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Canon Inc
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Individual
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Priority claimed from JP34547893Aexternal-prioritypatent/JP3185080B2/en
Priority claimed from JP34547793Aexternal-prioritypatent/JP2961485B2/en
Application filed by IndividualfiledCriticalIndividual
Priority claimed from CA002138736Aexternal-prioritypatent/CA2138736C/en
Publication of CA2253019A1publicationCriticalpatent/CA2253019A1/en
Application grantedgrantedCritical
Publication of CA2253019CpublicationCriticalpatent/CA2253019C/en
An electron-emitting device having an electroconductive film including an electron-emitting region and arranged between a pair of electrodes is manufactured by forming an electroconductive film on a substrate and producing an electron-emitting region in the electroconductive film. The electroconductive film is formed on the substrate by heating the substrate in an atmosphere containing a gasified organic metal compound to a temperature higher than the decomposition of the gasified organic metal compound.
CA002253019A1993-12-221994-12-21Method of manufacturing electron-emitting device
Expired - Fee RelatedCA2253019C
(en)
Electron-emitting device and method of manufacturing the same as well as electron source and image forming apparatus comprising such electron-emitting device
Target used for formation of superconductive oxide film, process of producing thereof, and process of forming superconductive oxide film on substrate using the same