CA2322828A1 - Palier a air a rattrapage de jeu avec diaphragme - Google Patents

Palier a air a rattrapage de jeu avec diaphragme Download PDF

Info

Publication number
CA2322828A1
CA2322828A1 CA002322828A CA2322828A CA2322828A1 CA 2322828 A1 CA2322828 A1 CA 2322828A1 CA 002322828 A CA002322828 A CA 002322828A CA 2322828 A CA2322828 A CA 2322828A CA 2322828 A1 CA2322828 A1 CA 2322828A1
Authority
CA
Canada
Prior art keywords
diaphragm
preload
bearing
hydrostatic bearing
pad
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Abandoned
Application number
CA002322828A
Other languages
English (en)
Inventor
Philip J. Hipol
David R. Hill
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Etec Systems Inc
Original Assignee
Individual
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Individual filed Critical Individual
Publication of CA2322828A1 publication Critical patent/CA2322828A1/fr
Abandoned legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/002—Elastic or yielding linear bearings or bearing supports
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C29/00—Bearings for parts moving only linearly
    • F16C29/02—Sliding-contact bearings
    • F16C29/025—Hydrostatic or aerostatic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/0666—Details of hydrostatic bearings independent of fluid supply or direction of load of bearing pads
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/06—Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662—Details of hydrostatic bearings independent of fluid supply or direction of load
    • F16C32/067—Details of hydrostatic bearings independent of fluid supply or direction of load of bearings adjustable for aligning, positioning, wear or play

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Machine Tool Units (AREA)

Abstract

L'invention concerne un palier hydrostatique à rattrapage de jeu (12) qui comporte un patin (28), un diaphragme (28) et un organe ajustable (32). Le patin comprend une structure de palier (38), une tubulure d'admission (34) et plusieurs orifices (36). Les orifices dirigent un fluide, tel que de l'air, de la tubulure d'admission vers la surface de palier. Le diaphragme est monté sur le patin et l'organe ajustable, qui s'étend dans le sens axial, est accouplé à proximité d'une extrémité à une partie centrale du diaphragme. Le diaphragme transfère une précharge à l'organe ajustable, dans le sens axial. Le palier hydrostatique à rattrapage de jeu selon l'invention présente une répétabilité de performance élevée, sans sources de friction et d'hystérésis.
CA002322828A 1999-02-01 2000-02-01 Palier a air a rattrapage de jeu avec diaphragme Abandoned CA2322828A1 (fr)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US09/241,833 US6315450B1 (en) 1999-02-01 1999-02-01 Diaphragm preload air bearing
US09/241,833 1999-02-01
PCT/US2000/002560 WO2000045060A1 (fr) 1999-02-01 2000-02-01 Palier a air a rattrapage de jeu avec diaphragme

Publications (1)

Publication Number Publication Date
CA2322828A1 true CA2322828A1 (fr) 2000-08-03

Family

ID=22912365

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002322828A Abandoned CA2322828A1 (fr) 1999-02-01 2000-02-01 Palier a air a rattrapage de jeu avec diaphragme

Country Status (8)

Country Link
US (1) US6315450B1 (fr)
EP (1) EP1066475A1 (fr)
JP (1) JP2002535578A (fr)
KR (1) KR20010042415A (fr)
AU (1) AU2750500A (fr)
CA (1) CA2322828A1 (fr)
IL (1) IL138202A0 (fr)
WO (1) WO2000045060A1 (fr)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US6695159B2 (en) * 2002-04-22 2004-02-24 Mi-Jack Products, Inc. Shock absorbing bumper for gantry cranes
EP2281921A1 (fr) * 2009-07-30 2011-02-09 Nederlandse Organisatie voor toegepast -natuurwetenschappelijk onderzoek TNO Procédé et appareil pour le dépôt de couches atomiques
CN103962358A (zh) * 2014-05-12 2014-08-06 江苏科能电力机械有限公司 摆动式浮动支撑结构
CN116160261B (zh) * 2023-04-21 2023-07-07 江苏领臣精密机械有限公司 一种静压导轨的保护机构

Family Cites Families (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1201124A (en) * 1968-03-09 1970-08-05 Ferranti Ltd Improvements relating to fluid bearings
GB1205487A (en) * 1968-03-30 1970-09-16 Ferranti Ltd Improvements relating to bearing systems
US3744858A (en) * 1971-06-15 1973-07-10 Apex Bearings Co Gas bearings
US3758175A (en) * 1972-02-28 1973-09-11 Ingersoll Milling Machine Co Membrane type fluid flow regulator for a hydrostatic bearing
US3799628A (en) * 1972-06-21 1974-03-26 Caterpillar Tractor Co Hydrostatic button bearing with attitude control
CH606851A5 (fr) * 1975-12-02 1978-11-15 Escher Wyss Ag
IT1083098B (it) 1977-07-11 1985-05-21 Dea Spa Macchina utensile o macchina di misura con scorrimento a pattini pneumatici e magnetici
US4191385A (en) 1979-05-15 1980-03-04 Fox Wayne L Vacuum-sealed gas-bearing assembly
JPS56126547A (en) * 1980-03-06 1981-10-03 Makino Milling Mach Co Ltd Machine equipped with load compensating guide face
US4378134A (en) * 1981-10-19 1983-03-29 Excellon Industries Air bearing guide system
US4643590A (en) * 1985-03-15 1987-02-17 Federal Products Corporation Guide system
US4719705A (en) * 1986-06-24 1988-01-19 The Perkin-Elmer Corporation Reticle transporter
US4802774A (en) 1987-10-14 1989-02-07 Brown & Sharpe Manfacturing Co. Gas bearing for guiding relative movement of precision machine parts
US4882847A (en) 1989-02-03 1989-11-28 The Warner And Swasey Company Coordinate measuring machine with improved carriage way arrangement
US4946293A (en) * 1989-02-10 1990-08-07 Brown & Sharpe Manufacturing Company Gas bearing having an auxiliary reservoir
US5257461A (en) 1992-04-27 1993-11-02 Warner & Swasey Coordinate measuring machine construction
US5648690A (en) 1995-03-15 1997-07-15 Hinds; Walter E. Motor system generating orthogonal movement in a single plane

Also Published As

Publication number Publication date
US6315450B1 (en) 2001-11-13
JP2002535578A (ja) 2002-10-22
EP1066475A1 (fr) 2001-01-10
AU2750500A (en) 2000-08-18
IL138202A0 (en) 2001-10-31
WO2000045060A9 (fr) 2001-09-13
WO2000045060A1 (fr) 2000-08-03
KR20010042415A (ko) 2001-05-25

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Legal Events

Date Code Title Description
EEER Examination request
FZDE Discontinued
FZDE Discontinued

Effective date: 20030203