERS, which patent applications are hereby incorporated herein by reference, there are disclosed tunable Fabry-Perot filters and tunable vertical cavity surface emittincJ lasers (VCSEL' s) .
Plore particularly, and looking now at Fig. l, there is shown a tunable vertical cavity surface emitting laser (VCSEL) 5 formed in accordance with the aforementioned U.S. Patent App lications Serial Nos.
09/105,399 and 09/543,318. VCSEL 5 generally comprises a substrate 10, a bottom mirror 20 mounted to the top of substrate 10, a gain medium (or "active region") 23 mounted to the top of bottom mirror 20, a bottom electrode 15 mounted to the top of gain medium 23, a thin support 25 atop bottom electrode 15, a top electrode 30 fixed to the underside of thin support 25, a reinforcer 35 fixed to the outside perimeter of thin :~.i_~pport 25, and a confocal top mirror 40 set atop thin support 25, with an air cavity 95 being formed between bottom mirror 20 and top mirror 40.
As a result of this construction, when active region 23 is appropriately stimulated, e.g., by optical pumping or electrical current, lasing can be established within air cavity 45, between top mirror 40 and bottom mirror 20. Furthermore, by applying an appropriate voltage across top electrode 30 and bottom electrode 15, the position of top mirror 40 can be changed relative to bottom mirror 20, whereby to change the length of the laser's resonant cavity, and hence tune VCSEL 5.
The present invention is directed to VCSEL's which are constructed so as to have their active region stimulated by optical pumping.
Objects Of The Invention The primary object of the present invention is to provide a novel method for modulating the output of an optically pumped, tunable VCSEL.
_ q _ Another object of the present invention is to provide a novel method for modulating the output of an optically pumped, tunable VCSEL by modulating the pump laser.
And another object of the present invention is to provide a novel method for modulating the output of an optically pumped, tunable VCSEL by modulating a voltage applied across the active region.
Summary Of The Invention These and other objects are addressed by the present invention.
In one form of the invention, there is provided a method for modulating the output of an optically pumped, tunable VCSEL, wherein the method comprises the steps of: (1) optically pumping the VCSEL with a pump laser so as to cause the VCSEL to generate an output; and (2) modulating the output light power of the pump laser so as to modulate the carrier population in the VCSEL's active region whereby to modulate the output of the VCSEL.
In another form of the invention, there is provided a method for modulating the output of an optically pumped, tunable VCSEL., wherein the method comprises the steps of: (1) optically pumping the VCSEL with a pump laser so as to cause the VCSEL to generate an output; and (2) applying a voltage across the active region so as to alter the optical power circulating in the VCSEL's cavity, whereby to increase or decrease the output power of the VCSEL.
Brief Description Of The Drawings These and other objects and features of the present invention will be more 'fully disclosed or rendered obvious by the following detailed description of the preferred embodiments of the invention, which is to be considered together with the accompanying drawings wherein like numbers refer to like parts and further wherein:
Fig. 1 is a schematic side view of a tunable VCSEL;
Fig. 2 is a schematic diagram showing the output of an optically pumped, tunable VCSEL being modulated by modulating the pump laser; and Fig. 3 is a schematic diagram showing the output of an optically pumped, tunable VCSEL being modulated by modulating a voltage applied, across the VCSEL's active region.
Detailed Description Of The Preferred Embodiments The present invention provides two ways for modulating the output of an optically pumped, tunable vertical cavity surface emitting laser (VCSEL).
In the first approach, the pump laser is directly modulated in the manner shown in Fig. 2. More particularly, the pump laser 100 is imaged on the active region of VCSEL 5. The pump laser can be of the 980 nm or 1400-1500 nm variety, and is typically of edge-emitting geometry. As the output light power of the pump laser 100 is modulated, the carrier population in the VCSEL's active region is also modulated. This in turn results in modulation of the output of VCSEL 5.
In the second approach, the P-N junction of the VCSEL's active region is either forward or reverse biased to modulate the output of VCSEL 5. This is schematically illustrated in Fig. 3. More particularly, in this approach, the pump laser 100 is operated in CW mode and biases the.VCSEL's output to a DC level. Then the application of the voltage VZ-V1 across the active region will add to, or subtract from, the optical power circulating in the VCSEL's cavity, resulting in an increase, or decrease, in the output power of VCSEL 5.
Modifications It is to be understood that the present invention is by no means limited to the particular constructions and method steps disclosed above and/or shown in the drawings, but also comprises an.y modifications or equivalents within the scope of the claims.
