CA2253409A1 - Method and device for manufacturing ink jet printhead - Google Patents

Method and device for manufacturing ink jet printhead Download PDF

Info

Publication number
CA2253409A1
CA2253409A1 CA002253409A CA2253409A CA2253409A1 CA 2253409 A1 CA2253409 A1 CA 2253409A1 CA 002253409 A CA002253409 A CA 002253409A CA 2253409 A CA2253409 A CA 2253409A CA 2253409 A1 CA2253409 A1 CA 2253409A1
Authority
CA
Canada
Prior art keywords
ink
jet printhead
ink jet
photo
sensitive layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
CA002253409A
Other languages
French (fr)
Other versions
CA2253409C (en
Inventor
Tse-Chi Mou
Arnold Chang-Mou Yang
Bill Yuan-Chung Chuang
Chin-Yi Chou
Jing-Yuan Ho
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Microjet Technology Co Ltd
Original Assignee
Microjet Technology Co., Ltd.
Tse-Chi Mou
Arnold Chang-Mou Yang
Bill Yuan-Chung Chuang
Chin-Yi Chou
Jing-Yuan Ho
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Microjet Technology Co., Ltd., Tse-Chi Mou, Arnold Chang-Mou Yang, Bill Yuan-Chung Chuang, Chin-Yi Chou, Jing-Yuan Ho filed Critical Microjet Technology Co., Ltd.
Priority to CA002253409A priority Critical patent/CA2253409C/en
Priority to EP98309099A priority patent/EP0999056B1/en
Publication of CA2253409A1 publication Critical patent/CA2253409A1/en
Application granted granted Critical
Publication of CA2253409C publication Critical patent/CA2253409C/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1631—Manufacturing processes photolithography
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1601—Production of bubble jet print heads
    • B41J2/1603—Production of bubble jet print heads of the front shooter type
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1623—Manufacturing processes bonding and adhesion
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/1635—Manufacturing processes dividing the wafer into individual chips
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B41—PRINTING; LINING MACHINES; TYPEWRITERS; STAMPS
    • B41J—TYPEWRITERS; SELECTIVE PRINTING MECHANISMS, i.e. MECHANISMS PRINTING OTHERWISE THAN FROM A FORME; CORRECTION OF TYPOGRAPHICAL ERRORS
    • B41J2/00—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed
    • B41J2/005—Typewriters or selective printing mechanisms characterised by the printing or marking process for which they are designed characterised by bringing liquid or particles selectively into contact with a printing material
    • B41J2/01—Ink jet
    • B41J2/135—Nozzles
    • B41J2/16—Production of nozzles
    • B41J2/1621—Manufacturing processes
    • B41J2/164—Manufacturing processes thin film formation
    • B41J2/1645—Manufacturing processes thin film formation thin film formation by spincoating

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Particle Formation And Scattering Control In Inkjet Printers (AREA)

Abstract

A manufacturing method and a device of an ink jet printhead are provided. The ink jet printhead includes a plurality of ink-containing holes for containing therein an ink, a nozzle plate having thereon a plurality of nozzles corresponding to the plurality of ink-containing holes for ejecting therethrough the ink, and a chip for controlling the ejection of the ink. The device includes a base, a flute provided on the base, and a vacuum apparatus. The method includes steps of (a) forming a photo-sensitive layer on the chip, (b) forming the plurality of ink-containing holes on the photo-sensitive layer, (c) placing the nozzle plate on the photo-sensitive layer, and (d) heating the photo-sensitive layer to bond the chip and the nozzle plate.
CA002253409A 1998-11-04 1998-11-04 Method and device for manufacturing ink jet printhead Expired - Fee Related CA2253409C (en)

Priority Applications (2)

Application Number Priority Date Filing Date Title
CA002253409A CA2253409C (en) 1998-11-04 1998-11-04 Method and device for manufacturing ink jet printhead
EP98309099A EP0999056B1 (en) 1998-11-04 1998-11-06 Method for manufacturing an ink jet printhead

