CA2354076A1 - Ferroelectric pump - Google Patents
Ferroelectric pump Download PDFInfo
- Publication number
- CA2354076A1 CA2354076A1 CA002354076A CA2354076A CA2354076A1 CA 2354076 A1 CA2354076 A1 CA 2354076A1 CA 002354076 A CA002354076 A CA 002354076A CA 2354076 A CA2354076 A CA 2354076A CA 2354076 A1 CA2354076 A1 CA 2354076A1
- Authority
- CA
- Canada
- Prior art keywords
- actuator
- voltage
- planar surface
- ferroelectric
- contact layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Abandoned
Links
- 238000005086 pumping Methods 0.000 claims abstract description 30
- 238000006073 displacement reaction Methods 0.000 claims abstract description 23
- 230000004044 response Effects 0.000 claims abstract description 17
- 239000012212 insulator Substances 0.000 claims description 25
- 125000006850 spacer group Chemical group 0.000 claims description 18
- 239000012530 fluid Substances 0.000 claims description 16
- 238000007789 sealing Methods 0.000 claims description 6
- 239000007788 liquid Substances 0.000 claims description 5
- 239000000615 nonconductor Substances 0.000 claims description 5
- 238000002955 isolation Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 claims description 4
- 239000000463 material Substances 0.000 description 7
- 238000010586 diagram Methods 0.000 description 5
- 230000008901 benefit Effects 0.000 description 4
- 239000012528 membrane Substances 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 239000000919 ceramic Substances 0.000 description 3
- 239000007789 gas Substances 0.000 description 3
- 239000012811 non-conductive material Substances 0.000 description 3
- 230000009467 reduction Effects 0.000 description 3
- 238000003462 Bender reaction Methods 0.000 description 2
- 229910001369 Brass Inorganic materials 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 2
- 239000010951 brass Substances 0.000 description 2
- 239000003990 capacitor Substances 0.000 description 2
- 230000008859 change Effects 0.000 description 2
- 239000002131 composite material Substances 0.000 description 2
- 230000006835 compression Effects 0.000 description 2
- 238000007906 compression Methods 0.000 description 2
- 239000010949 copper Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 230000003247 decreasing effect Effects 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 238000004804 winding Methods 0.000 description 2
- KRQUFUKTQHISJB-YYADALCUSA-N 2-[(E)-N-[2-(4-chlorophenoxy)propoxy]-C-propylcarbonimidoyl]-3-hydroxy-5-(thian-3-yl)cyclohex-2-en-1-one Chemical compound CCC\C(=N/OCC(C)OC1=CC=C(Cl)C=C1)C1=C(O)CC(CC1=O)C1CCCSC1 KRQUFUKTQHISJB-YYADALCUSA-N 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000000712 assembly Effects 0.000 description 1
- 238000000429 assembly Methods 0.000 description 1
- 239000004020 conductor Substances 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 229920001971 elastomer Polymers 0.000 description 1
- 238000001962 electrophoresis Methods 0.000 description 1
- 229920006333 epoxy cement Polymers 0.000 description 1
- 230000002349 favourable effect Effects 0.000 description 1
- 239000011888 foil Substances 0.000 description 1
- 239000000446 fuel Substances 0.000 description 1
- 239000004816 latex Substances 0.000 description 1
- 229920000126 latex Polymers 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000000873 masking effect Effects 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004448 titration Methods 0.000 description 1
Classifications
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0054—Special features particularities of the flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B45/00—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids
- F04B45/04—Pumps or pumping installations having flexible working members and specially adapted for elastic fluids having plate-like flexible members, e.g. diaphragms
- F04B45/047—Pumps having electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/16—Casings; Cylinders; Cylinder liners or heads; Fluid connections
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Reciprocating Pumps (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| PCT/US1998/026389 WO2000036302A1 (en) | 1998-12-11 | 1998-12-11 | Ferroelectric pump |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CA2354076A1 true CA2354076A1 (en) | 2000-06-22 |
Family
