CA2355450A1 - Miroirs a fixations hybrides pour commutateur optique de systeme microelectromecanique - Google Patents

Miroirs a fixations hybrides pour commutateur optique de systeme microelectromecanique Download PDF

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Publication number
CA2355450A1
CA2355450A1 CA 2355450 CA2355450A CA2355450A1 CA 2355450 A1 CA2355450 A1 CA 2355450A1 CA 2355450 CA2355450 CA 2355450 CA 2355450 A CA2355450 A CA 2355450A CA 2355450 A1 CA2355450 A1 CA 2355450A1
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CA
Canada
Prior art keywords
mirrors
array
accordance
manufacturing
silicon wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA 2355450
Other languages
English (en)
Inventor
Sean S. O'keefe
Keith D. Anderson
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Lumentum Technology UK Ltd
Original Assignee
Nortel Networks Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nortel Networks Ltd filed Critical Nortel Networks Ltd
Publication of CA2355450A1 publication Critical patent/CA2355450A1/fr
Abandoned legal-status Critical Current

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  • Micromachines (AREA)
CA 2355450 2000-09-29 2001-08-20 Miroirs a fixations hybrides pour commutateur optique de systeme microelectromecanique Abandoned CA2355450A1 (fr)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US67270300A 2000-09-29 2000-09-29
US09/672,703 2000-09-29

Publications (1)

Publication Number Publication Date
CA2355450A1 true CA2355450A1 (fr) 2002-03-29

Family

ID=24699655

Family Applications (1)

Application Number Title Priority Date Filing Date
CA 2355450 Abandoned CA2355450A1 (fr) 2000-09-29 2001-08-20 Miroirs a fixations hybrides pour commutateur optique de systeme microelectromecanique

Country Status (1)

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CA (1) CA2355450A1 (fr)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI403456B (zh) * 2004-09-27 2013-08-01 Qualcomm Mems Technologies Inc 微機電裝置、微機電開關、包含微機電開關之顯示系統、及操作及製造微機電開關之方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI403456B (zh) * 2004-09-27 2013-08-01 Qualcomm Mems Technologies Inc 微機電裝置、微機電開關、包含微機電開關之顯示系統、及操作及製造微機電開關之方法

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