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
CA002253409A CA2253409C (en) 1998-11-04 1998-11-04 Method and device for manufacturing ink jet printhead
EP98309099A EP0999056B1 (en) 1998-11-04 1998-11-06 Method for manufacturing an ink jet printhead

Publications (2)

Publication Number Publication Date
CA2253409A1 true CA2253409A1 (en) 2000-05-04
CA2253409C CA2253409C (en) 2003-06-17

Family

ID=32963006

Family Applications (1)

Application Number Title Priority Date Filing Date
CA002253409A Expired - Fee Related CA2253409C (en) 1998-11-04 1998-11-04 Method and device for manufacturing ink jet printhead

Country Status (2)

Country Link
EP (1) EP0999056B1 (en)
CA (1) CA2253409C (en)

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4953287A (en) * 1987-07-01 1990-09-04 Hewlett-Packard Company Thermal-bonding process and apparatus
JPS63265647A (en) * 1988-02-22 1988-11-02 Seiko Epson Corp Manufacture of on-demand type ink jet printer head
DE69329359T2 (en) * 1992-06-01 2001-03-08 Canon Kk Method of manufacturing an ink jet recording head
JPH07169660A (en) * 1993-09-09 1995-07-04 Xerox Corp Equipment and method for joining wafer pair
JPH08156267A (en) * 1994-12-02 1996-06-18 Sharp Corp Production of ink jet recording head
US5907333A (en) * 1997-03-28 1999-05-25 Lexmark International, Inc. Ink jet print head containing a radiation curable resin layer
US6106096A (en) * 1997-12-15 2000-08-22 Lexmark International, Inc. Printhead stress relief

Also Published As

Publication number Publication date
EP0999056B1 (en) 2006-04-12
CA2253409C (en) 2003-06-17
EP0999056A1 (en) 2000-05-10

Similar Documents

Publication Publication Date Title
AU3457295A (en) Manufacturing method of ink jet head, ink jet head manufactured by same and ink jet device having ink jet head
EP0856403A3 (en) Ink ejecting printhead and process
EP1344649A3 (en) Fabrication of functional device mounting board making use of inkjet technique
CA2016529A1 (en) Method of forming a pattern on a surface
EP0864423A3 (en) Ink transfer printing apparatus with drop volume adjustment and process therefor
CA2286122A1 (en) Operation of droplet deposition apparatus
EP0895865A3 (en) Monolithic ink jet printhead
EP0820867A3 (en) Ink printing apparatus using ink surfactants
CA2179869A1 (en) Manufacturing Method of Ink Jet Head
EP1238708A4 (en) Ink jet recorder and method of manufacturing functional liquid applied substrate
EP0739739A3 (en) Process for producing an ink jet recording head
JPH11129482A (en) Ink jet print head and production of filter element
CA2200194A1 (en) Method of multi-tone printing
WO2006004970B1 (en) Integrated black and colored ink printheads
EP0913257A3 (en) Apparatus for generating high frequency ink ejection and ink chamber refill
CA2342367A1 (en) Drop on demand ink jet printing apparatus
CN100406259C (en) Liquid ejection element and manufacturing method therefor
CA2301864A1 (en) Method of manufacture of printing apparatus
CA2348929A1 (en) Droplet ejection apparatus
WO2002102597A3 (en) Compact ink jet printhead
EP0930168A4 (en) Ink jet printer head and method for manufacturing the same
AU2396101A (en) Printhead with multiple ink feeding channels
EP0401996A3 (en) Process for the manufacture of thermal ink jet printing heads and heads obtained in this way
CA2253409A1 (en) Method and device for manufacturing ink jet printhead
EP0878319A3 (en) Recording material for ink jet printing

Legal Events

Date Code Title Description
EEER Examination request
MKLA Lapsed