ID=22268467
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CA002354076A Abandoned CA2354076A1 (en) | 1998-12-11 | 1998-12-11 | Ferroelectric pump |
Country Status (8)
| Country | Link |
|---|---|
| EP (1) | EP1137884A1 (ja) |
| JP (1) | JP2002532655A (ja) |
| KR (1) | KR20010108015A (ja) |
| CN (1) | CN1338031A (ja) |
| AU (1) | AU2199599A (ja) |
| CA (1) | CA2354076A1 (ja) |
| NO (1) | NO20012845L (ja) |
| WO (1) | WO2000036302A1 (ja) |
Families Citing this family (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7147955B2 (en) * | 2003-01-31 | 2006-12-12 | Societe Bic | Fuel cartridge for fuel cells |
| DE102006016571B4 (de) * | 2006-04-06 | 2008-09-04 | Bartels Mikrotechnik Gmbh | Verfahren und Vorrichtung zum automatisierten Fördern von Flüssigkeiten oder Gasen |
| EP2156179B1 (en) * | 2007-04-04 | 2021-08-18 | The Regents of The University of California | Methods for using a nanopore |
| FR2929450B1 (fr) * | 2008-03-28 | 2010-08-20 | Seb Sa | Appareil electromenager comportant une pompe piezo-electrique munie d'un circuit d'alimentation electrique simplifie |
| CN101328879B (zh) * | 2008-05-23 | 2010-06-23 | 北京联合大学 | 一种阀-振子一体有阀压电泵 |
| US10344753B2 (en) * | 2014-02-28 | 2019-07-09 | Encite Llc | Micro pump systems |
| KR102457681B1 (ko) * | 2014-10-13 | 2022-10-20 | 알파 에스알엘 | 유체 제품들을 위한 양변위 펌프 및 펌핑 그룹 및 그의 사용을 위한 방법 |
| US10330095B2 (en) | 2014-10-31 | 2019-06-25 | Encite Llc | Microelectromechanical systems fabricated with roll to roll processing |
| US10563642B2 (en) * | 2016-06-20 | 2020-02-18 | The Regents Of The University Of Michigan | Modular stacked variable-compression micropump and method of making same |
Family Cites Families (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3963380A (en) | 1975-01-06 | 1976-06-15 | Thomas Jr Lyell J | Micro pump powered by piezoelectric disk benders |
| JP2733766B2 (ja) | 1986-11-14 | 1998-03-30 | クエニコ、アクチエボラク | 圧電ポンプ |
| GB8701731D0 (en) | 1987-01-27 | 1987-03-04 | Patcentre Benelux Nv Sa | Pumps |
| JPH01174278A (ja) | 1987-12-28 | 1989-07-10 | Misuzu Erii:Kk | インバータ |
| DE4006152A1 (de) * | 1990-02-27 | 1991-08-29 | Fraunhofer Ges Forschung | Mikrominiaturisierte pumpe |
| US5094594A (en) | 1990-04-23 | 1992-03-10 | Genomyx, Incorporated | Piezoelectric pumping device |
| GB2248891A (en) * | 1990-10-18 | 1992-04-22 | Westonbridge Int Ltd | Membrane micropump |
| US5471721A (en) | 1993-02-23 | 1995-12-05 | Research Corporation Technologies, Inc. | Method for making monolithic prestressed ceramic devices |
| DE69431994T2 (de) * | 1993-10-04 | 2003-10-30 | Res Int Inc | Mikro-bearbeitetes fluidbehandlungsvorrichtung mit filter und regelventiler |
| US5802195A (en) * | 1994-10-11 | 1998-09-01 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | High displacement solid state ferroelectric loudspeaker |
| FR2727474B1 (fr) * | 1994-11-25 | 1997-01-10 | Centre Nat Rech Scient | Micro-actionneur integre a decharges electriques et microsysteme comprenant ce micro-actionneur |
| US5632841A (en) | 1995-04-04 | 1997-05-27 | The United States Of America As Represented By The Administrator Of The National Aeronautics And Space Administration | Thin layer composite unimorph ferroelectric driver and sensor |
-
1998
- 1998-12-11 WO PCT/US1998/026389 patent/WO2000036302A1/en not_active Application Discontinuation
- 1998-12-11 AU AU21995/99A patent/AU2199599A/en not_active Abandoned
- 1998-12-11 EP EP98965990A patent/EP1137884A1/en not_active Withdrawn
- 1998-12-11 JP JP2000588515A patent/JP2002532655A/ja not_active Withdrawn
- 1998-12-11 CA CA002354076A patent/CA2354076A1/en not_active Abandoned
- 1998-12-11 CN CN98814353A patent/CN1338031A/zh active Pending
- 1998-12-11 KR KR1020017007298A patent/KR20010108015A/ko not_active Application Discontinuation
-
2001
- 2001-06-08 NO NO20012845A patent/NO20012845L/no not_active Application Discontinuation
Also Published As
| Publication number | Publication date |
|---|---|
| CN1338031A (zh) | 2002-02-27 |
| NO20012845L (no) | 2001-08-07 |
| EP1137884A1 (en) | 2001-10-04 |
| KR20010108015A (ko) | 2001-12-07 |
| NO20012845D0 (no) | 2001-06-08 |
| WO2000036302A1 (en) | 2000-06-22 |
| JP2002532655A (ja) | 2002-10-02 |
| AU2199599A (en) | 2000-07-03 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| FZDE | Discontinued | ||
| FZDE | Discontinued |
Effective date: 20041213 |