TUNABLE, HALF-SYMMETRIC, VERTICAL CAVITY SURFACE
EMITTING LASERS, which patent applications are hereby incorporated herein by reference, there are disclosed tunable Fabry-Perot filters and tunable vertical cavity surface emittincJ lasers (VCSEL' s) .
Plore particularly, and looking now at Fig. l, there is shown a tunable vertical cavity surface emitting laser (VCSEL) 5 formed in accordance with the aforementioned U.S. Patent App lications Serial Nos.
09/105,399 and 09/543,318. VCSEL 5 generally comprises a substrate 10, a bottom mirror 20 mounted to the top of substrate 10, a gain medium (or "active region") 23 mounted to the top of bottom mirror 20, a bottom electrode 15 mounted to the top of gain medium 23, a thin support 25 atop bottom electrode 15, a top electrode 30 fixed to the underside of thin support 25, a reinforcer 35 fixed to the outside perimeter of thin :~.i_~pport 25, and a confocal top mirror 40 set atop thin support 25, with an air cavity 95 being formed between bottom mirror 20 and top mirror 40.
As a result of this construction, when active region 23 is appropriately stimulated, e.g., by optical pumping or electrical current, lasing can be established within air cavity 45, between top mirror 40 and bottom mirror 20. Furthermore, by applying an appropriate voltage across top electrode 30 and bottom electrode 15, the position of top mirror 40 can be changed relative to bottom mirror 20, whereby to change the length of the laser's resonant cavity, and hence tune VCSEL 5.
The present invention is directed to VCSEL's which are constructed so as to have their active region stimulated by optical pumping.
Objects Of The Invention The primary object of the present invention is to provide a novel method for modulating the output of an optically pumped, tunable VCSEL.
_ q _ Another object of the present invention is to provide a novel method for modulating the output of an optically pumped, tunable VCSEL by modulating the pump laser.
And another object of the present invention is to provide a novel method for modulating the output of an optically pumped, tunable VCSEL by modulating a voltage applied across the active region.
Summary Of The Invention These and other objects are addressed by the present invention.
In one form of the invention, there is provided a method for modulating the output of an optically pumped, tunable VCSEL, wherein the method comprises the steps of: (1) optically pumping the VCSEL with a pump laser so as to cause the VCSEL to generate an output; and (2) modulating the output light power of the pump laser so as to modulate the carrier population in the VCSEL's active region whereby to modulate the output of the VCSEL.
In another form of the invention, there is provided a method for modulating the output of an optically pumped, tunable VCSEL., wherein the method comprises the steps of: (1) optically pumping the VCSEL with a pump laser so as to cause the VCSEL to generate an output; and (2) applying a voltage across the active region so as to alter the optical power circulating in the VCSEL's cavity, whereby to increase or decrease the output power of the VCSEL.
Brief Description Of The Drawings These and other objects and features of the present invention will be more 'fully disclosed or rendered obvious by the following detailed description of the preferred embodiments of the invention, which is to be considered together with the accompanying drawings wherein like numbers refer to like parts and further wherein:
Fig. 1 is a schematic side view of a tunable VCSEL;
Fig. 2 is a schematic diagram showing the output of an optically pumped, tunable VCSEL being modulated by modulating the pump laser; and Fig. 3 is a schematic diagram showing the output of an optically pumped, tunable VCSEL being modulated by modulating a voltage applied, across the VCSEL's active region.
Detailed Description Of The Preferred Embodiments The present invention provides two ways for modulating the output of an optically pumped, tunable vertical cavity surface emitting laser (VCSEL).
In the first approach, the pump laser is directly modulated in the manner shown in Fig. 2. More particularly, the pump laser 100 is imaged on the active region of VCSEL 5. The pump laser can be of the 980 nm or 1400-1500 nm variety, and is typically of edge-emitting geometry. As the output light power of the pump laser 100 is modulated, the carrier population in the VCSEL's active region is also modulated. This in turn results in modulation of the output of VCSEL 5.
In the second approach, the P-N junction of the VCSEL's active region is either forward or reverse biased to modulate the output of VCSEL 5. This is schematically illustrated in Fig. 3. More particularly, in this approach, the pump laser 100 is operated in CW mode and biases the.VCSEL's output to a DC level. Then the application of the voltage VZ-V1 across the active region will add to, or subtract from, the optical power circulating in the VCSEL's cavity, resulting in an increase, or decrease, in the output power of VCSEL 5.
Modifications It is to be understood that the present invention is by no means limited to the particular constructions and method steps disclosed above and/or shown in the drawings, but also comprises an.y modifications or equivalents within the scope of the claims.
Claims (2)
1. A method for modulating the output of an optically pumped, tunable VCSEL, wherein said method comprises the steps of:
(1) optically pumping the VCSEL with a pump laser so as to cause the VCSEL to generate an output:
and (2) modulating the output light power of the pump laser so as to modulate the carrier population in the VCSEL's active region, whereby.to modulate the output of the VCSEL.
(1) optically pumping the VCSEL with a pump laser so as to cause the VCSEL to generate an output:
and (2) modulating the output light power of the pump laser so as to modulate the carrier population in the VCSEL's active region, whereby.to modulate the output of the VCSEL.
2. A method for modulating the output of an optically pumped, tunable VCSEL, wherein said method comprises the steps of:
(1) optically pumping the VCSEL with a pump laser so as to cause the VCSEL to generate an output;
and (2) applying a voltage across the VCSEL's active region so as to alter the optical power circulating in the VCSEL's cavity, whereby to increase or decrease the output power of the VCSEL.
(1) optically pumping the VCSEL with a pump laser so as to cause the VCSEL to generate an output;
and (2) applying a voltage across the VCSEL's active region so as to alter the optical power circulating in the VCSEL's cavity, whereby to increase or decrease the output power of the VCSEL.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US14862999P | 1999-08-12 | 1999-08-12 | |
| US60/148,629 | 1999-08-12 | ||
| PCT/US2000/022062 WO2001013481A1 (en) | 1999-08-12 | 2000-08-11 | Method for modulating an optically pumped, tunable vertical cavi ty surface emitting laser (vcsel) |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2381773A1 true CA2381773A1 (en) | 2001-02-22 |
Family
ID=22526610
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002381773A Abandoned CA2381773A1 (en) | 1999-08-12 | 2000-08-11 | Method for modulating an optically pumped, tunable vertical cavity surface emitting laser (vcsel) |
Country Status (3)
| Country | Link |
|---|---|
| EP (1) | EP1218991A1 (en) |
| CA (1) | CA2381773A1 (en) |
| WO (1) | WO2001013481A1 (en) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2824188B1 (en) * | 2001-04-25 | 2003-12-12 | Commissariat Energie Atomique | OPTICAL DEVICE COMPRISING A PLURALITY OF RESONANT CAVITIES OF DIFFERENT LENGTHS ASSOCIATED WITH DIFFERENT WAVE LENGTHS |
| EP1341274A1 (en) * | 2002-03-01 | 2003-09-03 | GSI Lumonics Ltd. | Laser apparatus |
| DE10214120B4 (en) * | 2002-03-28 | 2007-06-06 | Osram Opto Semiconductors Gmbh | Optically pumpable surface emitting semiconductor laser device |
| DE10223540B4 (en) * | 2002-05-27 | 2006-12-21 | Osram Opto Semiconductors Gmbh | Optically pumped semiconductor laser device |
| US6963594B2 (en) * | 2002-10-16 | 2005-11-08 | Eastman Kodak Company | Organic laser cavity device having incoherent light as a pumping source |
| US6947466B2 (en) | 2004-01-29 | 2005-09-20 | Coherent, Inc. | Optically pumped edge-emitting semiconductor laser |
| US7433374B2 (en) | 2006-12-21 | 2008-10-07 | Coherent, Inc. | Frequency-doubled edge-emitting semiconductor lasers |
Family Cites Families (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| FR2734094B1 (en) * | 1995-05-12 | 1997-06-06 | Commissariat Energie Atomique | SOLID-STATE MONOLITHIC INFRARED TRANSMITTER PUMPED BY A SOLID TRIGGERED MICROLASER |
| US6088376A (en) * | 1998-03-16 | 2000-07-11 | California Institute Of Technology | Vertical-cavity-surface-emitting semiconductor devices with fiber-coupled optical cavity |
| US5991318A (en) * | 1998-10-26 | 1999-11-23 | Coherent, Inc. | Intracavity frequency-converted optically-pumped semiconductor laser |
-
2000
- 2000-08-11 CA CA002381773A patent/CA2381773A1/en not_active Abandoned
- 2000-08-11 EP EP00957394A patent/EP1218991A1/en not_active Withdrawn
- 2000-08-11 WO PCT/US2000/022062 patent/WO2001013481A1/en not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| EP1218991A1 (en) | 2002-07-03 |
| WO2001013481A9 (en) | 2002-07-11 |
| WO2001013481A1 (en) | 2001-02-22 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Discontinued |